Volume 3Issue 5
Nov. 2010
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LIU Yan, SU Dong-qi, YANG Huai-jiang, SUI Yong-xin. Immunity of phase shifting algorithms to vibration errors in high-accuracy interferometry[J]. Chinese Optics, 2010, 3(5): 500-508.
Citation: LIU Yan, SU Dong-qi, YANG Huai-jiang, SUI Yong-xin. Immunity of phase shifting algorithms to vibration errors in high-accuracy interferometry[J].Chinese Optics, 2010, 3(5): 500-508.

Immunity of phase shifting algorithms to vibration errors in high-accuracy interferometry

  • Received Date:17 May 2010
  • Rev Recd Date:25 Jul 2010
  • Publish Date:25 Oct 2010
  • As vibration errors are the crucial source of error in a high accuracy interferometric test, this paper researches the effect of mechanical vibration on the phase shifting stability. It establishes vibration error models and simulates the immunity of vibration by using the three-step algorithm, five-step algorithm, seven-step algorithm and thirteen-step algorithm, respectively. The results show that the thirteen-step algorithm is the best in immunizing the vibration. For the results agreed with that in other literature, it proves the simulation in this paper is believable. To some extent, the method can give a reasonable prediction of the vibration error which effects the precision of interferometer and it also can evaluate and select the algorithm of phase shifting.

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  • [1] CREATH K. Phase-measurement interferometry techniques[J]. Progress Opt.,1988,(26):349-398. [2] BRUNING J H,HERRIOTT D R,GALLAGHER J E, et al.. Digital wavefront measuring interferometer for testing optical surfaces sand lenses[J]. Appl. Opt.,1974,13(11):2693-2703. [3] WINGERDEN J van,FRANKENA H H,SMORENBURG C. Linear approximation for measurement errors in phase shifting interferometry[J]. Appl. Opt.,1991,30:2718-2729. [4] CREATH K. Comparison of phase-measurement algorithms[J]. SPIE,1986,680:19-28. [5] MALACALA D. Optical Shop Testing[M]. 3rd. Hoboken:A John Wiley & Sons, Inc.,Publication, 2007. [6] GROOT P,DECK L L. Numerical simulations of vibration in phase-shifting interferometry[J]. Appl. Opt.,1996,35(13):2172-2178.
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