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摘要:为了提高表面放电光泵浦源的寿命，以Al 2O 3陶瓷作为放电基板，研制了分段表面放电光泵浦源。基于放电电压和电流波形，详细研究了泵浦源的放电周期，放电通道电阻，能量沉积效率和等离子体功率密度。发现泵浦源的放电周期、放电通道电阻和能量沉积效率均随放电间隙长度和混合气体气压的增大而变大，随充电电压的增加而减小；而等离子体功率密度主要取决于充电电压和放电间隙长度，基本不随混合气体气压的改变而变化。在充电电压为26.8 kV，气压为100 kPa，放电间隙长8 cm的条件下，泵浦源的能量沉积效率约为82%，等离子体功率密度达到了9.36 MW/cm。实验研究表明：Al 2O 3陶瓷表面放电光泵浦源具有良好的放电特性，较同等条件下聚四氟乙烯表面放电光泵浦源的等离子体功率密度更高，可产生更强的真空紫外辐射，辐射亮度温度大于23 kK。Al 2O 3陶瓷表面放电光泵浦源适用于光泵浦XeF 2气体形成大功率XeF（C-A）蓝绿 。
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关键词:
- 技术/
- XeF(C-A)蓝绿/
- 光泵浦源/
- 分段表面放电/
- 能量沉积效率
Abstract:To obtain a lifetime of surface discharge optical pumping source, the sectioned-surface discharge optical pumping source with an Al 2O 3ceramic substrate is developed. Based on the discharge voltage and the discharge current waveforms of a pump source, the discharge period, the discharge channel resistance, the energy deposition efficiency and the average power density of discharge plasma are investigated in detail under different conditions. The discharge period, the discharge channel resistance and the energy deposition efficiency increase with an increase in the length of the discharge gap and the pressure of the mixed gas. A trend toward the opposite is observed as the charging voltage increases. The average power density of discharge plasma mainly depends on the charging voltage and the length of the discharge gap but is almost unaffected by the gas pressure. Normally, the energy deposition efficiency can be more than 82% and the average power density of discharge plasma is 9.36 MW/cm when the charging voltage is 26.8 kV, the discharge gap length is 8 cm, and the gas pressure is 100 kPa. The experimental results show that Al 2O 3ceramic surface discharge optical pump source performs good discharge characteristics, and has a higher average discharge plasma power density than Teflon surface discharge optical pumping source under the same conditions, which results in a better vacuum ultraviolet radiation intensity and a brightness temperature above 23 kK. An Al 2O 3ceramic surface discharge optical pumping source is appropriate for optical pumping XeF 2to obtain a high power XeF(C-A) blue-green laser. -
图 1陶瓷表面放电光泵浦源的结构示意图
Figure 1.Structure schematic of surface discharge optical pumping source with Al2O3ceramic substrate
图 2放电光泵浦源的放电电压和电流波形
Figure 2.Voltage and current waveform for surface discharge optical pumping source
图 3放电周期随电压、间隙和气压的变化
Figure 3.Discharge period varies with charge voltage, discharge gap and pressure of mix gas
图 6电流陡度随电压、间隙和气压的变化
Figure 6.Current gradient varies with charge voltage, discharge gap and pressure of mix gas
图 7能量沉积效率随电压、间隙和气压的变化
Figure 7.Energy deposition efficiency varies with charge voltage, discharge gap and pressure of mix gas
图 8等离子体功率密度随电压、间隙和气压的变化
Figure 8.Average power density of discharge plasma varies with charge voltage, discharge gap and pressure of mix gas
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