Volume 1Issue 1
Dec. 2008
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SU Dong-feng, XU Zhijun, HAN Xu-dong. Mechanics analysis of bearing board when reproducing[J]. Chinese Optics, 2008, 1(1): 66-69.
Citation: SU Dong-feng, XU Zhijun, HAN Xu-dong. Mechanics analysis of bearing board when reproducing[J].Chinese Optics, 2008, 1(1): 66-69.

Mechanics analysis of bearing board when reproducing

  • Received Date:11 Sep 2008
  • Rev Recd Date:17 Oct 2008
  • Publish Date:01 Dec 2008
  • To reproduce the supreme diameter and high precision grating, the mechanical properties of bearing board in exposure equipment for reproducing grating was analyzed. By summing up the mechanical analysis on bearing board into a flexibility problem, the formula of the relationship between flexibility and thickness was deduced by theoretical calculation. On the basis of the formula, an exposure equipment with bearing board in thickness of 40 mm and diameter of 1 000 mm was used to reproduce a high precision and large diameter thin grating successfully, experimental results show that the biggest diameter error and uniformity error of the grating is 047″ and 8%, respectively, which can meet the requirement for angle measurement system.

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      沈阳化工大学材料科学与工程学院 沈阳 110142

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