用表面等离子体共振传感器检测纳米间距 -

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用表面等离子体共振传感器检测纳米间距

doi:10.3788/CO.20130602.0259

1.
中国科学院长春光学精密机械与物理研究所,吉林长春 130033;
2.
中国科学院大学,北京 100049

基金项目:

国家自然科学基金资助项目(No.90923036,No.60977041,No. 60877021,No.61077010);中科院百人计划资助项目

详细信息

作者简介:
王二伟(1985—),男,河南驻马店人,博士研究生,2007年于黑龙江大学获得学士学位,2010年于东北师范大学获得硕士学位,主要从事光学检测、直写等方面的研究。E-mail:xiaoweierdai@163.com;鱼卫星(1975—),男,陕西临潼人,博士后,研究员,博士生导师,1998年于西北工业大学获得学士学位,2001年于中国科学院长春光学精密机械与物理研究所获得硕士学位,2004年于新加坡南洋理工大学获博士学位,主要从事亚波长光学、微/纳光学、微细加工技术、三维微纳加工技术等方面的研究。E-mail:yuwx17@hotmail.com
王二伟(1985—),男,河南驻马店人,博士研究生,2007年于黑龙江大学获得学士学位,2010年于东北师范大学获得硕士学位,主要从事光学检测、直写等方面的研究。E-mail:xiaoweierdai@163.com;鱼卫星(1975—),男,陕西临潼人,博士后,研究员,博士生导师,1998年于西北工业大学获得学士学位,2001年于中国科学院长春光学精密机械与物理研究所获得硕士学位,2004年于新加坡南洋理工大学获博士学位,主要从事亚波长光学、微/纳光学、微细加工技术、三维微纳加工技术等方面的研究。E-mail:yuwx17@hotmail.com

通讯作者:
鱼卫星, E-mail:yuwx17@hotmail.com

中图分类号:O436.1;TB92
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出版历程
- 收稿日期:2012-12-12
- 修回日期:2013-02-16
- 刊出日期:2013-04-10

Nanogap measurement by using surface plasmon resonance sensor

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
2.
University of Chinese Academy of Sciences, Beijing 100049, China

More Information

Corresponding author:YU Wei-xing

摘要

摘要:结合物理光学原理和表面等离子体共振(SPR)角度传感器,提出了可以突破衍射极限的纳米间距检测方法。在理论上建立起纳米间距和位相改变量之间的函数关系,借助于SPR角度传感器的高灵敏性,提出通过检测出射光束振动方向的p分量和s分量的位相差值来实现纳米间距的实时检测。模拟结果显示:纳米间距改变量从-0.5～0.5 m变化时,位相改变量可实现-150～150的变化,检测灵敏度1 nm。该检测方法能够实现10 nm以下间距的灵敏检测,且具有结构简单,易于操作,实时检测的特点。
- 表面等离子体共振(SPR)传感器/
- 角度传感器/
- 纳米间距/
- 共振角度/
- 位相差
Abstract:An optical method for the nanogap measurement beyond the optical diffraction limit was reported. The function relationship between the nanogap width and the phase difference was built. Based on the high sensitivity of a surface plasmon resonance(SPR) sensor, the nanogap width between a light transmitting mirror and a reflector could be measured by detecting the phase difference between p- and s- polarizations of the light. Numerical simulation shows that the phase difference shifts from 150 to -150 by changing the nanogap width from -0.5 to 0.5 m and the measured sensitivity of nanogap width is better than 1 nm. This nanogap measurement method can realize the measurement for the smallest gap below 10 nm and provides a simple and real-time operation beyond the physical diffraction limit.
- Surface Plasmon Resonance(SPR) sensor/
- angle sensor/
- nanogap width/
- resonance angle/
- phase difference

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