300 mm平面标准镜装卡结构的关键参数 -

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300 mm平面标准镜装卡结构的关键参数

中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春 130033

基金项目:

02专项基金资助项目(No.2009ZX02205)

详细信息

中图分类号:TN305.7; TH703
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- 被引次数:0
出版历程
- 收稿日期:2011-01-15
- 修回日期:2011-03-15
- 刊出日期:2011-06-25

Key structural parameters of 300 mm aperture reference flat mirror

State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033, China

摘要

摘要:为了实现大口径平面标准镜的高精结构装卡,对其在重力作用下的面形变化进行了研究。首先,对结构胶的有限元建模进行了理论分析,建立了大口径平面标准镜胶结装卡结构有限元模型。然后,分析了不同胶点数量及分布、不同胶接面积以及不同镜框支撑方式等关键结构参数对参考面面形的影响。最后,设计了大口径平面标准镜胶结及支撑的结构。结果表明,采用胶点直径为5 mm, 123胶点分布形式胶结时,参考面面形的PV值为24.06 nm,RMS值为6.78 nm,满足了大口径平面标准镜面形精度的要求。
- 光学检测/
- 球面标准镜/
- 参考面/
- 有限元法
Abstract:In order to design the structures of large-aperture reference flat mirrors with high-precision, the shapes of a large-aperture reference flat mirror were studied under gravitational conditions. Firstly, the establishing method of the structure adhesive by finite element analysis was elaborated, and the finite element model of large-aperture reference flat mirror supported with adhered spots was established. Then, the influences of different number of adhered points and point distribution, different sizes of spots and support schemes on the shapes of large-aperture reference flat mirrors were researched. Finally, the structure for large-aperture flat mirror supported with adhered spots was designed. The experimental results indicate that by support scheme with 123 distributed and 5mm diameter adhered spots, the peak to valley(PV) value and RMS value of the reference surface is only 24.06 nm and 6.78 nm, respectively, which satisfies the requirement of shape precision of the large-aperture reference flat mirror.
- optical test/
- reference sphere mirror/
- reference surface/
- finite element method

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参考文献 (1)

[1] 苗二龙,张健,谷勇强,等. 用于光刻投影物镜检测的高精度菲佐干涉仪误差分析[J]. 中国 ,2010,37(8):2029-2034. MIAO E L,ZHANG J,GU Y Q,et al.. Measurement error analysis of high precision fizeau interferometer for lithography projection objective[J].Chinese J. Lasers,2010,37(8):2029-2034.(in Chinese) [2] 武旭华,陈磊,王磊.Φ300 mm干涉仪参考镜的设计及测试[J]. 光学精密工程 ,2007,15(8):1235-1240. WU X H,CH L,W L. Design and test of reference mirror inΦ300 mm interferometer[J].Optics and Precision Eng.,2007,15(8):1235-1240.(in Chinese) [3] YODER P R Jr. 光机系统设计[M]. 北京:机械工业出版社,2008. YODER P R Jr.Opto-Meehanieal Systems Design[M]. Beijing:China Machine Press,2008.(in Chinese) [4] 孙天祥,杨力,吴永前,等. 基于弹性力学的应力加工方法有限元分析[J]. 强与粒子束 ,2010,22(2):361-364. SUN T X,YANG L,WU Y Q,et al.. Finite element analysis of stressed mirror polishing based on elasticity mechanics[J].High Power Laser Particle Beams,2010,22(2):361-364.(in Chinese) [5] 李婧. 变厚度圆板轴对称非线性分析 . 天津:天津大学 ,2004. LI J. Nonlinear analysis of spherical shells with arbitrarily variable thickness .Tianjin:Tianjin University,2004.(in Chinese) [6] 李福,阮萍,赵葆常,等. 胶紧固平面反射镜的有限元分析[J]. 光学技术 ,2006,32(6):896-899. LI F,RUAN P,ZHAO B CH,et al.. Finite element analysis of the plane mirror fastened by adhesive[J].Opt. Technique,2006,32(6):896-899.(in Chinese) [7] BLAKE J N,FETH J R,SZAFRANICE B. Control of mode coupling errors:US,5377283 . 1994-12-27. [8] BLAKE J N,FETH J R. Configuration control of mode coupling errors:US,5327213 . 1994-7-5. [9] 蒋世磊,陈华强 .环氧树脂胶在光学部件粘接上的应用[J]. 中国胶粘剂 ,2004,14(3):1-4. JIANG SH L,CHEN H Q. Application of epoxy resin adhesivein optical instruments[J].China Adhesives,2004,14(3):1-4.(in Chinese) [10] 徐荣伟,刘立人,刘宏展,等. 大型干涉仪镜子的支承设计与温度变形分析[J]. 光学学报 ,2005,25(6):809-815. XU R W,LIU L R,LIU H ZH,et al.. Support schemes and thermal deformation analysis of large aperture interferometer mirrors[J].Acta Opt. Sinica,2005,25(6):809-815.(in Chinese)

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