May 2021

Article Contents

Chinese Optics> 2021> 14(3): 661-669.

QIAO Nao-sheng, SUN Ping. Influence of CCD nonlinearity effect on the three-dimensional shape measurement of dual frequency grating[J]. Chinese Optics, 2021, 14(3): 661-669. doi: 10.37188/CO.2020-0143

Citation:

QIAO Nao-sheng, SUN Ping. Influence of CCD nonlinearity effect on the three-dimensional shape measurement of dual frequency grating[J].Chinese Optics, 2021, 14(3): 661-669.doi:10.37188/CO.2020-0143

Citation:

QIAO Nao-sheng, SUN Ping. Influence of CCD nonlinearity effect on the three-dimensional shape measurement of dual frequency grating[J].Chinese Optics, 2021, 14(3): 661-669.doi:10.37188/CO.2020-0143

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Influence of CCD nonlinearity effect on the three-dimensional shape measurement of dual frequency grating

doi:10.37188/CO.2020-0143

QIAO Nao-sheng^{1, 2, 3,},
SUN Ping^{4, 5,,}

1.
International College, Hunan University of Arts and Science, Changde 415000, China
2.
Hunan Province Cooperative Innovation Center for The Construction & Development of Dongting Lake Ecological Economic Zone, Changde 415000, China
3.
Mathematics and Physics Science College, Hunan University of Arts and Science, Changde 415000, China
4.
College of Optoelectronic Engineering, Chengdu University of Information Technology, Chengdu 610225, China
5.
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China

Funds:Supported by National Natural Science Foundation of China (No. 61701050, No. 61703157, No. 61701050), Open Foundation of State Key Laboratory of Electronic Thin Films and Integrated Devices (No. KFJJ201807), Project of Sichuan Provincial Department of Education (No. 2018Z073)

More Information

Corresponding author:sunping19775525@163.com
Received Date:17 Aug 2020
Rev Recd Date:21 Sep 2020

Available Online:30 Apr 2021

Publish Date:14 May 2021

Abstract

Abstract

The CCD nonlinearity effect in the measurement system will affect the measurement accuracy of complex optical three-dimensional surface. Therefore, a method to eliminate the CCD nonlinearity effect by using dual frequency grating projection is proposed, which can improve the measurement accuracy. Firstly, the influence of CCD nonlinearity effect on three-dimensional shape measurement is analyzed. The analytical derivation and physical explanation of spectrum aliasing are given. Then, the measurement principle of dual frequency grating under the CCD nonlinearity effect is discussed. The light intensity distribution of deformed fringe and the principle of obtaining aliasing spectrum by Fourier transform are analyzed. Finally, the method to judge the measurement accuracy by the equivalent wavelength is given. The basic formula of measuring the height information of three-dimensional surface by using dual frequency grating projection is derived, and the theoretical analysis is carried out. The object is simulated as the maximum absolute value and average absolute value are 24.3181 mm and 1.0839 mm, respectively. The maximum absolute height error and average absolute height error between the measured value and the actual value are 0.8950 mm and 0.0622 mm, respectively. After increasing the fundamental frequency of the dual frequency grating, the corresponding values are reduced to 0.3710 mm and 0.0232 mm, respectively. When the fundamental frequency of the dual frequency grating is increased by 2.5 times, the separation between the fundamental frequency and the advanced spectrum becomes better, and the measurement accuracy is improved. Therefore, using dual frequency grating projection to eliminate CCD nonlinearity effect has strong practicability and is highly advisable.
- three-dimensional shape measurement,
- dual frequency grating,
- CCD nonlinearity effect,
- spectrum aliasing,
- measurement accuracy

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References (19)

