Modeling for phase shifting point diffraction interferometer based on lens design software

[1] SMARTT R N,STRONG J. Point-diffraction interferometer[J]. J. Opt. Soc. Amer,1972,62:734-737. [2] KADONO H,TAKAI N,ASAKURA T. New common-path phase shifting interferometer using a polarization technique[J]. Appl. Opt.,1987,26(5):898-904. [3] NEAL M J. Polarization phase-shifting point-diffraction interferometry for measure extreme ultraviolet optics[J]. OSA Trends Opt. Photonics,1999,4:108-112. [4] 刘国淦,张学军,王权陡,等. 光纤点衍射干涉仪的技术研究[J]. 光学 精密工程 , 2001,9(2):142-145. LIU G G,ZHANG X J,WANG Q D, et al.. Fiber point diffraction interferometer[J]. Opt. Precision Eng.,2001,9(2):142-145.(in Chinese) [5] CHEN L F,NIE L,ZHOU T G, et al.. Research on the fiber point diffraction interferometer for spherical figure measurement[J]. SPIE,2008,6357:63574J. [6] 李艳秋,刘克. 相移点衍射干涉仪的关键技术研究[J]. 与光电子学进展 ,2010,47(1):011201. LI Y Q,LIU K. Core techniques of phase-shifting point diffraction interferometer[J]. Laser Optoelectronics Progress,2010,47(1):011201.(in Chinese) [7] STONE B D. Modeling interferometers with lens design software[J]. Opt. Eng.,2000,39(7):1748-1759. [8] STONE B,THOMPSON K P. Modeling interferometers with lens design software:beyond ray-based approaches[J]. SPIE,2009,7427:74270A. [9] GONG Q,GEARY J M. Modeling point diffraction interferometers[J]. Opt. Eng.,1996,35(2) 351-356. [10] OTAKI K,ZHU Y,ISHIJ M, et al.. Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[J]. SPIE,2004,5193:182-190. [11] OTAKI K,BONNEAU F,ICHIHARA Y. Absolute measurement of spherical surface by point diffraction interferometer[J]. SPIE,1999,3740:602-605. [12] JOHNSON M A,PHILLION D W,SOMMARGREN G E, et.al.. Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems[J]. SPIE,2005,5869:58690P.