Research progress of optical fiber Fabry-Perot interferometer high temperature sensors
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摘要:
光纤法布里-珀罗干涉仪高温传感器具有体积小、制作简单、灵敏度高、耐高温和抗电磁干扰等优点,广泛应用于航空航天、能源工业及环境监测等领域。本文首先介绍了光纤法布里-珀罗干涉仪高温传感器的传感原理、传感性能、传感特性和制备方法。然后对其温度、压力和应变的灵敏度和测量范围等特征参数进行了归纳。总结了光纤法布里-珀罗干涉仪高温传感器的国内外研究进展及性能参数。介绍了光纤法布里-珀罗干涉仪传感器温度和压力的交叉敏感问题及解决方法和基于不同种类光纤的法布里-珀罗干涉仪高温传感特性。针对近几年光纤法布里-珀罗干涉仪高温传感器的研究进展,介绍了多种用于双参数测量的光纤法布里-珀罗干涉仪高温传感器。最后对光纤法布里-珀罗干涉仪高温传感器的未来发展趋势和前景进行了展望。
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关键词:
- 光纤法布里-珀罗干涉仪/
- 高温传感器/
- 高温压力测量
Abstract:The high temperature sensor of the optical fiber Fabry-Perot interferometer has the advantages of small size, a simple manufacturing process, high sensitivity, high temperature resistance and anti-electromagnetic interference, which make it widely used in the aerospace energy industry, environmental monitoring and other fields. Firstly, this paper introduces the sensing principle, sensing performance, sensing characteristics and fabrication method of optical fiber Fabry-Perot interferometer high temperature sensors. Secondly, the temperature, pressure and strain sensitivity and measurement range are summarized and the domestic and foreign research progress and the performance parameters of optical fiber Fabry-Perot interferometer high temperature sensors are summarized. Thirdly, the cross-sensitivity problems of temperature and pressure of optical fiber Fabry-Perot interferometer sensors and it’s solutions, and the high-temperature sensing characteristics of Fabry-Perot interferometers based on different kinds of optical fibers are introduced. Fourthly, according to the recent research progress of fiber Fabry-Perot interferometer high temperature sensors, several fiber Fabry-Perot interferometer high temperature sensors for two-parameter measurement are introduced. Finally, the future development trend and prospect of optical fiber Fabry-Perot interferometer high temperature sensors are prospected.
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图 6(a)使用FBG和HST插入石英套管制备的FPI传感器[51];(b)使用蓝宝石晶片直接键合制备的FPI传感器[5];(c)使用飞秒 对SMF进行刻槽,然后通过抛光和熔接制备FPI[6]
Figure 6.(a) FPI sensor fabricated by inserting FBG and HST into quartz sleeve[51]; (b) FPI sensor fabricated by direct bonding of sapphire wafer[5]; (c) SMF grooved by femtosecond laser, then FPI fabricated by polishing and welding[6]
表 1不同IFPI的参数对比
Table 1.Comparison of parameters of various IFPIs
IFPI 温度测量范围 温度灵敏度 应变/压力测量范围 应变/压力灵敏度 2009[16] 25~600 °C 68.6 pm/°C 2010[17] 23~1200 °C 17.5 nm/°C(OPD) 2011[18] 200~1000 °C 1.75×10−5°C 2012[19] 25~1100 °C 39.1 nm/°C(OPD) 2013[20] 24~1000 °C 17.7 pm/°C 2014[21] 30~900 °C 13.9 pm/°C 2015[22] 400~1000 °C 40.7 pm/°C(OPD) 2015[23] 17~1200 °C 10 pm/°C 2018[24] 25~1000 °C 13.6 pm/°C 2018[25] 500~1000 °C 18.6 pm/°C 2018[26] 20~1000 °C 13.57 pm/°C 2018[27] 300~1200 °C 15.61 pm/°C 2019[28] 100~1100 °C 16.92 pm/°C 2019[4] 400~1100 °C 15.88 pm/°C 2019[29] 400~1100 °C 16.36 pm/°C 0~2000 με 1.06 pm/με 2019[30] 300~1200 °C 15.68 pm/°C 2019[31] 0~1600 °C 13.2 pm/°C(1200 °C) 2019[32] 32~1200 °C 15.6 pm/°C 0~3000 µε 1.5 pm/µε(900 °C) 2020[33] 100~1000 °C 15.34 pm/°C 2020[14] 15~1000 °C 15.4 pm/°C 0~2800 με 1.04 pm/με 2020[34] 25~1550 °C 32.5 pm/°C(1550 °C) 2020[35] 20~800 °C 24.52 pm/°C 2020[36] 50~800 °C 12.51 pm/°C(800 °C) 2020[37] 200~1200 °C 15.42 pm/°C 2020[38] 23~1000 °C 17.15 nm/°C(OPD) 2020[39] 400~1000 °C 17.1 pm/°C 注:表中在灵敏度后标注的OPD(Optical Path Difference)为光程差,是通过测量FPI的腔长变化来对外界环境参数进行传感。未进行标注的则是通过测量反射峰的漂移来对外界环境参数进行传感。 表 2不同EFPI的参数对比
