放电脉冲重频准分子器在不同应用领域的发展现状 -

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放电脉冲重频准分子器在不同应用领域的发展现状

俄罗斯科学院西伯利亚分院强电流研究所, 托木斯克 634055

基金项目:

Supported by Russian Foundation for Basic Research Project(No.10-08-90002a)

详细信息

中图分类号:TN248.2
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出版历程
- 收稿日期:2010-08-11
- 修回日期:2010-10-13
- 刊出日期:2011-02-25

Development of discharge pulse repetition rate excimer lasers for different applications

Institute of High Current Electronics of Siberian Branch of Russian Academy of Sciences,Tomsk 634055,Russia

Funds:

Supported by Russian Foundation for Basic Research Project(No.10-08-90002a)

摘要

摘要:研究了脉冲宽度为25~40 ns的放电脉冲XeCl准分子器的工作参数。结果显示, 器产生的脉冲能量为0.2~0.7 J,重复频率为100 Hz,表明在泵浦功率为2.8~3.3 MW/cm3时, 器实现了2.6％的效率和3.8％的本征效率。
- 准分子器/
- 泵浦功率/
- 体放电/
- 预电离/
- 效率/
- 脉冲持续时间/
- 气体混合物
Abstract:The working parameters of the discharge pulse-periodic XeCl lasers with pulse duration of 25-40 ns are researched. Results demonstrate that the lasers generate the pulses of radiation with energies of 0.2-0.7 J and operate with a repetition rate up to 100 Hz. It is shown that the total laser efficiency of 2.6% and the intrinsic efficiency of 3.8% are realized with the pumping power of 2.8-3.3 MW/cm.
- excimer laser/
- pumping power/
- bulk discharge/
- preionization/
- laser efficiency/
- pulse duration/
- gas mixture

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参考文献 (1)

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