用于量子传感的窄线宽无磁垂直腔面发射器 -

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用于量子传感的窄线宽无磁垂直腔面发射器

doi:10.37188/CO.2022-0135

张星^{1, 2,,},
张建伟^{1, 2},
周寅利^{1, 2},
薛洪波³,
宁永强¹,
王立军¹

1.
中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
2.
长春中科长光时空光电技术有限公司, 吉林长春 130102
3.
中国科学院国家空间科学中心, 北京 100190

基金项目:国家重点研发计划（No. 2018YFB2002401）；国家自然科学基金项目（No. 62090060, No. 52172165）；中国科学院科技网络服务计划项目（No. KFJ-STS-QYZD-2021-15-001）；中国科学院青年创新促进会（No. 2017260, No. 2018181）

详细信息

作者简介:
张　星（1983—），男，吉林辉南人，博士，硕士生导师，2005年于吉林大学获得学士学位；2011年于中国科学院长春光学精密机械与物理研究所获得博士学位，主要从事窄线宽垂直腔面发射器芯片研究。E-mail：zhangx@ciomp.ac.cn

中图分类号:TN248.4
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出版历程
- 收稿日期:2022-06-17
- 修回日期:2022-06-28
- 网络出版日期:2022-08-03

Narrow line width and magnetism-free vertical-cavity surface-emitting lasers for quantum sensing

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
CGPhoton Inc., Changchun 130102, China
3.
National Space Science Center, Chinese Academy of Sciences, Beijing 100190, China

Funds:Supported by National Key Research and Development Program (No. 2018YFB2002401); National Natural Science Foundation of China (No. 62090060, No. 52172165); Science and Technology Service Network Program of the Chinese Academy of Sciences (No. KFJ-STS-QYZD-2021-15-001); Youth Innovation Promotion Association of the Chinese Academy of Sciences (No. 2017260, No. 2018181)

More Information

Corresponding author:zhangx@ciomp.ac.cn

摘要

摘要:
为了研制出表面微透镜集成外腔的垂直腔面发射器（VCSEL），实现窄线宽无磁输出，满足原子磁强计等量子传感器应用要求，本文设计并生长了适合于表面集成微透镜的VCSEL外延结构，完成了表面微透镜集成外腔VCSEL器件制备，在电极材料方面选取无磁材料以满足应用要求。实验结果表明：研制的VCSEL器件工作温度达到90 °C，波长为896.3 nm，功率为1.52 mW，边模抑制比为36.3 dB，线宽为38 MHz，封装为模组后的磁场强度低于0.03 nT。结果表明本文研制的窄线宽无磁VCSEL满足量子传感的应用需求。
- 垂直腔面发射器/
- 量子传感/
- 高温/
- 窄线宽/
- 无磁
Abstract:
In order to realize single mode, narrow linewidth and low magnetism field intensity operation of lasers, Vertical-Cavity Surface-Emitting Lasers (VCSEL) with integrated micro-lens extended cavity was designed and fabricated. First, an epitaxial structure suitable for the micro-lens integration was designed and grown by Metal Organic Chemical Vapor Deposition (MOCVD). The fabrication steps of the micro-lens integrated VCSEL was carried out and the magnetism-free material was used in the electrode deposition. Experimental results indicate that the operating temperature is 90 °C, the laser wavelength is 896.3 nm, the laser power is 1.52 mW, the side mode suppression ratio is as high as 36.3 dB and the operating magnetic field intensity is less than 0.03 nT. A narrow line width and magnetism-free VCSEL suitable for quantum sensing was demonstrated.
- Vertical-Cavity Surface-Emitting Laser (VCSEL)/
- quantum sensing/
- high temperature/
- narrow linewidth/
- magnetism-free

HTML全文

图 1VCSEL器件结构示意图

Figure 1.Schematic diagram of VCSEL structure

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图 2封装后的VCSEL

Figure 2.The packaged VCSEL

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图 3湿法刻蚀微透镜的工艺流程

Figure 3.Fabrication steps of micro-lens wet etching

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图 4微透镜表面形貌AFM测试结果

Figure 4.Surface morphology of the micro-lens by AFM

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图 525 °C下测试得到的功率-电流-电压曲线

Figure 5.P-I-Vcharacteristics at room temperature (25 °C)

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图 620~90 °C下测试得到的功率-电流曲线

Figure 6.P-Icharacteristics under 20~90 °C

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图 7VCSEL的输出光谱测试结果

Figure 7.Measured output spectrum of the VCSEL

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图 8VCSEL线宽测试结果

Figure 8.Measured frequency line width of the VCSEL

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图 9无磁封装VCSEL光源模组

Figure 9.Packaged VCSEL magnetism-free module

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图 10VCSEL模组剩磁测试结果

Figure 10.Testing results of the remaining magnetic field intensity of VCSEL

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