Influence of inconsistent grating periods on roll angle measurement based on Moiré fringe
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摘要: 为了提高用莫尔条纹法测量扭转角的测量精度,分析了光栅周期不一致对扭转角测量误差的影响。从基于莫尔条纹法测量扭转角的原理出发,论述了光栅周期不一致与测量精度的关系,讨论了引起两光栅周期不一致的两个因素,即光栅刻划误差以及两光栅栅面不平行。理论分析表明,前者是引起光栅周期不一致的主要原因。当两光栅等效周期比值β<1.001时,在±15′的测量范围内,选择光栅周期为50 μm,莫尔条纹宽度为1 400~1 800 μm时,光栅周期不一致引起的测量误差可以控制在1.6″之内。Abstract: With the aim to improve the measuring precision of a roll angle based on Moiré fringe method, the influence of inconsistent periods of two gratings on the measurement precision is analyzed. From the basic calculation formula of roll angle measurement based on the Moiré fringe method, the relation of inconsistent grating periods and measuring precision is discussed. It is pointed out that the grating score error and the unparallel planes of two gratings are the main factors to produce inconsistent grating periods, while the former is a more important reason. The experimental results show that when the ratio of equivalent periods of two gratings β and measuring range are less than 1.001 and ±15′; respectively, the measuring error caused by inconsistent periods can be controlled less than 1.6″ by choosing a grating period of 50 μm and the width ranges of Moiré fringe of 1 400-1 800 μm.
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Key words:
- inconsistent grating periods /
- Moiré fringe /
- roll angle measurement
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