碳化硅扫描反射镜支撑结构设计 -

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碳化硅扫描反射镜支撑结构设计

doi:10.3788/CO.20120502.0161

1.
中国科学院长春光学精密机械与物理研究所, 吉林长春130033;
2.
中国科学院研究生院, 北京 100039

基金项目:

国家863高技术研究发展计划资助项目(No.2006AA06A208)

详细信息

中图分类号:V447.3; TH706
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- 被引次数:0
出版历程
- 收稿日期:2011-12-21
- 修回日期:2012-02-23
- 刊出日期:2012-04-10

Design of kinematic mount for SiC scanning reflective mirror

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
2.
Graduate University of Chinese Academy of Sciences, Beijing 100039

摘要

摘要:对尺寸为460 mm290 mm的SiC扫描反射镜的轻量化和支撑结构的设计进行了研究。基于三角形和矩形的复合轻量化结构,采用镜体背部为开放和封闭相结合的形式,设计了一种新型的扫描反射镜组件。该组件采用侧面支撑方式和轴向柔性结构,有利于消除支撑结构材料热膨胀系数不匹配产生的热应力对镜面面形的影响。有限元方法分析结果表明:反射镜组件在1 g重力载荷和8 ℃温度变化作用下,反射镜镜面的面形误差RMS值分别为4.5 nm和20.3 nm。该反射镜轻量化形式和支撑结构满足光学成像要求,并可有效提高结构的稳定性,对于大尺寸反射镜组件的设计具有借鉴意义。
- 碳化硅/
- 扫描反射镜/
- 侧面支撑/
- 面形误差
Abstract:The SiC scanning reflective mirror with a dimension of 460 mm290 mm used in a spaceborne optical remote sensor is studied. The composite form of triangle and quadrangle and the combination of open and closed back are explored for the design of lightweight scanning mirror. A new kinematic mount and a flexible structure in axis is taken to hold the mirror around the lateral surface. The flexible structure in axis is used as an interface to the kinematic mount to support the mirror, which can eliminate the impact of thermal stress induced by the mismatch of thermal expansion coefficient among the materials on the mirror surfaces. Optical performance of the mirror is analyzed by using Finite Element Method(FEM). Results indicate that the surface figure errors are 4.5 nm and 20.3 nm under a gravity load of 1 g and the temperature load change of 8 ℃ in different directions. The results show that the lightweight designing and supporting structure of this scanning reflective mirror meet the requirements of optical imaging, and can improve the stability of structure effectively. It can be an important reference for the design of big size scanning reflective mirror components.
- SiC/
- scanning reflective mirror/
- lateral surface support/
- surface figure error

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参考文献 (1)

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