表面改性碳化硅基底反射镜加工技术现状

康健; 宣斌; 谢京江

doi:10.3788/CO.20130606.824

表面改性碳化硅基底反射镜加工技术现状

doi: 10.3788/CO.20130606.824

康健^1,2,
宣斌¹,
谢京江^1, ,

1.
中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室, 吉林长春 130033;
2.
中国科学院大学, 北京 100049

基金项目:

国家高技术研究发展计划（863计划）资助项目

详细信息

作者简介:
康健（1984-），男，吉林长春人，硕士研究生，2007年于长春理工大学获得学士学位，主要从事大口径非球面加工及检测方面的研究。E-mail：kangjian0116@hotmail.com

通讯作者:
谢京江

中图分类号: TH706;TN304.24
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- 被引次数: 0
出版历程
- 收稿日期: 2013-10-10
- 修回日期: 2013-11-15
- 刊出日期: 2013-12-10

Manufacture technology status of surface modified silicon carbide mirrors

1.
Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
2.
University of Chinese Academy of Sciences, Beijing 100049, China

摘要

摘要: 针对表面改性SiC基底反射镜在空间光学系统中的应用，总结了该类反射镜在国内外的研究现状。概括了碳化硅基底反射镜的发展趋势。介绍了常用的碳化硅材料，分析了它们的性质。给出了几种常用的碳化硅镜坯制备工艺，包括成型、改性和不同的抛光技术。通过对国内现有加工工艺和改性技术的分析，总结出了适应我国的表面改性碳化硅反射镜加工的发展方向。
- 光学加工 /
- 碳化硅 /
- 碳化硅反射镜 /
- 表面改性
Abstract: On the basis of the applications of surface modified silicon carbine mirrors in space optical systems, this paper summarizes the research status and developing trends of this kinds of mirrors at home and abroad. It introduces the widely used silicon carbide materials and their different properties, then gives several kinds of preparation technics of the silicon carbide mirror blanks, such as moulding, modification and different polishing methods. Based on the analysis of manufacture and modification process, a way to improve the manufacture technology of silicon carbide mirrors in China is summed up.
- optical manufacture /
- silicon cabide /
- silicon cabide mirror /
- surface modification

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参考文献(1)

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