热驱动微光学

张维; ZAPPE Hans

doi:10.3788/CO.20140702.0215

热驱动微光学

doi: 10.3788/CO.20140702.0215

张维^1,2,
ZAPPE Hans^1, ,

1.
德国弗莱堡大学微系统工程系, 弗莱堡 79110;
2.
西北工业大学, 陕西西安 710072

详细信息

作者简介:
ZAPPE Hans is professor of micro-optics and associate dean of engineering in the Department of Microsystems Engineering at the University of Freiburg, Germany. He earned his bachelor's and master's degrees at MIT and his PhD from the University of California, Berkeley, all in electrical engineering. After pursuing research activities in electronics, integrated optics, and semiconductor lasers at IBM, the Fraunhofer Institute for Applied Solid State Physics, and the Centre Suisse d'Electronique et de Microtechnique, he joined the University of Freiburg in 2000. His current research interests focus on tunable micro-optics, optical microsystems for medical applications, and novel nano-optics. E-mail： hans.zappe@imtek.uni-freiburg.de

通讯作者:
ZAPPE Hans,E-mail：hans.zappe@imtek.uni-freiburg.de

中图分类号: TH74
计量
- 文章访问数: 1349
- HTML全文浏览量: 159
- PDF下载量: 667
- 被引次数: 0
出版历程
- 收稿日期: 2013-10-10
- 修回日期: 2013-12-13
- 刊出日期: 2014-03-25

Thermo-pneumatic micro-optics

ZHANG Wei^1,2,
ZAPPE Hans^{1
, ,}

1.
Department of Microsystems Engineering, University of Freiburg, Freiburg 79110, Germany;
2.
Northwestern Polytechnical University, Xi'an 710072, China

More Information

Author Bio:
ZAPPE Hans is professor of micro-optics and associate dean of engineering in the Department of Microsystems Engineering at the University of Freiburg, Germany. He earned his bachelor's and master's degrees at MIT and his PhD from the University of California, Berkeley, all in electrical engineering. After pursuing research activities in electronics, integrated optics, and semiconductor lasers at IBM, the Fraunhofer Institute for Applied Solid State Physics, and the Centre Suisse d'Electronique et de Microtechnique, he joined the University of Freiburg in 2000. His current research interests focus on tunable micro-optics, optical microsystems for medical applications, and novel nano-optics. E-mail： hans.zappe@imtek.uni-freiburg.de

摘要

摘要: 通过实例研究和近期报道的文献，论述了热驱动微光学的研究进展。驱动器主要通过应用在液体和液气界面的压力来调控光学微流体，包括微镜片和薄膜微透镜，热驱动器利用芯片上的温度变化产生所需要的压力差，从而对微透镜进行调控。同时还讨论了用于微光学结构的各种设备、结构、液体和膜材料，并提供了典型操作特性。
- 可调微透镜 /
- 热驱动器 /
- 微光学
Abstract: We discuss the development of thermo-pneumatic micro-optics and illustrate this progress using examples from our own research as well as recent literature. Pneumatic actuation is used for tuning micro-fluidics based optics, including micromirrors and membrane microlenses, which rely on pressure applied to liquids or liquid/gas interfaces for operation. Thermo-pneumatic actuation uses on-chip temperature changes to generate the requisite pressure differences. We discuss the variety of devices, structures, liquids and membrane materials used for these micro-optical structures and provide typical operating characteristics.
- tunable micro-lens /
- thermo-pneumatic actuator /
- micro-optics

HTML全文

参考文献(1)

