May 2021

Article Contents

Chinese Optics> 2021> 14(3): 643-651.

LIU Yong-kun, DING Hong-chang, XIANG Yang, LÜ Si-hang. Rotational angle measurement of galvanometer using reflective circular grating[J]. Chinese Optics, 2021, 14(3): 643-651. doi: 10.37188/CO.2020-0179

Citation:

LIU Yong-kun, DING Hong-chang, XIANG Yang, LÜ Si-hang. Rotational angle measurement of galvanometer using reflective circular grating[J].Chinese Optics, 2021, 14(3): 643-651.doi:10.37188/CO.2020-0179

Citation:

LIU Yong-kun, DING Hong-chang, XIANG Yang, LÜ Si-hang. Rotational angle measurement of galvanometer using reflective circular grating[J].Chinese Optics, 2021, 14(3): 643-651.doi:10.37188/CO.2020-0179

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Rotational angle measurement of galvanometer using reflective circular grating

doi:10.37188/CO.2020-0179

1.
College of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, China
2.
College of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130022, China

Funds:Supported by the National Key Scientific Instrument and Equipment Development Projects (No. 2017YFF0105304); Jilin Province Science and Technology Development Plan focuses on Research and Development Projects (No. 20200401117GX)

More Information

Corresponding author:dinghc@cust.edu.cn;xyciom@163.com
Received Date:10 Oct 2020
Rev Recd Date:10 Nov 2020

Available Online:09 Apr 2021

Publish Date:14 May 2021

Abstract

Abstract

In order to achieve high-precision measurement of the rotation angle of the galvanometer, an angle detection system using a reflective diffraction grating is designed, and its measuring principle, measuring process and measuring precision are designed, simulated and verified. Through a mirror designed coaxially with the galvanometer, with a reflective circular grating and a photosensitive detection device, the ±1st order diffracted light generated by the reflective circular grating is interfered to convert the angular displacement of the galvanometer into a change in the intensity of interference fringes. In this way, the measurement of the rotational angle of the galvanometer is realized. The experimental results show that the detection system can realize the measurement of the galvanometer's angle within ±10°, and the measurement accuracy is 10″. The high-precision measurement of the rotational angle of the galvanometer is realized, and the device has a compact structure to meet the requirements of the scanning galvanometer demand.
- angle measurement,
- reflective circular grating,
- galvanometer rotation angle,
- diffracted light interference

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References (22)

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