三维腹腔镜端面宽带增透膜的研制 -

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三维腹腔镜端面宽带增透膜的研制

长春理工大学,吉林长春 130012

详细信息

作者简介:
魏孜洵(1985—),女,硕士研究生,主要从事现代光学制造技术方面的研究。E-mail:guder222@yahoo.com.cn 付秀华(1963—),女,教授,主要从事光学薄膜及半导体器制造工艺等方面的研究。
魏孜洵(1985—),女,硕士研究生,主要从事现代光学制造技术方面的研究。E-mail:guder222@yahoo.com.cn 付秀华(1963—),女,教授,主要从事光学薄膜及半导体器制造工艺等方面的研究。

中图分类号:O484.1
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出版历程
- 收稿日期:2010-12-21
- 修回日期:2011-02-23
- 刊出日期:2011-04-25

Fabrication of broadband AR coating for three-dimensional laparoscopic facet

School of Opto-electronic Engneering,Changchun University of Science and Technology,Changchun 130012,China

摘要

摘要:根据由多组镜片组成的三维腹腔镜对高透过率和不失真成像的要求,研究并选择了合适的薄膜材料;采用电子束真空镀膜加以离子辅助沉积系统,利用膜系设计软件完成了宽带增透膜的非周期膜系设计。通过调整镀膜工艺参数并采用光控与晶控同时监控的方法,减少了膜厚控制误差,成功地在多组镜片上镀制了宽带增透膜。测试试验显示,制备的膜层在400~700 nm波段的平均反射率＜0.5%,而且颜色不失真,膜层牢固,抗腐蚀效果较好,满足医用光学仪器的使用要求。
- 三维腹腔镜/
- 光学增透膜/
- 真空镀膜/
- 离子辅助沉积
Abstract:According to the requirements of a three-dimensional laparoscope consisting of many group lenses for the high transmittance and distortionless imaging, the appropriate film materials were chosen. Then, a coating design softwave was taken to realize the nonperiod coating system design of the anti-reflective coating by using the vacuum evaporation method and an ion assistant deposition system. By adjusting parameters of coating film and using the technique of optical control and crystal control simultaneously, the thick control error was reduced and the anti-reflection coating was coated on the lenses that were used in the laparoscopy successfully. The test results demonstrate that the average reflectance of the preparated coating is less than 0.5% and it shows color distortionless, securely layers and better effects of resistant to corrosion. These results meet operating requirements of medical optical instruments.
- three-dimensional laparoscopy/
- optical anti-reflection film/
- vacuum evaporation coating/
- ion assistant deposition

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参考文献 (1)

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