Volume 3Issue 6
Dec. 2010
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QV Yi. Measuring instrument for second-order diffraction efficiency of grating in vacuum ultraviolet[J]. Chinese Optics, 2010, 3(6): 566-571.
Citation: QV Yi. Measuring instrument for second-order diffraction efficiency of grating in vacuum ultraviolet[J].Chinese Optics, 2010, 3(6): 566-571.

Measuring instrument for second-order diffraction efficiency of grating in vacuum ultraviolet

  • Received Date:13 May 2010
  • Rev Recd Date:17 Jul 2010
  • Publish Date:20 Dec 2010
  • A method for measuring the second-order diffraction efficiency of a grating in the vacuum ultraviolet region is introduced on the basis of the theory that the sample reflectance is influenced by the second-order diffraction efficiency of the grating. The measuring instrument by using a double path monochromator is also described, which takes a deuterium lap as the light source, a R6095 photomultiplier as the detector, and transforms the violet light into a visible light by a sodium salicylate scintillator film. By using the instrument, the second-order diffraction efficiency of the grating is measured from 120 to 165 nm continuously. Obtained results show that the second-order diffraction efficiency at 161 nm is 0.006 11(10.077 7), and the uncertainty of the system is 14.08%.

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