Aug. 2020

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Chinese Optics> 2020> 13(4): 660-675.

ZHANG Shuai, HOU Xi. Research progress of high-precision surface metrology of a K-B mirror[J]. Chinese Optics, 2020, 13(4): 660-675. doi: 10.37188/CO.2019-0231

Citation:

ZHANG Shuai, HOU Xi. Research progress of high-precision surface metrology of a K-B mirror[J].Chinese Optics, 2020, 13(4): 660-675.doi:10.37188/CO.2019-0231

ZHANG Shuai, HOU Xi. Research progress of high-precision surface metrology of a K-B mirror[J]. Chinese Optics, 2020, 13(4): 660-675. doi: 10.37188/CO.2019-0231

Citation:

ZHANG Shuai, HOU Xi. Research progress of high-precision surface metrology of a K-B mirror[J].Chinese Optics, 2020, 13(4): 660-675.doi:10.37188/CO.2019-0231

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Research progress of high-precision surface metrology of a K-B mirror

doi:10.37188/CO.2019-0231

ZHANG Shuai^{1, 2,},
HOU Xi^1,,

1.
Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds:Supported by General Program of National Natural Science Foundation of China (No. 61675209)

More Information

Corresponding author:hxxh6776@163.com
Received Date:04 Dec 2019
Rev Recd Date:13 Jan 2020
Publish Date:01 Aug 2020

Abstract

Abstract

The advanced light source represented by the new generation of the diffraction limit synchrotron radiation source and the full-coherent X-ray free-electron laser has become an indispensable research tool in many fields. The continuous development of advanced light sources drives the rapid progress of ultra-precision optical manufacturing. The surface precision of a K-B mirror, a key focusing optical element in advanced light sources, is an important factor, which should be less than tens of nano radians. However, high precision K-B mirror surface metrology still has great technical challenges and is now a research hotspot in the scientific community. This paper introduces typical K-B mirror surface metrology, including reflection profile measuring technology such as the Long Trace Profiler (LTP), the Nanometer Optical component Measuring (NOM), and stitching interference metrology. Current K-B mirror surface shape technologies are summarized and the upcoming research progress is prospected.
- X-ray optics,
- K-B mirror,
- optical measurement,
- surface metrology,
- stitching interferometer

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References (68)

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