Nov. 2021

Article Contents

Chinese Optics> 2021> 14(6): 1362-1367.

YUAN De-bo, XU Liang, ZHANG Wen-bin, ZHOU Zhi-yong, DONG Xiao-hao, LIU Zheng-kun, ZHANG Guo-bin. Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability[J]. Chinese Optics, 2021, 14(6): 1362-1367. doi: 10.37188/CO.2021-0103

Citation:

YUAN De-bo, XU Liang, ZHANG Wen-bin, ZHOU Zhi-yong, DONG Xiao-hao, LIU Zheng-kun, ZHANG Guo-bin. Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability[J].Chinese Optics, 2021, 14(6): 1362-1367.doi:10.37188/CO.2021-0103

Citation:

YUAN De-bo, XU Liang, ZHANG Wen-bin, ZHOU Zhi-yong, DONG Xiao-hao, LIU Zheng-kun, ZHANG Guo-bin. Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability[J].Chinese Optics, 2021, 14(6): 1362-1367.doi:10.37188/CO.2021-0103

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Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability

doi:10.37188/CO.2021-0103

1.
National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
2.
Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences, Xi’an 710119,China
3.
Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
4.
Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China

Funds:Supported by National Key R&D Program of China (No. 2016YFA0401004)

More Information

Corresponding author:gbzhang@ustc.edu.cn
Received Date:10 May 2021
Rev Recd Date:26 May 2021

Available Online:02 Jul 2021

Publish Date:19 Nov 2021

Abstract

Abstract

Ultra-high quality optical elements are demanded by beamlimes on fourth-generation synchrotron facilities and free-electron laser facilities. A bimorph mirror is effectively used to achieve ultra-high-precision surface profile control and wavefront correction, yet it’s one of the bottlenecks of domestic techniques and must be overcome. In order to accomplish this, a 200 mm long bimorph mirror with 36 elements of piezoelectric actuators was developed. The structure parameters of the bimorph mirror were optimized by numerical simulation, and the bimorph mirror was fabricated by domestic technology. The test results show that the surface profile error and slope error of the bimorph mirror can be reduced to 1.38 nm (rms) and 240 nrad (rms), thus the nanoscale control of the mirror surface profile was realized.
- bimorph mirror,
- surface profile error,
- synchrotron radiation,
- adaptive optics

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References (22)

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