Volume 3Issue 6
Dec. 2010
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ZHANG Hai-Tao. Modeling for phase shifting point diffraction interferometer based on lens design software[J]. Chinese Optics, 2010, 3(6): 616-622.
Citation: ZHANG Hai-Tao. Modeling for phase shifting point diffraction interferometer based on lens design software[J].Chinese Optics, 2010, 3(6): 616-622.

Modeling for phase shifting point diffraction interferometer based on lens design software

  • Received Date:09 May 2010
  • Rev Recd Date:15 Jul 2010
  • Publish Date:20 Dec 2010
  • To simulate the testing procedure of a Phase Shifting Point Diffraction Interferometer(PSPDI), the working principle of the PSPDI was introduced and its measuring errors were analyzed. On the basis of the lens design software and a inhome software, a test model for the PSPDI was established. By using the test model, the complex amplitudes of the reference beam and test beam were captured in an interference field, furthermore, the testing procedure was simulated. Depending on the optical coherent theory, the phase shifting was realized by changing the positions of testing mirror, and the phase shifting interferograms were acquired. Finally, for a given mirror, the model was used to generate two groups of 13-step phase intergrams with a symmetrical tilt. After processing the interferograms, it is shown that the accuracies of testing spherical mirror are 0.0783 nm(RMS) and 0.5656 nm(PV).

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