三维腹腔镜端面宽带增透膜的研制 -

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三维腹腔镜端面宽带增透膜的研制

长春理工大学,吉林长春 130012

详细信息

作者简介:
魏孜洵(1985—),女,硕士研究生,主要从事现代光学制造技术方面的研究。E-mail:guder222@yahoo.com.cn 付秀华(1963—),女,教授,主要从事光学薄膜及半导体器制造工艺等方面的研究。
魏孜洵(1985—),女,硕士研究生,主要从事现代光学制造技术方面的研究。E-mail:guder222@yahoo.com.cn 付秀华(1963—),女,教授,主要从事光学薄膜及半导体器制造工艺等方面的研究。

中图分类号:O484.1
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出版历程
- 收稿日期:2010-12-21
- 修回日期:2011-02-23
- 刊出日期:2011-04-25

Fabrication of broadband AR coating for three-dimensional laparoscopic facet

School of Opto-electronic Engneering,Changchun University of Science and Technology,Changchun 130012,China

摘要

摘要:根据由多组镜片组成的三维腹腔镜对高透过率和不失真成像的要求,研究并选择了合适的薄膜材料;采用电子束真空镀膜加以离子辅助沉积系统,利用膜系设计软件完成了宽带增透膜的非周期膜系设计。通过调整镀膜工艺参数并采用光控与晶控同时监控的方法,减少了膜厚控制误差,成功地在多组镜片上镀制了宽带增透膜。测试试验显示,制备的膜层在400~700 nm波段的平均反射率＜0.5%,而且颜色不失真,膜层牢固,抗腐蚀效果较好,满足医用光学仪器的使用要求。
- 三维腹腔镜/
- 光学增透膜/
- 真空镀膜/
- 离子辅助沉积
Abstract:According to the requirements of a three-dimensional laparoscope consisting of many group lenses for the high transmittance and distortionless imaging, the appropriate film materials were chosen. Then, a coating design softwave was taken to realize the nonperiod coating system design of the anti-reflective coating by using the vacuum evaporation method and an ion assistant deposition system. By adjusting parameters of coating film and using the technique of optical control and crystal control simultaneously, the thick control error was reduced and the anti-reflection coating was coated on the lenses that were used in the laparoscopy successfully. The test results demonstrate that the average reflectance of the preparated coating is less than 0.5% and it shows color distortionless, securely layers and better effects of resistant to corrosion. These results meet operating requirements of medical optical instruments.
- three-dimensional laparoscopy/
- optical anti-reflection film/
- vacuum evaporation coating/
- ion assistant deposition

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参考文献 (1)

[1] 虞啟琏,王娟萍. 内窥镜设计制造中渐变折射率透镜的应用前景[J]. 中国医疗器械信息 ,1998,4(1):40-42. YU Q L,WANG J P. The application of GRN lens in endoscopes[J].China Academic J. Electronic Publishing House,1998,4(1):40-42.(in Chinese) [2] 唐晋发,顾培夫,刘旭,等.现代光学薄膜技术[M]. 杭州:浙江大学出版社,2006,10:61-94. TANG J F,GU P F,LIU X,et al..Modern Optical Thin Film Technology[M]. Hangzhou:Zhejiang University Press,2006,10:61-94.(in Chinese) [3] 钟迪生.真空镀膜[M]. 沈阳:辽宁大学出版社,2001:181-189. ZHONG D SH.Vacuum Coating[M]. Shenyang:Liaoning University Press,2001:181-189.(in Chinese) [4] 韩军,孔英秀,尚小燕,等. 膜料吸收系数对光学膜厚宽带监控的影响[J]. 光学技术 ,2005,31(5):672-678. HAN J,KONG Y X,SHANG X Y,et al.. Absorption coefficient of thin-film material affection optical coating wideband monitoring technology[J].Opt. Technique,2005,31(5):672-678. [5] 王希权. 可见光区高增透膜的理论计算[J]. 应用光学 ,2000,21(3):47-49. WANG X Q. Theoretical calculation of high anti-reflective film in visible spectrum region[J].J. Appl. Opt.,2000,21(3):47-49.(in Chinese) [6] ZHANG CH,WANG Y T,LU W Q. Single-wavelength monitoring method for optical thin-film coating[J].Opt. Eng.,2004,43(6):1439-1452. [7] 谭宇,梁宏军,刘永强,等. 用二氧化钛、二氧化硅和氟化镁膜料镀制0.4~1.1 μm超宽带增透膜[J]. 应用光学 ,2007,28(5):145-149. TAN Y,LIANG H J,LIU Y Q,et al.. 0.4 ~1.1 μm AR film prepared with TiO₂, SiO₂and MgF₂[J].J. Appl. Opt.,2007,28(5):145-149.(in Chinese) [8] 贺才美,付秀华,张家斌,等. 可见与红外双波段宽带增透膜的研制[J]. 光学学报 ,2009(10):83-85. HE C M,FU X H,ZHANG J B,et al.. Study and fabrication of visible and IR dual-band broadband antireflection coating[J].Acta Opt. Sinica,2009(10):83-85. [9] 黄光伟,田维坚,卜江萍. 超宽带增透膜新的设计法[J]. 光子学报 ,2007,36(9):324-327. HUANG G W,TIAN W J,et al.. New design of super wide bandwidth antireflection film[J].Acta Photonica Sinica,2007,36(9):324-327(in Chinese) [10] 缪毅强,毛书正,罗琦琨. 宽带增透膜反射光谱的理论与实测偏差的修正[J]. 红外与毫米波学报 ,2001,20(6):225-227. MIAO Y Q,MAO SH ZH,et al.. Correction of deviation between theory and experiment for reflection spectrum of broad-band anti-reflection coating[J].J. Infrared and Millimeter Waves,2001,20(6):225-227.(in Chinese) [11] MACLEOD H A.Thin-Film Optical Filters[M]. Philadelphia:Institute of Physics,2001.

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