-
摘要: 本文介绍了点衍射干涉仪不同发展阶段的特点和应用。点衍射干涉仪由波长量级的针孔产生高质量的球面波作为参考波前，能够得到衍射极限性能的分辨率。按照不同的光路特点，点衍射干涉仪可分为点衍射共路干涉和点衍射非共路干涉两种结构，主要应用于高精度波前检测和面形检测。共路干涉结构简单紧凑，对环境振动不敏感，对光源相干度要求不高，可利用光束偏振态及光栅衍射分束的特性对传统点衍射板进行改造，在全共路点衍射干涉仪中引入时间相位调制技术和干涉对比度可调技术，可进一步提高波前检测精度。采用反射式针孔和各种光纤结构发展了非共路点衍射干涉仪，实现了大口径、高精度球面反射镜面形的测量。本文重点阐述了用于极紫外光刻投影物镜中高精度球面反射镜面形检测的反射式针孔点衍射干涉仪，并展望了点衍射检测技术在生物检测等领域的应用前景和发展趋势。Abstract: In this paper, several characteristics and applications of point diffraction interferometer at different development stages are introduced. In interferometers, high quality spherical wave as a reference wave is produced by pinhole with wavelength scale, which can achieve diffraction limited resolution. According to different light path characteristics, interferometers used for high-precision wavefront testing and surface shape testing are mainly divided into point diffraction common path interferometer and noncommon path interferometer. The former has the advantages of simple structure, low sensitivity to ambient vibration and low requirement for coherence light source. Based on beam polarization and diffraction grating characteristics, the traditional point diffraction splitter plate is improved. Moreover, the temporal phase modulation technology and adjustable interference contrast technology introduced to common path point diffraction interferometer can further improve the measurement accuracy of wavefront. In addition, reflex pinhole and various kinds of fiber structures are employed to develop noncommon point diffraction interferometer, realizing the high-accuracy measurement of large aperture spherical surface. Especially, the reflex pinhole point diffraction interferometer for high-accuracy spherical surface testing in extreme ultraviolet lithography is illustrated in detail. Finally, the wide prospects of application and development of point diffraction interference detection technology are forecasted in many fields, such as biological detection.
-
图 1 点衍射分束器的(a)结构和(b)原理图
Figure 1. Structure (a) and principle (b) diagrams of point diffraction beam splitter plater
图 3 用于单个光学元件面形检测的原理图
Figure 3. Principle diagram of surface shape testing for single optical component
图 5 液晶点衍射板的结构和原理示意图
Figure 5. Structure and principle diagram of liquid crystal point diffraction plate
图 6 第一代可压缩塑料微球液晶点衍射板示意图
Figure 6. Schematic diagram of the first-generation liquid crystal point diffraction plate using a deformable plastic microsphere
图 7 第二代结构化基底液晶点衍射板示意图
Figure 7. Schematic diagram of the second-generation liquid crystal point diffraction plate using one structured substrate
图 8 铌酸锂晶体点衍射板示意图。(a)针孔制造过程; (b)抗蚀剂圆斑的光学显微图像; (c)铌酸锂晶体表面铝层的开口结构
Figure 8. Schematic diagram of point diffraction plate using lithium niobate crystal. (a) Schematic diagram of pinhole fabrication process; (b) Optical microscope image of resist dot; (c) Opening structure of aluminum on lithium niobate crystal surface
图 10 带有透明针孔和窗口的不透明掩模板示意图
Figure 10. Schematic diagram of opaque mask plate with transparent pinhole and window
图 11 光栅移相点衍射干涉仪的原理图。(a)分束光栅在物方针孔后; (b)分束光栅在物方针孔前
Figure 11. Principle diagrams of grating phase-shifting point diffraction interferometer. (a) Splitting grating location behind object pinhole; (b) Splitting grating in the front of object pinhole
图 12 Schwarzschild系统波前检测示意图
Figure 12. Schematic diagram of Schwarzschild system wavefront measurement
图 13 双折射硅晶体点衍射板结构示意图
Figure 13. Structure diagram of birefringence silicon crystal point diffraction plate
图 14 偏振相移点衍射干涉仪原理图
Figure 14. Principle diagram of polarization phase-shifting point diffraction interferometer
图 15 线栅点衍射针孔板结构示意图
Figure 15. Structure diagram of wire grid point diffraction pinhole plate
图 16 光纤相移点衍射干涉仪测量极紫外球面镜面形的原理图
