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半导体 器侧向模式控制技术的研究进展

汪丽杰,佟存柱,王延靖,陆寰宇,张新,田思聪,王立军

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汪丽杰, 佟存柱, 王延靖, 陆寰宇, 张新, 田思聪, 王立军. 半导体 器侧向模式控制技术的研究进展[J]. , 2022, 15(5): 895-911. doi: 10.37188/CO.2022-0143
引用本文: 汪丽杰, 佟存柱, 王延靖, 陆寰宇, 张新, 田思聪, 王立军. 半导体 器侧向模式控制技术的研究进展[J]. , 2022, 15(5): 895-911.doi:10.37188/CO.2022-0143
WANG Li-jie, TONG Cun-zhu, WANG Yan-jing, LU Huan-yu, ZHANG Xin, TIAN Si-cong, WANG Li-jun. Recent advances in lateral mode control technology of diode lasers[J]. Chinese Optics, 2022, 15(5): 895-911. doi: 10.37188/CO.2022-0143
Citation: WANG Li-jie, TONG Cun-zhu, WANG Yan-jing, LU Huan-yu, ZHANG Xin, TIAN Si-cong, WANG Li-jun. Recent advances in lateral mode control technology of diode lasers[J].Chinese Optics, 2022, 15(5): 895-911.doi:10.37188/CO.2022-0143

半导体 器侧向模式控制技术的研究进展

doi:10.37188/CO.2022-0143
基金项目:国家自然科学基金(No. 62025506, No. 62134008, No. 61790584);中国科学院青年创新促进会(No. 2021217);长春市科技计划发展项目(No. 21SH6)
详细信息
    作者简介:

    汪丽杰(1985—),男,河北石家庄人,副研究员,硕士生导师,2013年于中国科学院长春光学精密机械与物理研究所获得博士学位,主要从事高亮度半导体 方面的研究。E-mail:wanglijie@ciomp.ac.cn

    佟存柱(1976—),男,吉林伊通人,研究员,博士生导师,2005年于中国科学院半导体研究所获得博士学位,主要从事半导体 方面的研究。E-mail:tongcz@ciomp.ac.cn

  • 中图分类号:TN248.4

Recent advances in lateral mode control technology of diode lasers

Funds:Supported by National Natural Science Foundation of China (No. 62025506, No. 62134008, No. 61790584); Youth Innovation Promotion Association, CAS (No. 2021217); Changchun City Science and Technology Development Plan (No. 21SH6)
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  • 摘要:

    高功率半导体 器在固体或光纤 器泵浦、材料加工、 雷达、空间通讯及国防等领域具有重大需求,但传统器件面临发散角大、光束质量差、亮度低的难题,限制了其直接应用。宽区半导体 器具有输出功率和转换效率高的优点,但其侧向模式受多种物理效应的影响,高电流下激射模式数很大,导致远场宽度随电流增大迅速展宽,光束质量非常差,成为制约半导体 亮度提高的关键瓶颈难题。因此,需要对半导体 器的侧向模式进行控制。本文首先从半导体 器的侧向模式影响机制出发,分析了其侧向模式特性及光场分布与器件结构的关联关系;接着,介绍了目前主要的侧向模式控制技术,通过抑制高阶模式及侧向远场展宽,实现光束质量的改善及 亮度的提升。采用先进的侧向模式控制技术,可从芯片层次发展新型的高亮度半导体 器,有利于拓展半导体 器应用领域及降低应用成本,具有重要的研究意义。

  • 图 1半导体 器的侧向模式影响机制

    Figure 1.Influence mechanisms of diode laser lateral modes

    图 2不同阶侧模随电流增大时光场分布变化

    Figure 2.Simulated near-field distributions of different order lateral modes as a function of increased current

    图 3半导体 器不同阶侧模的近场和远场分布

    Figure 3.Calculated (a) near-field and (b) far-field profiles of the lateral mode with different mode orders

    图 4(a)增益导引、(b)质子注入及(c)二次外延电流阻挡层的半导体 器侧向电流扩散示意图

    Figure 4.Schematic diagram of lateral current spreading for diode lasers utilizing (a) gain-guiding, (b) ion implantation, (c) current-blocking layers after the two-step epitaxial growth

    图 5空间电流调制(SCM)半导体 器的结构示意图

    Figure 5.Schematic diagram of diode laser with Spatial Current-Modulated (SCM) structure

    图 6侧向脊波导宽区半导体 器的结构示意图

    Figure 6.Schematic diagram of broad-area diode laser with multiple lateral ridge waveguides

    图 7基于LLGS结构的布拉格反射波导 器结构示意图

    Figure 7.Schematic diagram of bragg reflection waveguide laser with Ladder Like Groove Structure (LLGS)

    图 8微条耦合宽区(MSBA)半导体 器的结构示意图

    Figure 8.Schematic diagram of GaSb-based microstripebroad-area (MSBA) lasers

    图 9GaSb基半导体 器鱼骨形微光学结构示意图

    Figure 9.Schematic diagram of GaSb based diode laser with fish bone micro structures

    图 10锯齿微结构 器的结构示意图

    Figure 10.Schematic diagram of the laser with sawtooth micro structure

    图 11箭头型沟槽微光学结构 器的结构示意图

    Figure 11.Schematic diagram of diode laser with arrow-trench micro structure

    图 12(a)刻蚀微孔的显微镜照片及(b)不同的 远场形貌

    Figure 12.(a) Micrograph of etched micro-holes and (b) different far-field patterns under various currents

    图 13半导体 器不同模式的近场分布及损耗剪裁位置

    Figure 13.Calculated near-field profiles of the lateral modes with different orders and the loss tailoring placement

    图 14(a)损耗调控宽区半导体 器结构示意图;(b)测得的有结构器件和传统宽区结构器件在不同电流下的侧向光束质量对比

    Figure 14.(a) Schematic diagram of the loss tailoring BAL; (b)measured lateral beam quality of the structured and unstructured BALs at different currents

    图 15微结构 器在室温连续工作下的功率-电流-电压特性曲线

    Figure 15.Measured power-current-voltage characteristics of diode lasers with microstructures

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  • 收稿日期:2022-06-24
  • 修回日期:2022-07-19
  • 网络出版日期:2022-08-04

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