[1] 姚楠,王中林.纳米技术中的显微学手册[M]. 北京:清华大学出版社,2006. YAO N,WANG ZH L.
Handbook of Microscopy for Nanotechnology[M]. Beijing:Tsinghua University Press,2006.(in Chinese) [2] CHEN F J,YIN S H,HUANG H,
et al.. Profile error compensation in ultra-precision grinding of aspheric surfaces with on-machine measurement[J].
International J. Machine Tools&
Manufacture,2010,50(5):480-486. [3] XIE J,WEI F,ZHENG J H,
et al.. 3D laser investigation on micron-scale grain protrusion topography of truncated diamond grinding wheel for precision grinding performance[J].
International J. Machine Tools&
Manufacture,2011,51(5):411-419. [4] YANG J M,QIU L R,ZHAO W Q,
et al.. Laser differential reflection-confocal focal-length measurement[J].
Opt. Express,2012,20(23):26027-26036. [5] MOISEEV N N,TSELMINA I Y. Measurement of the roughness parameters with the use of an interference microscope[J].
Measurement Techniques,2012,55(9):990-994. [6] 刘洪兴,张巍,巩岩. 光栅参数测量技术研究进展[J]. 中国光学,2011,4(2):103-110. LIU H X,ZHANG W,GONG Y. Progress in grating parameter measurement technology[J].
Chinese Optics,2011,4(2):103-110.(in Chinese) [7] 李平平,张启灿. 产生正弦光栅的二值化面积编码新方法[J]. 中国光学,2011,9(1):36-41. LI P P,ZHANG Q C. New method of sinusoidal grating generation based on area encoding[J].
Chinese Optics,2011,9(1):36-41.(in Chinese) [8] THOMAS R,ANDREAS W,VERDES,
et al.. Confocal reader for biochip screening and fluorescence microscopy[J].
Biosensors and Bioelectronics,2005,20(9):1872-1877. [9] 张旭,徐维奇. 扫描共聚焦显微镜技术的发展与应用[J]. 现代科学仪器,2001,76(2):21-23. ZHANG X,XU W Q. Development of confocal microscopy and its application[J].
Modern Scientific Instruments,2001,76(2):21-23.(in Chinese) [10] 曾毅波,蒋书森,黄彩虹,等. 共焦扫描显微镜在微机电系统中的应用[J]. 光学 精密工程,2008,16(7):1241-1246. ZENG Y B,JIANG SH S,HUANG C H,
et al.. Application of laser scanning confocal microscope in micro-electro-mechanical system[J].
Opt. Precision Eng.,2008,16(7):1241-1246.(in Chinese) [11] 马小军,高党忠,杨蒙生,等. 应用白光共焦光谱测量金属薄膜厚度[J]. 光学 精密工程,2011,19(1):17-22. MA X J,GAO D ZH,YANG M SH,
et al.. Measurement of thickness of metal thin film by using chromatic confocal spectral technology[J].
Opt. Precision Eng.,2011,19(1):17-22.(in Chinese) [12] MINSKY M. Microscopy Apparatus:US,3013467[P].1961-01-06. [13] TRUSK T C.
3D Reconstruction of Confocal Image Data[M]. Berlin:Springer Verlag,2011:243-272. [14] PETRAN M,HADRAVSKY M,BOYDE A. The tandem scanning optical microscope[J].
Scanning,1985,7:97-108. [15] GRANT D M,McGINTY J,McGHEE E J,
et al.. High speed optically sectioned fluorescence lifetime imaging permits study of live cell signaling events[J].
Opt. Express,2007,15(24):15656-15673. [16] 孔兵,王昭,谭玉山,等. 基于针孔阵列的多光束共焦三维测量系统[J]. 中国 ,2002,29(3):263-266. KONG B,WANG ZH,TAN Y SH,
et al.. Multi-beam confocal system using pinhole array[J].
Chinese J. Lasers,2002,29(3):263-266.(in Chinese) [17] TIZIANI H J,ACHI R,KRMEN R N,
et al.. Theoretical analysis of confocal microscopy with microlenses[J].
Appl. Opt.,1996,35(1):120-125. [18] ESINER M,LINDEIN N,SCHWIDER J. Confocal microscopy with a refractive microlens-pinhole array[J].
Opt. Lett.,1998,23(10):748-749. [19] 田维坚,丁志华,郭履容,等. 一种全场三维共焦检测的新方法[J]. 光学学报,1998,18(6):757-761. TIAN W J,DING ZH H,GUO L R,
et al.. A Confocal method for measuring whole-field three-dimentional surface topography[J].
Acta Optica Sinica,1998,18(6):757-761.(in Chinese) [20] 王永红. 基于全场并行共焦的检测技术与系统研究[D].合肥:合肥工业大学,2003. WANG Y H. Research on the detecting technologies and system based on whole-field parallel confocal [D]. Hefei:Hefei University of Technology,2003.(in Chinese) [21] GMITRO A F,AZIZ D. Confocal microscopy through a fiberoptic imaging bundle[J].
Opt. Lett.,1993,18(8):565-567. [22] LANE P M,DLUGAN A L,RICHARDS-KORTUM R,
et al.. Fiber-optic confocal microscopy using a spatial light modulator[J].
Opt. Lett.,2000,25(24):1780-1782. [23] FAINMAN Y,BOTVINICK E,PRICE J. 3-D Quantitative imaging of the microvasculature with the texas instruments digital micromirror device[J].
SPIE,2001,4457:137-144. [24] HOU W M,ZHANG Y B. Fast parallel 3D profilometer with DMD technology [C].
SPIE,2011,8321:1-7. [25] 余卿. 并行共焦测量系统的并行光源研究[D].合肥:合肥工业大学,2011. YU Q. Research on the parallel light source in laser parallel confocal measurement system [D]. Hefei:Hefei University of Technology,2011.(in Chinese) [26] 余卿,余晓芬,崔长彩. 单光源双光路 并行共焦测量系统设计[J]. 光学 精密工程,2013,21(2):281-286. YU Q,YU X F,CUI CH C. Design of laser parallel confocal measurement system with single source and dual beam paths[J].
Opt. Precision Eng.,2013,21(2):281-286.(in Chinese)
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