差动式彩色共聚焦粗糙度评定系统及实验研究 -

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差动式彩色共聚焦粗糙度评定系统及实验研究

doi:10.37188/CO.2020-0029

华侨大学机电及自动化学院，福建厦门 361021

基金项目:国家自然科学基金资助项目（No. 51505162）；福建省对外合作项目（No. 2019I0013）；福建省杰青基金项目（No. 2018J06014）；华侨大学研究生科研创新基金资助项目（No. 18013080065）

详细信息

作者简介:
邹景武（1996—），男，福建南平人，硕士研究生，2018年于华侨大学获得学士学位，主要从事光电检测及微纳米测量技术方面的研究。E-mail：zoujingwu96@163.com
余　卿（1983—），男，江西赣州人，博士，副教授，2005年、2011年于合肥工业大学分别获得学士、博士学位，2017年于上海理工大学光学工程博士后流动站出站，主要从事光电检测、精密机械设计方面的研究。E-mail：yuqing@hqu.edu.cn
程　方（1981—），男，安徽芜湖人，博士，华侨大学特聘教授，科技部“国家高端境外专家”、福建省“闽江学者”讲座教授。2003年、2006年、2010年于合肥工业大学分别获得学士、硕士、博士学位，2013年于新加坡南洋理工大学计量实验室博士后流动站出站，主要从事计量学、机器视觉和无损检测等方面的研究。E-mail：chengfang@hqu.edu.cn

中图分类号:TH711；TH741
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出版历程
- 收稿日期:2020-03-02
- 修回日期:2020-04-08
- 网络出版日期:2020-08-08
- 刊出日期:2020-10-01

Differential chromatic confocal roughness evaluation system and experimental research

College of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, China

Funds:Supported by National Natural Science Foundation of China (No. 51505162); Foreign Cooperation Projects of Fujian, China (No.2019I0013); Excellent Outstanding Youth Foundation of Fujian Province of China (No. 2018J06014); Subsidized Project for Postgraduates’ Innovative Fund in Scientific Research of Huaqiao University (No. 18013080065)

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Corresponding author:yuqing@hqu.edu.cn;chengfang@hqu.edu.cn

摘要

摘要:为了满足大范围表面粗糙度测量评定的需求，本文介绍了一种基于彩色共聚焦传感器的差动式非接触测量评定系统和方法。在所提出的系统中，两个彩色共聚焦传感器和一个光学平晶构成差动式测量系统，并通过球头球窝连接方式与机械运动平台耦合。使用这种差动式结构可以补偿机械运动平台的直线度误差，并可以有效地提高测量评定精度。在此基础上，本文建立了表面粗糙度测量、误差补偿和测量性能评估的方法。为了验证所提出系统的性能，对标准高度台阶量块和粗糙度量块进行了测量评定实验。台阶高度的测量实验结果表明，在60 mm的行程范围内，所提出系统6次重复测量的标准偏差 s为0.16 μm，相对标准偏差RSD为0.054%，机械运动平台的直线度误差得到了有效补偿；在测量粗糙度量块时，粗糙度参数 R_a和 R_q的测量误差分别为0.032 μm和0.073 μm。所提出系统的粗糙度测量评定能力满足大多数工程应用的需求。
- 表面粗糙度/
- 差动测量/
- 彩色共聚焦技术/
- 直线度误差
Abstract:In order to meet the demand of large-area surface roughness measurement, a non-contact differential measurement system based on chromatic confocal sensors is presented in this paper. In the proposed system, two chromatic sensors and an optical flat, forming a differential measurement structure, are coupled with the motion system with a ball-to-socket connection. Using this differential configuration, the straightness error of the motion system is compensated and the measurement accuracy can be effectively improved. Based on this system, the methodology of surface roughness measurement, error compensation and measurement performance evaluation is established. In order to verify the measurement performance of the proposed system, standard step heights and roughness comparators are measured. For the step height measurement, the experimental results show that in the travel range of 60 mm, the standard deviation of the proposed system in six repeated measurements is 0.16 μm and the relative standard deviation RSD is 0.054%. From the results, it can be concluded that the straightness error of the motion system has been effectively overcome. When measuring the roughness comparators, the measurement errors of R_aand R_qare 0.032 μm and 0.073 μm, respectively. Therefore, the roughness measurement capability of the proposed system meets the requirements of most engineering applications.
- surface roughness/
- differential measurement/
- chromatic confocal microscopy/
- straightness error

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图 1彩色共聚焦技术原理图

Figure 1.CCM principle diagram

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图 2粗糙度评定装置的结构示意图

Figure 2.Schematic diagram of the roughness measuring instrument

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图 3装置的空间机构原理图

Figure 3.Schematic diagram of space structure of the device

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图 4球头球窝连接方式示意图

Figure 4.Schematic diagram of ball-to-socket connection

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图 5差动测量原理图

Figure 5.Schematic diagram of differential measurement

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图 6数据处理流程图

Figure 6.Data processing flowchart

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图 7粗糙度评定装置实物图

Figure 7.Physical map of roughness evaluation device

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图 8粗糙度量块

Figure 8.Roughness gauge

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图 9测头1测量结果

Figure 9.Roughness results detected by probe 1

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图 10测头2测量结果

Figure 10.Roughness results detected by probe 2

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图 11直线度误差实验的被测量块

Figure 11.Measured step gauge block used for straightness error experiment

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图 12测头1的台阶测量结果

Figure 12.Step measurement results of probe 1

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图 13测头2的台阶测量结果

Figure 13.Step measurement results of probe 2

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图 14直线度误差修正前后对比结果

Figure 14.Comparison results before and after straightness error correction

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表 1直线导轨选型表

Table 1.Linear guide types and corresponding parameters

名称	型号	行程/mm	闭环分辨率/μm
x、y轴位移台	卓立Uksa100	100	0.1
z轴位移台	卓立Ksa050	50	1
从动位移台	THK VRU6210	110	—

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表 2测头技术参数

Table 2.Probe's technical parameters

名称	量程/μm	轴向分辨率/nm
彩色共聚焦测量头1	1000	5
彩色共聚焦测量头2	600	3

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表 3粗糙度R_a对比数据（μm）

Table 3.Comparative data ofR_a(μm)

	Mahr XR20		本文评定装置
样品	R_a	标准偏差s	R_a	标准偏差s
6.3	5.810	0.000577	5.842	0.003971
3.2	2.728	0.001000	2.736	0.002338
1.6	1.471	0.000577	1.493	0.002317
0.8	0.622	0.000577	0.589	0.002251

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表 4R_q对比数据（μm）

Table 4.Comparative data ofR_q(μm)

	Mahr XR20		本文评定装置
样品	R_q	标准偏差s	R_q	标准偏差s
6.3	6.728	0.000577	6.753	0.006623
3.2	3.234	0.001000	3.238	0.003559
1.6	1.737	0.000577	1.746	0.001049
0.8	0.787	0.000577	0.714	0.000753

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