Figure 16. Principle diagram of phase-shifting point diffraction interferometer used for testing surface shape of extreme-ultraviolet spherical mirror
图 17 光纤点衍射干涉仪的相干原理
Figure 17. Coherent principle of fiber point diffraction interferometer
图 18 斜面光纤点衍射源结构及衍射光传播角的示意图
Figure 18. Schematic diagram of angled end-face fiber point diffraction source structure and diffracted ray from the angled end-face fiber
图 19 倾斜面光纤点衍射源的优势。(a)传统的相移光纤点衍射干涉仪; (b)斜面的相移光纤点衍射干涉仪
Figure 19. Advantage of angled end-face fiber point diffraction source. (a) Traditional phase-shifting fiber point diffraction interferometer; (b) Phase-shifting angled end-face fiber point diffraction interferometer
图 20 斜面光纤点衍射干涉仪球面面形检测原理图
Figure 20. Principle diagram of angled end-face fiber point diffraction interferometer used for testing spherical mirror surface
图 21 扫描电镜下观察到的锥型光纤。(a)宏观形貌; (b)出射端面放大图
Figure 21. Tapered fiber observed by the scanning electron microscope. (a) Macrograph; (b) Scaled up view of the end face of tapered fiber
图 22 锥型光纤点衍射干涉仪系统的原理图
Figure 22. Principle diagram of tapered fiber point diffraction interferometer
图 23 双光纤点衍射干涉仪检测透射波前原理图
Figure 23. Principle diagram of double fibers point diffraction interferometer used for testing transmission wavefront
图 24 改进的双光纤点衍射干涉仪检测透射式波前原理图
Figure 24. Principle diagram of advanced double fibers point diffraction interferometer used for testing transmission wavefront
图 25 双光纤点衍射干涉仪球面镜面形检测系统原理图
Figure 25. Principle scheme of double fibers point diffraction interferometer used for testing spherical mirror surface shape
图 26 新型点衍射源在检测极紫外光刻系统中的典型应用。(a)检测系统原理图; (b)新型参考球面波源结构示意图
Figure 26. Typical application of new wavefront reference source in testing extreme ultraviolet lithography system. (a) Principle diagram of testing system; (b) Structure schematic diagram of new wavefront reference source
图 27 改进的参考球面波源结构示意图
Figure 27. Structure diagram of advanced wavefront reference source
图 28 反射式针孔点衍射干涉仪原理示意图
Figure 28. Principle diagram of reflected pinhole point diffraction interferometer
图 29 ASET搭建的针孔点衍射干涉仪(a)结构示意图和(b)装置实物图
Figure 29. Structure diagram (a) and device physical figure (b) of pinhole point diffraction interferometer built by ASET
图 30 基于双孔干涉标定系统的基本结构
Figure 30. Sketch of calibration system based on two-hole interference
图 31 可见光相移点衍射干涉仪原理图
Figure 31. Principle diagram of visible light phase-shifting point diffraction interferometer
图 32 高精度点衍射球面面形干涉检测系统的原理图
Figure 32. Principle scheme of high precision point diffraction interferometric system for spherical surface testing
图 34 在铬膜上用FIBE刻蚀针孔的扫描电镜图。(a)斜视图; (b)正视图
Figure 34. SEM pictures of FIBE-etched pinhole in a chromium film. (a) Oblique view; (b) Front view
图 35 待测球面调整误差的分析模型。(a)倾斜; (b)横向偏移; (c)轴向偏移
Figure 35. Analysis model of spherical surface adjustment error under test. (a) Tilt; (b) Lateral shift; (c) Axial shift
图 36 衍射相位光学显微系统的原理图
Figure 36. Principle diagram of diffraction phase microscopy system
-
[1] SMARTT R N. Specialapplications of the point-diffraction interferometer[J]. SPIE, 1979, 192:35-40. https://www.researchgate.net/publication/234379228_titleSpecial_Applications_Of_The_Point-Diffraction_Interferometertitle [2] SMARTT R N, STEEL W H. Point-diffraction interference microscopy[J]. Applied Optics, 1985, 24(10):1402-1403. doi: 10.1364/AO.24.001402 [3] SPEER R J, CHRISP M, TURNER D, et al.. Grazing-incidence interferometry-use of the linnik interferometer for testing image-forming reflection systems[J]. Applied Optics, 1979, 18(12):2003-2012. doi: 10.1364/AO.18.002003 [4] SMARTT R N. Point-diffraction interferometry as a diagnostic for alignment[J]. SPIE, 1984, 483:78-83. [5] SMARTT R N, STEEL W H. Theory and application of point-diffraction interferometers[J]. Japanese Journal of Applied Physics, 1975, 14(S1):272-4. https://www.researchgate.net/publication/239048395_Theory_and_Application_of_Point-Diffraction_Interferometers [6] GUO R, YAO B, GAO P, et al.. Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability[J]. Applied Optics, 2013, 52(15):3484-3489. doi: 10.1364/AO.52.003484 [7] NOTARAS J, PATERSON C. Point-diffraction interferometer for atmospheric adaptive optics in strong scintillation[J]. Optics Communications, 2008, 281(3):360-367. doi: 10.1016/j.optcom.2007.09.045 [8] KIM Y, SHIM H, KIM K, et al.. Common-path diffraction optical tomography for investigation of three-dimensional structures and dynamics of biological cells[J]. Optics Express, 2014, 22(9):10398-10407. doi: 10.1364/OE.22.010398 [9] NEAL R M, WYANT J C. Polarization phase-shifting point-diffraction interferometer[J].Applied Optics, 2006, 45(15):3463-3476. doi: 10.1364/AO.45.003463 [10] MERCER C R, CREATH K. Liquid-crystal point-diffraction interferometer[J]. Optics Letters, 1994, 19(12):916-918. doi: 10.1364/OL.19.000916 [11] MEDECKI H, TEJNIL E, GOLDBERG K A, et al.. Phase-shifting point diffraction interferometer[J]. Optics Letters, 1996, 21(19):1526-1528. doi: 10.1364/OL.21.001526 [12] GONG Q, GEARY J M. Modeling point diffraction interferometers[J]. Optical Engineering, 1995, 35(2):351-356. https://www.researchgate.net/publication/253343057_Modeling_point_diffraction_interferometers [13] STROJNIK M. Application of point-diffraction interferometry to testing infrared imaging systems[J]. SPIE, 2004, 5543:79-91. https://www.researchgate.net/publication/259663390_Application_of_point-diffraction_interferometry_to_testing_infrared_imaging_systems [14] GONG Q. Alignment and testing of piston and aberrations of a segmented mirror[J].SPIE, 2005, 5869:586912. https://www.researchgate.net/publication/253842230_Alignment_and_testing_of_piston_and_aberrations_of_a_segmented_mirror [15] MERCER C R, CREATH K. Liquid-crystal point-diffraction interferometer for wave-front measurements[J]. Applied Optics, 1996, 35(10):1633-1642. doi: 10.1364/AO.35.001633 [16] MERCER C R, RAMAN G. Quantitative interferometry in the severe acoustic environment of resonant supersonic jets[J]. AIAA Journal, 2012, 40(3):438-442. https://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/20000012457.pdf [17] MERCER C R, CREATH K. Phase measurement using a liquid crystal point diffraction interferometer[J]. SPIE, 1995, 2349:95-99. https://www.researchgate.net/publication/24293441_Defocus_measurement_using_a_liquid_crystal_point_diffraction_interferometer [18] GUARDALBEN M J, JAIN N. Phase-shift error as a result of molecular alignment distortions in a liquid-crystal point-diffraction interferometer[J]. Optics Letters, 2000, 25(16):1171-1173. doi: 10.1364/OL.25.001171 [19] MARSHALL K L. Recent advances in the development of phase-shifting liquid crystal interferometers for visible and near-IR applications[J]. SPIE, 2003, 5188(26):79-84. http://citeseerx.ist.psu.edu/viewdoc/download?doi=10.1.1.470.6799&rep=rep1&type=pdf [20] MARSHALLK L, ADELSBERGER K, MYHRE G, et al.. The LCPDI:A compact and robust phase-shifting point-diffraction interferometer based on dye-doped LC technology[J]. Molecular Crystals & Liquid Crystals, 2006, 454(1):425-447. doi: 10.1080/15421400600654116 [21] KIHM H, LEE Y W. Double-pass point diffraction interferometer[J]. Measurement Science & Technology, 2010, 21(10):251-254. https://www.researchgate.net/publication/230908494_Double-pass_point_diffraction_interferometer [22] IMADA H, MATSUO T, YAMAMOTO K, et al.. Real-time point-diffraction interferometer and its analytical formulation[J]. Applied Optics, 2015, 54(26):7870-7878. doi: 10.1364/AO.54.007870 [23] YAMAMOTO K, MATSUO T, IMADA H, et al.. Measurement of complex amplitude with a point-diffraction interferometer[J]. Applied Optics, 2015, 54(26):7895-7903. doi: 10.1364/AO.54.007895 [24] 刘克, 李艳秋.