基于掩模光刻的液晶波前校正器设计与制备

杜莹; 陈梅蕊; 刘禹彤; 曹宗新; 毛红敏; 李小平; 孙会娟; 曹召良

doi:10.37188/CO.2023-0137

Article Contents

Chinese Optics > 2023 > Accepted Manuscript

DU Ying, CHEN MeiRui, LIU YuTong, CAO ZongXin, MAO HongMin, LI XiaoPing, SUN HuiJuan, CAO ZhaoLiang. Design and fabrication of liquid crystal wavefront corrector based on mask lithography[J]. Chinese Optics. doi: 10.37188/CO.2023-0137

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Design and fabrication of liquid crystal wavefront corrector based on mask lithography

doi: 10.37188/CO.2023-0137

1.
Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China
2.
Basic Department, Jiyuan Vocational and Technical College, Jiyuan 454682, China
3.
Institute of Mathematics and Physics, Beijing Union University, Beijing 100101, China

Funds: This work was supported by Jiangsu Key Disciplines of the Fourteenth Five-Year Plan (No. 2021135); Supported by the Academic Research Projects of Beijing Union University（No. ZK70202007）; Key R&D Projects of Jilin Provincial Department of Science and Technology（No. 20220203033SF）

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Corresponding author: shjwwcnu@163.com
Available Online: 07 Nov 2023

Abstract

Abstract

Liquid crystal wavefront correctors (LCWFCs) have the high development cost and customization difficulty as they are usually fabricated based on the process technology of liquid crystal displays. In the paper, to achieve specialized and low-cost development of LCWFCs, it is fabricated with the mask lithography method. Firstly, a 91 pixels passive liquid crystal driving electrode was designed and prepared based on mask lithography technology and then, packaged as a liquid crystal optical correction unit. Then, a driver connection circuit board was designed and prepared to connect the optical correction unit and the driving circuit board. Next, the response characteristics of the LCWFC were tested, and the results show that the phase modulation is 5.5λ, and the response time is 224 ms. Finally, the spherical waves are generated and the static tilt aberrations are corrected based on Zygo interferometer. The results show that the LCWFC can generate positive and negative defocused wavefronts. Further, after correction of the horizontal tilt aberration, the coefficient of the first term of the Zernike polynomials is decreased from 1.18 to 0.16. Therefore, the aberration is corrected with the amplitude of 86%. This work may provide new ideas for the development of LCWFCs, and then expanding their application fields and scenarios.
- liquid crystal wavefront corrector,
- mask lithography,
- wavefront,
- response characteristic,
- aberration correction

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References(28)

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