Interferometric precision displacement measurement system based on diffraction grating
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摘要:介绍了基于几何莫尔条纹原理和衍射干涉原理的两种光栅精密位移测量系统及各自的特点。综述了国内外对光栅干涉式精密位移测量系统的研究进展，总结了系统存在的关键问题及发展趋势。光栅干涉式精密位移测量系统的优点是对环境要求小，测量分辨率和精度较高，结构紧凑，成本低。该系统需要解决的问题包括提高光栅以及光学元器件制造和安装精度；寻求一种更高精度的检测手段对光栅位移测量系统进行标定等。光栅干涉式精密位移测量系统的发展方向为更高测量分辨率和精度，大量程、多维度测量以及尺寸小巧。该系统在现代工业加工精密制造领域将具有更广阔的应用前景。Abstract:This paper introduces the principles and the characteristics of the grating displacement measurement system based on geometric moire fringe and the principle of diffraction and interference. It summarizes the research progress of the diffraction grating interferometer displacement measurement system at home and abroad and its key problems and development trend. The advantages of the diffraction grating interferometer displacement measurement system are that low the effect of environment requirement, high resolution and precision, compact structure and low cost. The problems of this system needed to be solved include how to improve the fabrication and installation accuracy of grating and optical components, and seek a higher accuracy of detection means to calibrate the grating displacement measurement system and so on. The development trend of the system is higher resolution and accuracy, larger range, multi-dimensional measurement and more compact structure. The diffraction grating interferometer displacement measurement system will have a wider application prospect in the field of modern industrial processing and manufacturing.
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图 1基于几何莫尔条纹原理的光栅位移测量系统结构简图
Figure 1.Schematic diagram of the grating displacement measurement system based on the principle of geometric Moire fringe
图 2基于衍射干涉原理的光栅位移测量系统结构简图
Figure 2.Schematic diagram of the grating displacement measurement system based on the principle of diffraction and interference
图 3Heidenhain公司衍射光栅干涉式位移测量系统原理图
Figure 3.Schematic diagram of the diffraction grating interferometer displacement measurement system in Heidenhain
图 6微型光栅位移测量系统原理图
Figure 6.Schematic diagram of micro diffraction grating interferometer displacement measurement system
图 86自由度测量系统原理图
Figure 8.Conceptual design of the six-DOF surface encoder combined with a three-DOF displacement assembly and a three-DOF angle assembly
图 11采用Littrow结构的光栅位移测量系统原理图
Figure 11.Schematic diagram of diffraction grating interferometer displacement measurement system with Littrow structure
图 12采用单倍望远镜结构的光栅位移测量系统原理图
Figure 12.Schematic diagram of diffraction grating interferometer displacement measurement system with DiLENS configuration
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