极紫外光刻投影物镜波像差在线检测技术[J].中国 , 2009, 36(s2):257-262. http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201610036.htmLIU K, LI Y Q. At-wavelength interferometry of projection optics for extreme ultraviolet lithography[J]. Chinese Journal of Lasers, 2009, 36(s2):257-262. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201610036.htm [25] MERCER C R, CREATH K, RASHIDNIA N, Phase-stepped point diffraction interferometer using liquid crystals[J]. SPIE, 1995, 2544:87-93. http://proceedings.spiedigitallibrary.org/pdfaccess.ashx?url=/data/conferences/spiep/56818/87_1.pdf [26] MERCER C R, RASHIDNIA N, CREATH K. High data density temperature measurement for quasi steady-state flows[J]. Experiments in Fluids, 1996, 21(1):11-16. doi: 10.1007/BF00204630 [27] MARSHALL K L, MYHRE G. A second-generation liquid crystal phase-shifting point-diffraction interferometer employing structured substrates[J]. SPIE, 2006, 5880:58800D. doi: 10.1117/12.617631 [28] PATURZO M. Phase-shifting point-diffraction interferometer developed by using the electro-optic effect in ferroelectric crystals[J]. Optics Letters, 2006, 31(24):3597-3599. doi: 10.1364/OL.31.003597 [29] PATURZO M, GRILLI S, FERRARO P. Point-diffraction interferometer by electro-optic effect in lithium niobate crystals[J]. SPIE, 2007, 6616:66160F. http://proceedings.spiedigitallibrary.org/pdfaccess.ashx?url=/data/conferences/spiep/17153/66160f_1.pdf [30] AKONDI V, JEWEL A R, VOHNSEN B. Digital phase-shifting point diffraction interferometer[J]. Optics Letters, 2014, 39(6):1641-1644. doi: 10.1364/OL.39.001641 [31] NAULLEAU P P, GOLDBERG K A, LEE S H, et al.. Extreme-ultraviolet phase-shifting point-diffraction interferometer:A wave-front metrology tool with subangstrom reference-wave accuracy[J]. Applied Optics, 1999, 38(35):7252-7263. doi: 10.1364/AO.38.007252 [32] GOLDBERG K A, NAULLEAU P P, REKAWA S B, et al.. Ultra-high-accuracy optical testing:creating diffraction-limited short-wavelength optical systems[J]. SPIE, 2005, 5900:114-123. doi: 10.1117/12.618066 [33] SUGISAKI K, ZHU Y, GOMEI Y, et al.. Present status of the ASET at-wavelength phase-shifting point diffraction interferometer[J]. SPIE, 2000, 4146:47-53. https://www.researchgate.net/publication/252096576_Present_status_of_the_ASET_at-wavelength_phase-shifting_point_diffraction_interferometer [34] 于长淞, 向阳.点衍射干涉仪小孔掩模技术研究进展[J]. 与光电子学进展, 2013, 50(3):030004. http://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201303005.htmYU CH S, XIANG Y. Research progress of pinhole mask technology of point diffraction interferometer[J]. Laser and Optoelectronics Progress, 2013, 50(3):030004. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201303005.htm [35] NEAL R M, WYANT J C. Polarization phase-shifting point-diffraction interferometer[J]. Applied Optics, 2006, 45(15):3463-3476. doi: 10.1364/AO.45.003463 [36] MILLERD J E, BROCK N J, HAYES J B, et al.. Instantaneous phase-shift, point-diffraction interferometer[J]. SPIE, 2004, 5531:264-272. https://www.researchgate.net/profile/Neal_Brock/publication/228538523_Instantaneous_phase-shift_point-diffraction_interferometer/links/0c960520289767aca7000000.pdf?disableCoverPage=true [37] OUCHI C, KATO S, HASEGAWA M, et al.. EUV-wavefront metrology at EUVA[J]. SPIE, 2006, 6152:61522O. https://www.researchgate.net/publication/241368123_EUV-wavefront_metrology_at_EUVA [38] ZHU Y, SUGISAKI K, OKADA M, et al.. Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography[J]. Applied Optics, 2007, 46(27):6783-6792. doi: 10.1364/AO.46.006783 [39] WANG D, YANG Y, CHEN C, et al.. Misalignment aberrations calibration in testing of high-numerical-aperture spherical surfaces[J]. Applied Optics, 2011, 50(14):2024-2031. doi: 10.1364/AO.50.002024 [40] WANG D, YANG Y, CHEN C, et al.. Calibration of geometrical systematic error in high-precision spherical surface measurement[J]. Optics Communications, 2011, 284(16/17):3878-3885. https://www.researchgate.net/publication/229405147_Calibration_of_geometrical_systematic_error_in_high-precision_spherical_surface_measurement [41] CHEN X, YANG Y, WANG C, et al.. Aberration calibration in high-NA spherical surfaces measurement on point diffraction interferometry[J]. Applied Optics, 2015, 54(13):3877-3885. doi: 10.1364/AO.54.003877 [42] 王道档, 杨甬英, 陈琛, 等.点衍射球面检测中的斜反射波前像差校正[J].光学学报, 2011, 31(6):0612003. http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201106020.htmWANG D D, YANG Y Y, CHEN CH, et al.. Calibration of oblique reflection aberration in point-diffraction interferometer for high-precision spherical surface testing[J]. Acta Optica Sinica, 2011, 31(6):0612003. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201106020.htm [43] 王道档, 杨甬英, 陈晓钰, 等.基于差分方法的高精度球面调整误差校正[J].光电子· , 2013(1):127-132. http://www.cnki.com.cn/Article/CJFDTOTAL-GDZJ201301024.htmWANG D D, YANG Y Y, CHEN X Y, et al.. High-precision calibration of spherical surface misalignment based on difference method[J]. Journal of Optoelectronics·Laser, 2013(1):127-132. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GDZJ201301024.htm [44] 张宇, 金春水, 马冬梅, 等.可见光移相点衍射干涉仪的空气扰动误差分析[J].红外与 工程, 2012, 41(7):1899-1904. http://www.cnki.com.cn/Article/CJFDTOTAL-HWYJ201207039.htmZHANG Y, JIN CH SH, MA D M, et al.. Analysis of measuring errors for the visible light phase shifting point diffraction interferometer[J]. Infrared and Laser Engineering, 2012, 41(7):1899-1904. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-HWYJ201207039.htm [45] GAO F, JIANG Z, ZHAO Z, et al.. Measurement of aspheric surface combining point diffraction interferometry and annular subaperture stitching[J]. Optical Engineering, 2015, 54(1):014102. doi: 10.1117/1.OE.54.1.014102 [46] GAO F, JIANG Z, LI B. Diffraction wavefront analysis of point diffraction interferometer for measurement of aspherical surface[J]. SPIE, 2010, 7656:276-279. https://www.researchgate.net/publication/252512851_Diffraction_wavefront_analysis_of_point_diffraction_interferometer_for_measurement_of_aspherical_surface [47] 蒋庄德, 高芬, 李兵.点衍射干涉仪系统误差标定算法研究[J].机械工程学报, 2013, 49(16):48-56. http://www.cnki.com.cn/Article/CJFDTOTAL-JXXB201316009.htmJIANG ZH D, GAO F, LI B. Research on system error calibration algorithm of point diffraction interferometer[J]. Journal of Mechanical Engineering, 2013, 49(16):48-56. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-JXXB201316009.htm [48] 高芬, 蒋庄德, 李兵.不同对准误差下的小孔衍射波面误差分析[J].光学学报, 2014, 34(8):0812004. http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201408028.htmGAO F, JIANG ZH D, LIB. Analysis of diffraction wavefront error caused by alignment error of pinhole[J]. Acta Optica Sinica, 2014, 34(8):0812004. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201408028.htm [49] KIHM H, KIM S W. Fiber optic diffraction interferometer for testing spherical mirrors[J]. SPIE, 2002, 4777:394-400. https://www.researchgate.net/publication/238981749_Oblique_fiber_optic_diffraction_interferometer_for_testing_spherical_mirrors [50] KIHM H, KIM S W. Oblique fiber optic diffraction interferometer for testing spherical mirrors[J]. Optical Engineering, 2005, 44(12):125601. doi: 10.1117/1.2148367 [51] KIHM H, KIM S W. Oblique point-diffraction source for interferometer design[J]. SPIE, 2003, 5144:240-249. doi: 10.1117/12.500253 [52] MATSUURA T, OKAGAKI S, NAKAMURA T, et al.. Measurement accuracy in phase-shifting point diffraction interferometer with two optical fibers[J]. Optical Review, 2007, 14(6):401-405. doi: 10.1007/s10043-007-0401-x [53] MATSUURA T, UDAKA K, OSHIKANE Y, et al.. Spherical concave mirror measurement by phase-shifting point diffraction interferometer with two optical fibers[J]. Nuclear Instruments & Methods in Physics Research, 2010, 616(2/3):233-236. https://www.researchgate.net/publication/239356480_Spherical_concave_mirror_measurement_by_phase-shifting_point_diffraction_interferometer_with_two_optical_fibers [54] CHKHALO N I, KLIMOV A Y, ROGOV V V, et al.. A source of a reference spherical wave based on a single mode optical fiber with a narrowed exit aperture[J]. Review of Scientific Instruments, 2008, 79(3):033107. doi: 10.1063/1.2900561 [55] CHKHALO N I, PESTOV A E, TOROPOV M N. Manufacturing and investigating objective lens for ultrahigh resolution lithography facilities[M]. Croatia:INTECH Open Access Publisher, 2010:71-114. [56] SOMMARGREN G E. Phase shifting diffraction interferometry for measuring extreme ultraviolet optics[R]. Clifornia:Lawrence Livernore National Laboratory, 1996. [57] SOMMARGREN G E, PHILLION D W, JOHNSON M A, et al.. 100-picometer interferometry for EUVL[J]. SPIE, 2002, 4688:316-328. https://www.researchgate.net/publication/253292454_100-picometer_interferometry_for_EUVL [58] 古德温埃里克P, 怀亚特詹姆士C. 光学干涉检测[M]. 苏俊宏, 田爱玲, 译. 2版. 杭州: 浙江大学出版社, 2014.GOODWIN E P, WYATT J C. Interferometric optical testing[M]. SU J H, TIAN A L, Transl. 2nd ed. Hangzhou:Zhejiang University Press, 2014. (in Chinese) [59] LIANG N, MENGMENG H U, LIU B, et al.. Fiber point diffraction interferometer for measuring spherical surface[J]. SPIE, 2010, 7749:77490B. [60] 张宇, 金春水, 马冬梅, 等.点衍射干涉仪波前参考源标定算法的研究[J].中国 , 2012, 39(3):0308001. http://www.cnki.com.cn/Article/CJFDTOTAL-JJZZ201203032.htmZHANG Y, JIN CH SH, MA D M, et al.. Study of calibrating algorithm for wavefront reference source of point diffraction interferometer[J]. Chinese Journal of Lasers, 2012, 39(3):0308001. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-JJZZ201203032.htm [61] TAKEUCHI S, KAKUCHI O, YAMAZOE K, et al.. Visible light point-diffraction interferometer for testing of EUVL optics[J]. SPIE, 2006, 6151:61510E. https://www.researchgate.net/publication/241367454_Visible_light_point-diffraction_interferometer_for_testing_of_EUVL_optics_-_art_no_61510E [62] JOHNSON M A, PHILLION D W, SOMMARGREN G E, et al.. Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems[J]. SPIE, 2005, 5869:58690P. https://www.researchgate.net/publication/252364351_Construction_and_testing_of_wavefront_reference_sources_for_interferometry_of_ultra-precise_imaging_systems [63] 代晓珂, 金春水, 于杰.点衍射干涉仪波面参考源误差及公差分析[J].中国光学, 2014, 7(5):855-862. //www.illord.com/CN/abstract/abstract9183.shtmlDAI X K, JIN CH SH, YU J.Analysis on error and tolerance for the wavefront reference source of point diffraction interferometer[J]. Chinese Optics, 2014, 7(5):855-862. (in Chinese) //www.illord.com/CN/abstract/abstract9183.shtml [64] 刘国淦, 张学军, 王权陡, 等.光纤点衍射干涉仪的技术研究[J].光学精密工程, 2001, 9(2):142-145. http://www.cnki.com.cn/Article/CJFDTOTAL-GXJM200102009.htmLIU G G, ZHANG X J, WANG Q D, et al.. Fiber point diffraction interferometer[J]. Optics and Precision Engineering, 2001, 9(2):142-145. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GXJM200102009.htm [65] 曹晓君, 张学军, 李艳红.光纤点衍射干涉仪调整方法与条纹分析[J].光机电信息, 2003(3):28-30. http://www.cnki.com.cn/Article/CJFDTOTAL-GJDX200303009.htmCAO X J, ZHANG X J, LI Y H. Adjustment method and fringe analysis of fiber point diffraction interferometer[J]. OME Information, 2003(3):28-30. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GJDX200303009.htm [66] CHEN L F, NIE L, ZHOU T G, et al.. The comparison of two kinds of fiber phase shifting point-diffraction interferometer[J]. SPIE, 2007, 6279:627974. doi: 10.1117/12.725886 [67] WU S, ZHOU T G, LIN J M, et al.. Fiber point diffraction interferometer in measurement of spherical lens[J]. SPIE, 2007, 6624:662415. http://proceedings.spiedigitallibrary.org/pdfaccess.ashx?url=/data/conferences/spiep/17498/662415_1.pdf [68] CHEN L F, REN Y Q, LI J.Flat surface measurements on fiber point diffraction interferometer[J]. Optical Engineering, 2010, 49(49):338-338. http://proceedings.spiedigitallibrary.org/pdfaccess.ashx?url=/data/journals/optice/22135/050503_1.pdf [69] WU S, ZHOU T G, SHA D G, et al.. Key techniques in an absolute measurement method of spherical lens[J]. SPIE, 2008, 6834:683435. http://adsabs.harvard.edu/abs/2008SPIE.6834E..35W [70] OTAKI K, BONNEAU F, ICHIHARA Y. Absolute measurement of spherical surface by point diffraction interferometer[J]. SPIE, 1999, 3740:602-605. https://www.researchgate.net/publication/252625449_Absolute_measurement_of_a_spherical_surface_using_a_point_diffraction_interferometer [71] OTAKI K, OTA K, NISHIYAMA I, et al.. Development of the point diffraction interferometer for extreme ultraviolet lithography:Design, fabrication, and evaluation[J]. Journal of Vacuum Science & Technology B, 2002, 20(6):2449-2458. [72] OTAKI K, YAMAMOTO T, FUKUDA Y, et al.. Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror[J]. Journal of Vacuum Science & Technology B, 2002, 20(1):295-300. https://www.researchgate.net/publication/224467886_Accuracy_evaluation_of_the_point_diffraction_interferometer_for_extreme_ultraviolet_lithography_aspheric_mirror [73] OTAKI K, ZHU Y, ISHⅡ M, et al.. Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[J]. SPIE, 2004, 5193:182-190. https://www.researchgate.net/publication/258717358_Analysis_of_pinhole_vector_diffraction_in_visible_light [74] SEKINE Y, SUZUKI A, HASEGAWA M, et al.. Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers[J]. Journal of Vacuum Science & Technology B, 2004, 22(1):104-108. https://www.researchgate.net/publication/240668324_Wave-front_errors_of_reference_spherical_waves_in_high-numerical_aperture_point_diffraction_interferometers [75] 马强, 刘伟奇, 李香波, 等.点衍射干涉仪中小孔衍射波面误差分析[J].光学学报, 2008, 28(12):2321-2324. doi: 10.3321/j.issn:0253-2239.2008.12.016MA Q, LIU W Q, LI X B, et al.. Analysis of diffraction wavefront error in point diffraction interferometer[J]. Acta Optica Sinica, 2008, 28(12):2321-2324. (in Chinese) doi: 10.3321/j.issn:0253-2239.2008.12.016 [76] 卢增雄, 金春水, 张立超, 等.极紫外三维小孔矢量衍射波面质量分析[J].光学学报, 2010, 30(10):2849-2854. http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201010017.htmLU Z X, JIN CH SH, ZHANG L CH, et al.. Wave-front quality analysis of three-dimension pinhole vector diffractional in extreme ultraviolet region[J]. Acta Optica Sinica, 2010, 30(10):2849-2854. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201010017.htm [77] 卢增雄, 金春水, 马冬梅, 等.微小孔偏差对远场波前质量影响分析[J].光学学报, 2011, 31(8):0812002. http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201108022.htmLU Z X, JIN CH SH, MA D M, et al.. Analysis of effect of tiny pinhole deviation on far-field wave-front quality[J]. Acta Optica Sinica, 2011, 31(8):0812002. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201108022.htm [78] 卢增雄, 金春水, 马冬梅.照明物镜像差对远场衍射波前质量影响的严格矢量分析[J].光学学报, 2012, 32(8):0812001. http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201208016.htmLU Z X, JIN CH SH, MA D M.Rigorous vector analysis of the effect of illumination objective lens aberration on the quality of far-field diffracted wave front[J]. Acta Optica Sinica, 2012, 32(8):0812001. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201208016.htm [79] 王瑞林, 邢廷文, 谢伟民.可见光下三维针孔的衍射波面分析[J]. 技术, 2012, 36(3):382-385. http://www.cnki.com.cn/Article/CJFDTOTAL-JGJS201203026.htmWANG R L, XING T W, XIE W M.Analysis of diffractive wave-front of 3-D pinhole under visible light[J]. Laser Technology, 2012, 36(3):382-385. