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摘要:热传导规律的研究在 诱导薄膜材料改性等应用中有着重要的作用，本文针对二氧化碳 器辐照下的二氧化钛（TiO 2）薄膜表面的热效应进行了理论仿真和实验研究。首先，对具有粗糙上表面的TiO 2薄膜，利用有限元法构建了连续 作用下的TiO 2薄膜的立体模型并得到了其三维温度场分布。然后使用CO 2 器进行辐照实验，分析了辐照时间和功率等参数对TiO 2薄膜形貌、晶相以及颜色的影响。仿真表明，连续 辐照下TiO 2薄膜的瞬态温度场呈高斯分布，且与 功率、光斑半径、辐照时间等因素有关。当表面温度小于分解温度时，薄膜上表面最大平均温度与 功率满足线性关系，与光斑半径满足ExpAssoc非线性关系。实验结果表明， 辐照引起TiO 2薄膜材料表面粗糙度降低且颜色变化。 功率过小或辐照时间过短会导致有效作用面积小且不均匀，反之会产生热形变。结合仿真和实验可知使用功率为6 W，半径为3 mm的连续 辐照TiO 2薄膜10 s时取得的处理效果最优。Abstract:The laws of heat conduction play an important role in the application of laser-induced film material modification. In this paper, the thermal effects of titanium dioxide(TiO 2) film surfaces irradiated by a carbon dioxide laser was studied theoretically and experimentally. Firstly, a three-dimensional model of titanium dioxide thin film with a rough surface was constructed using a finite element method and their three-dimensional temperature distribution were calculated. Then, the TiO 2thin films were irradiated by a CO 2laser and the effects of irradiation time, power on the morphology, crystal phases and color were analyzed. Simulation results show that the transient temperature field of titanium dioxide irradiated by a CW laser is a Gaussian distribution, which is related to laser power, spot radius, irradiation time and other factors. When the surface temperature is less than the decomposition temperature, the maximum average surface temperature of the film meets the linear relationship with the laser power, and the ExpAssoc nonlinear relationship is satisfied with laser spot radius. Experimental results show that because of laser irradiation, the roughness of TiO 2thin film decreased and the color of the film changed. Small laser power or short irradiation time leads to small and uneven effective area, on the contrary thermal deformation will occur. Combined with the simulation and experiment results, it is found that the best treatment effect can be obtained when irradiating TiO 2thin film 10 seconds with a laser with a power of 6 W and a radius of 3 mm.
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Key words:
- continuous laser/
- titanium dioxide film/
- heat transfer rule
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图 30.5、2.5、5、10 s时的上表面等温线及热量传导方向示意图
Figure 3.Schematic diagram of isotherm and heat conduction direction on the upper surface at 0.5, 2.5, 5 and 10 s
图 4不同 功率下上表面平均温度-时间曲线
Figure 4.Average temperature-time curves of upper surface under different laser powers
图 5 功率与上表面最大平均温度的线性拟合
Figure 5.Linear fitting of laser power and maximum mean temperature on the upper surface
图 6不同 功率下上表面中心线上温度分布曲线
Figure 6.Temperature distribution curves of upper surface centerline under different laser powers
图 7不同 光斑半径下上表面平均温度-时间曲线
Figure 7.Average temperature-time curves of upper surface under different laser radius
图 8 功率与上表面最大平均温度的线性拟合
Figure 8.Linear fitting of laser power and maximum mean temperature on the upper surface
图 9不同光斑半径下上表面中心线温度分布曲线
Figure 9.Temperature distribution curves of upper surface centerline under different laser radius
图 12不同 功率下的样品表面显微图
Figure 12.Micrographs of sample surface under different laser powers
图 13不同 功率下样品的X射线衍射图谱
Figure 13.X-ray diffraction spectra of sample with different laser powers
图 14不同辐照时间下样品表面显微图
Figure 14.Micrographs of sample surface under different irradiation times
图 15不同 辐照时间下样品的X射线衍射图谱
Figure 15.X-ray diffraction spectra of sample under different laser irradiation times
表 1特性参数
Table 1.Characteristic parameters
Parameters Abbr. Unit Value Constant pressure heat capacity C J·Kg-1·K-1 710 Thickness d mm 0.1 Length l mm 3.35 Laser radius a mm 3 Thermal conductivity k W·m-1·K-1 8.4 Absorption coefficient α m-1 1 800 Scattering coefficient σs m-1 2.647 Density ρ kg·m-3 3 313 Thermal radiation rate ε 1 0.1 Surface heat transfer coefficient h W·cm-1·K-1 156 
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表 2高斯函数拟合公式及相关系数拟合参数
Table 2.Gauss functions and their fitting parameters
Laser power/W Equation R2 a 3 y=317.5087+34.03*exp{-2*[(x+1.9595e-4)/5.0947]2} 0.999 1 b 6 y=341.8283+68.0073*exp{-2*[(x+1.9607e-4)/5.0956]2} 0.999 1 c 9 y=366.8283+101.9044*exp{-2*[(x+1.9626e-4)/5.0969]2} 0.999 1 d 12 y=390.3105+135.7004*exp{-2*[(x+1.9633e-4)/5.0986]2} 0.999 1 e 15 y=414.45+169.3716*exp{-2*[(x+1.9626e-4)/5.1007]2} 0.999 1 f 18 y=438.5033+202.8924*exp{-2[(x+1.9634e-4)/5.1032]2} 0.999 1 下载:
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表 3ExpAssoc函数及Allometricl函数形式及相应拟合参数
Table 3.ExpAssoc function, Allometricl function and their fitting parameters
Function name Equation R2 ExpAssoc y=188.785 5-1 525.934 4*[1-exp(-x/1.130 9)] 0.999 3 Allometricl y=983.785 4*x^(-669 9) 0.997 3 下载:
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表 4拟合参数
Table 4.Fitting parameters
Laser radius/mm Equation R2 a 1 y=356.5106+45.9932*exp{-2*[(x-7.6126e-4)/5.5986]2} 0.999 1 b 2 y=347.7367+630.6741*exp{-2*[(x+5.7232e-5)/2.8963]2} 0.999 2 c 3 y=356.8013+249.8764*exp{-2*[(x+0.0013)/4.2904]2} 0.999 4 d 4 y=366.0817+101.9233*exp{-2*[(x+2.1173e-4)/5.0977]2} 0.999 1 下载:
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