Table 2.Comparison of parameters of various EFPIs
EFPI 温度测量范围 温度灵敏度 应变/压力测量范围 应变/压力灵敏度 2005[40] 230~1600 °C 2.798 nm/°C 2010[41] 20~1050 °C 20 pm/°C(OPD) 2012[42] 100~700 °C 0.98 pm/°C 0~800 με 3.14 pm/με 2013[43] 20~700 °C 4.44 pm/°C 0~689.5 kPa 0.28 pm/Pa 2014[44] 20~800 °C 0.59 pm/°C 0~3700 με 1.5 pm/με 2016[45] 23~600 °C 12.3 pm/°C 0~2104 με 1.74 pm/με 2017[46] 23~600 °C 0.51 pm/°C 0~3 MPa 1.53 nm/MPa(600 °C) 2017[47] 23~1000 °C 20.31 pm/°C 2017[48] 19~1000 °C 14.68 pm/°C 2017[49] 20~900 °C 0.044 pm/°C 0.1~0.7 MPa 1.14 nm/MPa(800 °C) 2018[50] 20~600 °C 0.17 pm/°C 0~1.0 MPa −5.912 nm/MPa(600 °C) 2018[51] 20~800 °C 14.8 pm/°C 0.1~0.7 MPa 4.28 nm/MPa 2018[15] 20~800 °C 19.8 nm/°C(OPD) 0~10 MPa 98 nm/MPa 2019[12] 100~1080 °C 4.786 nm/°C(OPD) 2019[52] 100~800 °C 14.31 pm/°C 2019[53] 20~1000 °C 12.26 nm/°C 2019[6] 20~1000 °C 108.11 pm/°C(OPD) 0~10 MPa 70.85 nm/MPa 2019[5] 20~800 °C 1.25 nm/°C(OPD) 20~700 kPa 2.768 μm/MPa(OPD) 2019[54] 20~700 °C 0.215 nm/°C 0~500 kPa 5.22 nm/MPa 2019[55] 20~1000 °C 15.41 pm/°C 0~1000 µε 1.19 pm/µε(900 °C) 2020[56] 25~1000 °C 0.77 pm/°C 2020[10] -50~1200 °C 23 pm/°C 0.4~4.0 MPa 1.2 nm/MPa(1200 °C) 2020[11] 23~1455 °C 1.32 nm/°C(OPD) 2020[57] 100~800 °C 10.74 pm/°C 0~900 µε 21.46 μm/µε(800 °C) 2020[58] 100~1000 °C 18.01 pm/°C 0~450 µε 2.17 pm/µε(800 °C) 2021[59] 200~800 °C 29.9 pm/°C 表 3不同ILFPI的参数对比
Table 3.Comparison of parameters of various ILFPIs
ILFPI 温度测量范围 温度灵敏度 应变/压力测量范围 应变/压力灵敏度 2009[60] 100~600 °C 1.4 nm/°C 0~400 με 5.95 nm/µε 2011[61] 50~750 °C 0.6 pm/°C 0~950 με 2.3 pm/με 2011[62] 25~700 °C 13.7 pm/°C 0~40 MPa −5.8 pm/MPa 2015[63] 0~700 °C 0.45 pm/°C 0~10 MPa 54.7 pm/MPa 2015[64] 250~1050 °C 1.019 nm/°C(1050 °C) 2015[65] 23~900 °C 0.85 pm/°C 0~1000 με 13.9 pm/με 2016[66] 17~900 °C 13.97 pm/°C 0~600 με 1.23 pm/με 2018[67] 100~800 °C 17 nm/°C(OPD) 0~10 MPa 1.336 μm/MPa 2018[68] 0~1005 °C 33.4 pm/°C 0~1400 με 0.46 pm/με 2019[69] 20~900 °C 0.82 pm/°C 0.3~2.7 MPa 4.24 nm/MPa 2019[70] 24~1000 °C 535.16 pm/°C 2020[71] 20~1000 °C 0.64 pm/°C 0~1000 με 1.23 pm/με 2020[72] 100~1100 °C 16.91 pm/°C 0~2400 με 1 pm/με 2020[73] 40~1000 °C 25.3 nm/°C 0~10 MPa 356.5 nm/MPa(1000 °C) 表 4FPI高温应变/压力传感器交叉灵敏度对比
Table 4.Comparison of cross-sensitivity of FPI high temperature strain/pressure sensors
FPI 温度灵敏度 应变/压力灵敏度 交叉灵敏度 2011[61] 0.6 pm/°C 2.3 pm/με 4 με/ °C 2013[43] 4.44 pm/°C 0.28 pm/Pa 15.86 Pa/ °C 2015[65] 0.85 pm/°C 13.9 pm/με 0.18 με/ °C 2018[15] 19.8 nm/°C(OPD) 98 nm/MPa 1490 Pa/ °C 2018[67] 17 nm/°C 1.336 μm/MPa −15 Pa/ °C,0.3 °C/MPa 2019[6] 108.11 pm/°C(OPD) 70.85 nm/MPa 1525 Pa/ °C 2019[55] 0.215 nm/°C 5.22 nm/MPa 67.6 Pa/ °C 2019[69] 0.82 pm/°C 4.24 nm/MPa 192 Pa/ °C 2020[10] 23 pm/°C 1.2 nm/MPa 2×104Pa/ °C -
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