[1] CHOI J M, SON H M, LEE Y J. Biomimetic variable-focus lens system controlled by winding-type SMA actuator[J]. Optics Express, 2009, 17(10):8152-8164. [2] SON H M, KIM M Y, LEE Y J. Tunable-focus liquid lens system controlled by antagonistic winding-type SMA actuator[J]. Optics Express, 2009, 17(16):14339-14350. [3] WERBER A, ZAPPE H. Tunable microfluidic microlenses[J]. Appl. Optics, 2005, 44(16):3238-3245. [4] AGARWAL M, GUNASEKARAN R A, COANE P, et al.. Polymer-based variable focal length microlens system[J]. J. Micromechanics and Microengineering, 2004, 14(12):1665. [5] ZHOU G, LEUNG H M, YU H, et al.. Liquid tunable diffractive/refractive hybrid lens[J]. Optics Letter, 2009, 34(18):2793-2795. [6] SCHNEIDER F, DRAHEIM J, KAMBERGER R, et al. Optical characterization of adaptive fluidic silicone-membrane lenses[J]. Optics Express, 2009, 17(14):11813-11821. [7] KUIPER S, HENDRIKS B H W. Variable-focus liquid lens for miniature cameras[J]. Appl. Phys. Lett., 2004, 85(7):1128-1130. [8] LEE S W, LEE S S. Focal tunable liquid lens integrated with an electromagnetic actuator[J]. Appl. Phys. Lett., 2007, 90(12):121129. [9] WANG W, FANG J. Design, fabrication and testing of a micromachined integrated tunable microlens[J]. J. Micromechanics and Microengineering, 2006, 16(7):1221. [10] LEE S Y, TUNG H W, CHEN W C, et al.. Novel micro lens with tunable astigmatism[C]. Proceedings of the IEEE Conference on Solid-State Sensors, Actuators and Microsystems(Transducers), Lyon, France, 10-14 June, 2007:2147-2150. [11] DONG L, AGARWAL A K, BEEBE D J, et al.. Adaptive liquid microlenses activated by stimuli-responsive hydrogels[J]. Nature, 2006, 442(7102):551-554. [12] LEE S Y, TUNG H W, CHEN W C, et al.. Thermal actuated solid tunable lens[J]. IEEE Photonics Technology Letters, 2006, 18(21):2191-2193. [13] BEADIE G, SANDROCK M L, WIGGINS M J, et al.. Tunable polymer lens[J]. Optics Express, 2008, 16(16):11847-11857. [14] YANG Y J, LIAO H H. Development and characterization of thermopneumatic peristaltic micropumps[J]. J. Micromechanics and Microengineering, 2009, 19(2):025003. [15] WERBER A, ZAPPE H. Thermo-pneumatically actuated, membrane-based micromirror devices[J]. J. Micromechanics and Microengineering, 2006, 16(12):2524. [16] ZHANG W, ALJASEM K, ZAPPE H, et al.. Completely integrated, thermopneumatically tunable microlens[J]. Optics Express, 2011, 19(3):2347-2362. [17] ZHANG W, ZAPPE H, SEIFERT A. On-chip actuation for focal length tuning of pneumatic micro-lenses[J]. Optics Express, 2013, 19(3):2347-2362. [18] NGUYEN N T. Micro-optofluidic lenses:a review[J]. Biomicrofluidics, 2010, 4(3):031501. [19] DRAHEIM J. Minimalistic adaptive lenses[D]. Freiburg:University of Freiburg, 2011. [20] MERKEL T C, BONDAR V I, NAGAI K, et al.. Gas sorption, diffusion, and permeation in poly(dimethylsiloxane)[J]. J. Polymer Science Part B:Polymer Physics, 2000, 38(3):415-434. [21] JOO Y C K, KANG H, PARK J K. Analysis of pressure-driven air bubble elimination in a microfluidic device[J]. Lab Chip, 2008, 8(1):176-178. [22] ARAM D K, CHUNG J, ERICKSON D. Electrokinetic microfluidic devices for rapid, low power drug delivery in autonomous microsystems[J]. Lab Chip, 2008, 8(2):330-338. [23] ZHANG W, ZAPPE H, SEIFERT A. Polyacrylate membranes for tunable liquid-filled microlenses[J]. Optical Engineering, 2013, 52(4):046601. [24] PELRINE R, KORNBLUH R, PEI Q, et al.. High-speed electrically actuated elastomers with strain greater than 100%[J]. Science, 2000, 287(5454):836-839. [25] ZHANG W, ALJASEM K, ZAPPE H, et al.. Highly flexible MTF measurement system for tunable micro lenses[J]. Optics Express, 2010, 18(12):12458-12469.