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数字微镜器件超分辨成像光学系统装调误差影响研究

邢思远,王超,徐淼,李英超,史浩东,刘壮,付强

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邢思远, 王超, 徐淼, 李英超, 史浩东, 刘壮, 付强. 数字微镜器件超分辨成像光学系统装调误差影响研究[J]. , 2021, 14(5): 1194-1201. doi: 10.37188/CO.2020-0220
引用本文: 邢思远, 王超, 徐淼, 李英超, 史浩东, 刘壮, 付强. 数字微镜器件超分辨成像光学系统装调误差影响研究[J]. , 2021, 14(5): 1194-1201.doi:10.37188/CO.2020-0220
XING Si-yuan, WANG Chao, XU Miao, LI Ying-chao, SHI Hao-dong, LIU Zhuang, FU Qiang. Influence of alignment error on DMD super-resolution imaging optical system[J]. Chinese Optics, 2021, 14(5): 1194-1201. doi: 10.37188/CO.2020-0220
Citation: XING Si-yuan, WANG Chao, XU Miao, LI Ying-chao, SHI Hao-dong, LIU Zhuang, FU Qiang. Influence of alignment error on DMD super-resolution imaging optical system[J].Chinese Optics, 2021, 14(5): 1194-1201.doi:10.37188/CO.2020-0220

数字微镜器件超分辨成像光学系统装调误差影响研究

doi:10.37188/CO.2020-0220
基金项目:国家自然科学基金(No. 61805028,No. 61805027,No. 61705019,No. 61701045);装发2020年第二批快速扶持项目(No. 61404140517);科工局专项(No. KJSP2016010202);国家自然基金天文联合基金(No. U1731240);吉林省自然科学基金(No. 20180101338JC);应用光学国家重点实验室开放基金(No. SKLA02020001A11)
详细信息
    作者简介:

    邢思远(1997—),男,辽宁铁岭人,硕士研究生,2019年于长春理工大学获得学士学位,主要从事光学设计、计算光学等方面的研究。Email:1249824042@qq.com

    李英超(1966—),男,吉林长春人,工学博士,教授,博士生导师,中国宇航协会光电技术专委会常务委员,主要从事多维度光学特性测试与探测技术,先进光学成像测试技术。Email:hsjlyc@126.com

  • 中图分类号:O436

Influence of alignment error on DMD super-resolution imaging optical system

Funds:Supported by National Natural Science Foundation of China(No. 61805028, No. 61805027, No. 61705019, No. 61701045); The Second Batch of Rapid Support Projects in 2020(No. 61404140517); Special Project of Science and Industry Bureau(No. KJSP2016010202); Joint Astronomical Fund of National Natural Science Foundation of China(No. U1731240); Natural Science Foundation of Jilin Province(No. 20180101338JC); Open Fund of State Key Laboratory of Applied Optics(No. SKLA02020001A11)
More Information
  • 摘要:目前对于超分辨成像技术的研究主要集中在超分辨重建算法方面,光学系统本身的装调误差对超分辨成像结果的影响尚未见报道。针对这一问题,开展了装调误差对超分辨成像影响的研究,建立了基于数字微镜器件(DMD)的超分辨成像光学系统的基本成像模型,设计了一个工作波段为8~12 μm的DMD超分辨成像光学系统,提出了装调误差对超分辨成像质量影响的分析方法。在成像模型中分别引入适当的偏心、倾斜、镜片间隔误差、离焦等装调误差,对超分辨重建结果进行仿真分析,得出了该超分辨成像光学系统装调时的公差范围:该系统在加工装调时 X方向总体偏心误差控制在±0.07 mm以内, Y方向总体偏心误差控制在±0.05 mm以内, X方向和 Y方向的总体倾斜误差控制在±0.06°以内,总体镜片间隔误差控制在±0.02 mm以内,成像物镜的离焦量控制在±0.04 mm以内,投影物镜的离焦量控制在±0.05 mm以内,在此范围内超分辨成像光学系统可以保证超分辨成像的质量。

  • 图 1仿真流程图

    Figure 1.Simulation flow chart

    图 2视场设置

    Figure 2.Field of view settings

    图 3(a)原图和(b)OMP重构图像

    Figure 3.(a) Original image and (b) OMP reconstructed image

    图 4光学系统总体构成

    Figure 4.Overall structure of the optical system

    图 5光学系统结构图

    Figure 5.Structural diagram of optical system

    图 6光学系统的传递函数

    Figure 6.Transfer function of the optical system

    图 7镜片偏心量与重建图像PSNR值的关系

    Figure 7.Relationship between lens eccentricity and PSNR value of reconstructed image

    图 8镜片倾斜量与重建图像PSNR值的关系

    Figure 8.Relationship between lens tilt and PSNR of reconstructed images

    图 9镜片间隔误差与重建图像PSNR值的关系

    Figure 9.Relationship between lens spacing error and the PSNR of reconstructed images

    图 10光学系统离焦与重建图像PSNR值之间的关系

    Figure 10.Relationship between defocus of the optical system and PSNR value of the reconstructed image

    表 1光学系统参数

    Table 1.Performance parameters of the optical system

    Parameter Value
    Wavelength/μm 8~12
    Field of view FOV(X/Y)/(°) 0~4.4/0~3.52
    Fnumber 1.76
    DMD array size 1920 pixel×1080 pixel
    DMD pixel size/μm 10.8
    Detector pixel size/μm 17
    Detector array size 640 pixel×512 pixel
    Dynamic range of detector/dB 29
    下载: 导出CSV

    表 2公差分配结果

    Table 2.Tolerance allocation results

    偏心/mm 倾斜/(°) 镜片间隔
    误差/mm
    成像物镜
    离焦/mm
    投影物镜
    离焦/mm
    X Y X Y
    0.07 0.05 0.06 0.06 0.02 0.04 0.05
    下载: 导出CSV
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出版历程
  • 收稿日期:2020-12-28
  • 修回日期:2021-01-14
  • 网络出版日期:2021-05-08
  • 刊出日期:2021-09-18

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