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-JGJS201203026.htm [80] 王瑞林, 张丽霞, 邢廷文.不同针孔直径下衍射波面的标量和矢量分析[J].光电技术应用, 2011, 26(6):58-61. http://www.cnki.com.cn/Article/CJFDTOTAL-GDYG201106014.htmWANG R L, ZHANG L X, XING T W. Scalar and vector analysis of diffraction wave with different pinhole diameter[J]. Electro-Optic Technology Application, 2011, 26(6):58-61. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GDYG201106014.htm [81] 许嘉俊, 邢廷文.可见光三维针孔形状误差矢量衍射分析[J].光电工程, 2013, 40(2):64-70. http://www.cnki.com.cn/Article/CJFDTOTAL-GDGC201302013.htmXU J J, XING T W. Analysis of the wave-front diffracted by three-dimension pinhole with shape errors[J]. Opto-Electronic Engineering, 2013, 40(2):64-70. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GDGC201302013.htm [82] 陈琛, 杨甬英, 王道档, 等.基于时域有限差分方法的点衍射波前误差分析[J].中国 , 2011, 38(9):0908003. http://www.cnki.com.cn/Article/CJFDTOTAL-JJZZ201109033.htmCHEN CH, YANG Y Y, WANG D D, et al.. Analysis of point-diffraction wavefront error based on finite difference time domain method[J]. Chinese Journal of Lasers, 2011, 38(9):0908003. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-JJZZ201109033.htm [83] 邵卫红, 杨甬英, 陈晓钰, 等.点衍射干涉系统光学结构参数优化研究[J].强 与粒子束, 2014, 26(5):10-16. http://cdmd.cnki.com.cn/Article/CDMD-10335-1014269230.htmSHAO W H, YANG Y Y, CHEN X Y, et al.. Optimization research on optical structural parameters of point diffraction interference system[J]. High Power Laser and Particle Beams, 2014, 26(5):10-16. (in Chinese) http://cdmd.cnki.com.cn/Article/CDMD-10335-1014269230.htm [84] 许嘉俊, 邢廷文, 徐富超.点衍射干涉仪系统误差标定[J].光学学报, 2013, 33(7):0712003. http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201307035.htmXU J J, XING T W, XU F CH.Calibration of the system errors in pinhole diffracted interferometer[J]. Acta Optica Sinica, 2013, 33(7):0712003. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201307035.htm [85] 邵晶, 马冬梅, 聂真威.光学成像系统光学波前的高精度测试[J].光学精密工程, 2011, 19(11):2582-2588. http://www.cnki.com.cn/Article/CJFDTOTAL-GXJM201111004.htmSHAO J, MA D M, NIE ZH W. Accurate test of optical wave front for optical imaging system[J]. Optics and Precision Engineering, 2011, 19(11):2582-2588. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GXJM201111004.htm [86] 王道档. 高精度点衍射球面干涉检测技术及系统研究[D]. 杭州: 浙江大学, 2012.WANG D D. Point Diffraction Interferometricsystem for spherical surface testing[D]. Hangzhou:Zhejiang University, 2012. (in Chinese) [87] WANG D, YANG Y, CHEN C, et al.. Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces[J]. Applied Optics, 2011, 50(16):2342-2348. doi: 10.1364/AO.50.002342 [88] WANG D, YANG Y, CHEN C, et al.. Polarization point-diffraction interferometer for high-precision testing of spherical surface[J]. SPIE, 2010, 7656:76560F. [89] 卜敏, 雷海娜, 王亚伟.生物细胞形态检测光学技术的新进展[J]. 与光电子学进展, 2010, 47(7):071701. http://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201007008.htmBU M, LEI H N, WANG Y W.New Progress on Detection of Biological Cells[J]. Laser and Optoelectronics Progress, 2010, 47(7):071701. (in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201007008.htm [90] POPESCU G, PARK Y, CHOI W, et al.. Imaging red blood cell dynamics by quantitative phase microscopy[J]. Blood Cells Molecules & Diseases, 2008, 41(1):10-16. [91] KIM Y, SHIM H, KIM K, et al.. Common-path diffraction optical tomography for investigation of three-dimensional structures and dynamics of biological cells[J]. Optics Express, 2015, 23(15):18996. doi: 10.1364/OE.23.018996 [92] KIM Y, KIM K, KIM Y, et al.. Common-path diffraction optical tomography with a low-coherence illumination for reducing speckle noise[J]. SPIE, 2015, 9336:933629. -
下载:
点击查看大图
计量
- 文章访问数: 4672
- HTML全文浏览量: 1107
- PDF下载量: 1155
- 被引次数: 0
