May 2017

Article Contents

Chinese Optics> 2017> 10(3): 383-390.

GAO Song-tao, WU Dong-cheng, MIAO Er-long. Distortion correcting method when testing large-departure asphere[J]. Chinese Optics, 2017, 10(3): 383-390. doi: 10.3788/CO.20171003.0383

Citation:

GAO Song-tao, WU Dong-cheng, MIAO Er-long. Distortion correcting method when testing large-departure asphere[J].Chinese Optics, 2017, 10(3): 383-390.doi:10.3788/CO.20171003.0383

GAO Song-tao, WU Dong-cheng, MIAO Er-long. Distortion correcting method when testing large-departure asphere[J]. Chinese Optics, 2017, 10(3): 383-390. doi: 10.3788/CO.20171003.0383

Citation:

GAO Song-tao, WU Dong-cheng, MIAO Er-long. Distortion correcting method when testing large-departure asphere[J].Chinese Optics, 2017, 10(3): 383-390.doi:10.3788/CO.20171003.0383

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Distortion correcting method when testing large-departure asphere

doi:10.3788/CO.20171003.0383

Engineering Research Center of Extreme Precision Optics, State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

Funds:

National Science and Technology Major Project of China2009ZX02205

Received Date:13 Jan 2017
Rev Recd Date:24 Feb 2017
Publish Date:01 Jun 2017

Abstract

Abstract

With the increase in numerical aperture, the aspheric departure is also increasing in the high-NA projection objective. It is a problem to test the large-departure asphere in nanometers in the optical metrology. For an asphere with aspheric departure exceeding 500 micrometers, firstly, we design a CGH to satisfy the demands of high precise testing and etching fabrication. Secondly, the imaging distortion and the effect of distortion on aberration are analyzed quantitatively. The analysis results show that the maximum magnification deviation is 2.7:1 for the different radial positions, and the low order aberrations will generate high order aberrations obviously. Lastly, we propose the ray trace and least square method to correct the imaging distortion when testing large-departure asphere with CGH, and verify the precision of the method through the experiments. The results show that the relative residue is less than 0.2% after correcting, and the precision will satisfy the demands of high precise optical testing and fabrication.
- computer-generated hologram,
- CGH,
- distortion,
- asphere testing

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References (20)

References

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