基于差分传递函数法的大口径平面镜检测 -

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基于差分传递函数法的大口径平面镜检测

doi:10.37188/CO.2022-0122

安其昌^{1, 2,},
姜晰文^{1, 2},
李洪文^{1, 2},
唐境^{1, 2}

1.
中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
2.
吉林省智能波前传感与控制重点实验室, 吉林长春130033

基金项目:国家自然科学基金项目（No. 62005279）；中国科学院青年创新促进会（No. 2020221）；中国科学院装备研制项目（No. YJKYYQ20200057）；吉林省科技发展计划（No. 20220402032GH）

详细信息

作者简介:
安其昌（1988—），男，山西太原人，博士，助理研究员，中国科学院青年创新促进会成员。2011年于中国科学技术大学获得工学学士学位，2018 年于中国科学院大学获得博士学位，研究方向为大口径光机系统检测装调。E-mail：anjj@mail.ustc.edu.cn

中图分类号:TH751
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- 被引次数:0
出版历程
- 收稿日期:2022-06-13
- 修回日期:2022-07-15
- 网络出版日期:2022-08-12

Detection of large aperture flat mirror based on the differential optics transfer function method

AN Qi-chang^{1, 2,},
JIANG Xi-wen^{1, 2},
LI Hong-wen^{1, 2},
TANG Jing^{1, 2}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
Jilin Provincial Key Laboratory of Intelligent Wavefront Sensing and Control, Changchun 130033, China

Funds:Supported by the National Natural Science Foundation of China (No. 62005279); the Youth Innovation Promotion Association of CAS (No. 2020221); the Equipment Development Project of the Chinese Academy of Sciences (No. YJKYYQ20200057); Jilin Science and Technology Development Program (No. 20220402032GH)

摘要

摘要:
为了实现大口径平面镜的原位检测，本文基于差分传递函数结合瑞奇康芒检测架构，利用全息检测方法结合瑞奇康芒法，通过光瞳的遮拦编码实现大口径平面镜的面形检测。首先，对基于差分传递函数法的大口径平面镜检测基本原理进行了推导，并将现有的大口径波前与重建波前进行对比。最后，利用变形镜搭建了检测光路。本文方法所得到面形与输入面形相关性不低于70%。本文的研究成果对宇宙“首光”探测以及“一黑两暗三起源”等宇宙学基础命题的研究均有十分重要的意义。
- 大口径平面镜/
- 全息传感/
- 差分光学传递函数/
- 瑞奇康芒法
Abstract:
In order to realize the in-situ detection of large aperture plane mirrors, wavefront detection is achieved by a combination of the Ritchey-Common method and holographic detection through the differential transfer function, combined with the actual Ritchey-Common detection architecture, and through the occlusion code of the pupil. Firstly, the principle of large aperture plane mirror detection based on differential transfer function method is derived, and the existing large aperture wavefront is compared with the reconstructed wavefront. Finally, the detection light path is built by using deformable mirrors. The correlation between the surface shape obtained by this method and the input surface shape is not less than 70%. This paper is of great significance to the fundamental cosmological propositions such as the detection of the "first light" of the universe and the "one black, two dark and three origins".
- large flat mirror/
- holographic sensing/
- differential optical transfer function/
- Ritchey-Common

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图 1孔径变分下的标准波前主成分分析结果

Figure 1.Principal component analysis results of standard wavefront

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图 2对彗差与像散混合波前的差分光学传递函数解算幅值（a）及相位（b）

Figure 2.(a) The amplitude and (b) phase calculated by the differential optical transfer function for the mixed wavefront of coma and astigmatism

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图 3孔径变分前（a）、后（b）焦斑能量分布

Figure 3.Energy distributions of the focal spot before (a) and after (b) aperture variation

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图 42 m级大口径反射镜面形差分光学传递函数解算结果。（a）原始波前；（b）恢复波前；（c）原始波前结构函数；（d）恢复波前结构函数

Figure 4.Differential optical transfer function solutions for a 2 m level large aperture mirror shape. (a) Original wavefront. (b) Recovered wavefront. (c) Original wavefront structure function. (d) Recovered wavefront structure function

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图 5原始波前与复原结果的互相关函数

Figure 5.Cross correlation function between the original wavefront and restoration′s result

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图 6基于全息瑞奇-康芒检测大口径平面镜离散孔径检测架构。（a）光瞳架构；（b）检测光路；（c）孔径变分解算过程

Figure 6.Large aperture planar mirror discrete aperture detection architecture based on holographic Ritchey-Common detection. (a) Pupil architecture. (b) Detection optical path. (c) Aperture variational calculation process

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图 7低阶像差组合的（a）原始波前与（b）重建波前

Figure 7.(a) Original wavefront and (b) reconstructed wavefront of low-order aberration combination

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图 8原始波前与重建波前对应的Zernike系数对比

Figure 8.Comparison of Zernike coefficients corresponding to the original wavefront and the reconstructed wavefront

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图 9解算得到的（a）幅值与（b）相位信息以及（c）实现装置图

Figure 9.(a) The amplitude and (b) phase information obtained from the solution and (c) the implementation device

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