Design and fabrication of liquid crystal wavefront corrector based on mask lithography
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摘要:
液晶波前校正器通常基于液晶显示器的工艺制备而成，因此其研制成本高、定制难度大。本文基于掩模光刻法制备液晶波前校正器，以实现液晶波前校正器的专用化、低成本研制。基于掩模光刻技术设计并制备了91像素的无源液晶驱动电极，并封装成液晶光学校正单元。设计并制备了驱动连接电路板，实现了液晶光学驱动单元和驱动电路板的匹配对接。对液晶波前校正器响应特性进行检测。结果显示，其相位调制量为5.5个波长，响应时间为224 ms。利用Zygo干涉仪进行球面波的产生和静态倾斜像差的校正。结果显示，其可以产生正负离焦波前，且对水平倾斜像差校正后，Zernike多项式中第一项的值从1.18降至0.16，校正幅度达86%，实现了像差的有效校正。本文的研究工作可为液晶波前校正器的研制提供新思路，进而拓宽其应用领域和场景。
Abstract:Liquid crystal wavefront correctors (LCWFCs) exhibit high development cost and customization difficulties due to being fabricated based on the process technology of liquid crystal displays. To achieve specialized and low-cost development of LCWFCs, a liquid crystal wavefront corrector is fabricated by using the mask lithography method. Firstly, a 91-pixel passive liquid crystal driving electrode is designed and prepared based on the mask lithography technology and then, packaged as a liquid crystal optical correction unit. A circuit board for driver connection is designed and prepared to connect the optical correction unit and the driving circuit board. Next, the response characteristics of the LCWFC are tested, and the results show that the phase modulation is 5.5 λ, and the response time is 224 ms. Finally, the spherical waves are obtained and the static tilt aberrations are corrected based on Zygo interferometer. The results show that the LCWFC can generate positive and negative defocused wavefronts. Further, after correction of the horizontal tilt aberration, the coefficient of the first term of the Zernike polynomials is decreased from 1.18 to 0.16. Therefore, the aberration is corrected with the amplitude of 86%. This work may provide new ideas for the development of LCWFCs, and then expanding their application fields and scenarios.
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图 1 （a）未施加电压及（b）施加电压的液晶分子排列
Figure 1. Arrangement of liquid crystal molecules under the conditions (a) without applied voltage and (b) with applied voltage
图 2 本文制备的液晶无源驱动电极。（a）驱动电极结构；（b）液晶盒封装结构；（c）电极间走线
Figure 2. The liquid crystal passive driving electrode prepared in this paper. (a) Structure of driving electrode; (b) packaging structure of liquid crystal cell; (c) wiring between electrodes
图 4 （a）、（b）镀金驱动电极不同位置的显微镜照片；（c）封装的液晶盒
Figure 4. (a), (b) Different location pictures of gold-plated driving electrodes captured by the microscope; (c) packaged liquid crystal cell
图 6 液晶波前校正器响应特性测试光路
Figure 6. Optical layout for testing the response characteristic of liquid crystal wavefront corrector
图 7 （a）单像素驱动响应结果；（b）驱动通道与像素对应位置关系
Figure 7. (a) Response results with single pixel driving; (b) corresponding relationship between the driving channel and pixel position
图 8 （a）示波器测量的光强变化曲线；（b）时间与相位关系曲线
Figure 8. (a) Intensity curve measured by oscilloscope; (b) phase as a function of response time
图 9 （a）灰度级与相位关系曲线及（b）相位调制误差
Figure 9. (a) Phase as a function of gray level; (b) phase modulation error
图 11 Zygo干涉仪的初始测量结果及产生的平面波。（a）干涉条纹；（b）原始波面；（c）相对测量波面
Figure 11. Initial wave measurement results by Zygo interferometer and the resulting plane wave. (a) Interference fringe, (b) initial wave surface and (c) relative measured wavefront
图 12 正负离焦像差球面波。（a）、（b）、（c）为施加正离焦的干涉条纹、立体波面及波前；（d）、（e）、（f）为施加负离焦的干涉条纹、立体波面及波前
Figure 12. Positive and negative defocused aberration spherical wave. (a) Interference fringe, (b) stereoscopic wavefront and (c) two-dimensional wavefront under positive defocus; (d) interference fringe, (e) stereoscopic wavefront and (f) two-dimensional wavefront under negative defocus
图 13 水平倾斜像差校正结果。校正前的（a）干涉条纹及（b）波前；校正后的（c）干涉条纹及（d）波前
Figure 13. Correction results of horizontal tilt aberration. (a) Interference fringe and (b) wavefront before correction; (c) interference fringe and (d) wavefront after correction
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