References

[1]	TAKEDA M, MUTOH K. Fourier transform profilometry for the automatic measurement of 3-D object shapes[J]. Applied Optics, 1983, 22(24): 3977. doi:10.1364/AO.22.003977
[2]	QIAO N SH, QUAN CH G. A novel phase retrieval method in fringe projection based on phase-shifting algorithm[J]. Journal of Optics, 2018, 47(4): 534-541. doi:10.1007/s12596-018-0480-z
[3]	AO M, ZHANG L, SHI X G, et al. Measurement of the three-dimensional surface deformation of the Jiaju landslide using a surface-parallel flow model[J]. Remote Sensing Letters, 2019, 10(8): 776-785. doi:10.1080/2150704X.2019.1608601
[4]	祝祥, 邵双运, 宋志军. 基于线结构光传感器的轨道板几何形貌检测方法[J]. 中国光学,2018,11(5):841-850. doi:10.3788/co.20181105.0841 ZHU X, SHAO SH Y, SONG ZH J. A detection method based on line-structured light sensor for geometrical morphology of track slab[J]. Chinese Optics, 2018, 11(5): 841-850. (in Chinese) doi:10.3788/co.20181105.0841
[5]	张旭, 邵双运, 祝祥, 等. 光学三维扫描仪光强传递函数的测量和校正[J]. 中国光学,2018,11(1):123-130. doi:10.3788/co.20181101.0123 ZHANG X, SHAO SH Y, ZHU X, et al. Measurement and calibration of the intensity transform function of the optical 3D profilometry system[J]. Chinese Optics, 2018, 11(1): 123-130. (in Chinese) doi:10.3788/co.20181101.0123
[6]	杜永兆, 冯国英, 张凯, 等. CCD非线性效应对剪切干涉法波前检测的影响[J]. 强与粒子束,2010,22(8):1775-1779. doi:10.3788/HPLPB20102208.1775 DU Y ZH, FENG G Y, ZHANG K, et al. Effect of CCD nonlinearity on wavefront detection by shearing interferometry[J]. High Power Laser and Particle Beams, 2010, 22(8): 1775-1779. (in Chinese) doi:10.3788/HPLPB20102208.1775
[7]	于杰. 用于相移点衍射干涉仪的加权最小二乘相位提取算法[J]. 中国光学与应用光学,2010,3(6):605-615. YU J. Weighted least square phase extraction algorithm for phase-shifting point diffraction interferometer[J]. Chinese Journal of Optics and Applied Optics, 2010, 3(6): 605-615. (in Chinese)
[8]	苏轲, 陈文静. 小波变换轮廓术抑制CCD非线性的分析[J]. 光学技术,2009,35(1):37-40, 44. doi:10.3321/j.issn:1002-1582.2009.01.006 SU K, CHEN W J. Analyzing wavelet transform profilometry in the restraining CCD nonlinear characteristic[J]. Optical Technique, 2009, 35(1): 37-40, 44. (in Chinese) doi:10.3321/j.issn:1002-1582.2009.01.006
[9]	FU Y J, JIANG G Y, CHEN F Y. A novel Fourier transform profilometry based on dual-frequency grating[J]. Optik, 2012, 123(10): 863-869. doi:10.1016/j.ijleo.2011.06.055
[10]	武迎春, 曹益平, 肖焱山. 基于双频复合光栅投影的陡变物体三维面形测量[J]. 光电子· ,2012,23(12):2362-2367. WU Y CH, CAO Y P, XIAO Y SH. 3D shape measurement for a discontinuous object based on a dual frequency composite grating[J]. Journal of Optoelectronics·Laser, 2012, 23(12): 2362-2367. (in Chinese)
[11]	PENG K, CAO Y P, WU Y CH, et al. A dual-frequency online PMP method with phase-shifting parallel to moving direction of measured object[J]. Optics Communications, 2017, 383: 491-499. doi:10.1016/j.optcom.2016.09.048
[12]	HU E Y, FANG H F. Surface profile inspection of a moving object by using dual-frequency Fourier transform profilometry[J]. Optik, 2011, 122: 1245-1248. doi:10.1016/j.ijleo.2010.08.007
[13]	LI J, SU X Y, GUO L R. Improved Fourier transform profilometry for the automatic measurement of three-dimensional object shapes[J]. Proceedings of SPIE, 1990, 29(12): 1439-1444.
[14]	LU F, WU CH D, YANG J K. Optimized dithering technique for three-dimensional shape measurement with projector defocusing[J]. Optics Communications, 2019, 430: 246-255. doi:10.1016/j.optcom.2018.08.034
[15]	FU G K, CAO Y P, WANG Y P, et al. Three-dimensional shape measurement based on binary fringe conventional projection[J]. Transactions of the Institute of Measurement and Control, 2019, 41(14): 4073-4083. doi:10.1177/0142331219848029
[16]	WANG Y W, LIU L, WU J, et al. Enhanced phase-coding method for three-dimensional shape measurement with half-period codeword[J]. Applied Optics, 2019, 58(27): 7359-7366. doi:10.1364/AO.58.007359
[17]	王月敏, 张宗华, 高楠. 基于全场条纹反射的镜面物体三维面形测量综述[J]. 光学精密工程,2018,26(5):1014-1027. doi:10.3788/OPE.20182605.1014 WANG Y M, ZHANG Z H, GAO N. Review on three-dimensional surface measurements of specular objects based on full-field fringe reflection[J]. Optics and Precision Engineering, 2018, 26(5): 1014-1027. (in Chinese) doi:10.3788/OPE.20182605.1014
[18]	陈瑜, 潘永强, 刘丙才, 等. 基于窗口傅里叶变换的线性相位误差抑制[J]. 光学精密工程,2020,28(6):1314-1322. doi:10.3788/OPE.20202806.1314 CHEN Y, PAN Y Q, LIU B C, et al. Linear phase error suppression technique based on window Fourier transform[J]. Optics and Precision Engineering, 2020, 28(6): 1314-1322. (in Chinese) doi:10.3788/OPE.20202806.1314
[19]	尚万祺, 张文喜, 伍洲, 等. 全视场外差干涉三维测量系统[J]. 光学精密工程,2019,27(10):2097-2104. doi:10.3788/OPE.20192710.2097 SHANG W Q, ZHANG W X, WU ZH, et al. Three-dimensional measurement system based on full-field heterodyne interferometry[J]. Optics and Precision Engineering, 2019, 27(10): 2097-2104. (in Chinese) doi:10.3788/OPE.20192710.2097