光纤法布里-珀罗干涉仪高温传感器研究进展 -

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光纤法布里-珀罗干涉仪高温传感器研究进展

doi:10.37188/CO.2021-0219

1.
吉林大学电子科学与工程学院集成光电子国家重点实验室, 吉林长春 130012
2.
中国科学院长春光学精密机械与物理研究所发光学及应用国家重点实验室, 吉林长春 130033

基金项目:国家自然科学基金项目（No. 91860140，No. 61874119，No. 61905244）；吉林省科技发展规划项目(No. 20180201014GX)

详细信息

作者简介:
李爱武（1971—），女，吉林长春人，博士，副教授，硕士生导师，2005年于吉林大学获得博士学位，现为吉林大学电子科学与工程学院副教授，主要从事光纤传感方面的研究。E-mail：liaw@jlu.edu.cn
单天奇（1997—），男，吉林长春人，硕士研究生，2019年于吉林大学获得学士学位，主要从事光纤传感方面的研究。E-mail：1750011737@qq.com
于永森（1974—），男，吉林长春人，博士，教授，博士生导师，2005年于吉林大学获得博士学位，现为吉林大学电子科学与工程学院教授，主要从事光纤传感，微纳加工研究。E-mail：yuys@jlu.edu.cn

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出版历程
- 收稿日期:2021-12-13
- 录用日期:2022-03-23
- 修回日期:2022-01-10
- 网络出版日期:2022-04-27

Research progress of optical fiber Fabry-Perot interferometer high temperature sensors

1.
State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China
2.
State Key Laboratory of Luminescence and Application, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

Funds:Supported by National Natural Science Foundation of China (No. 91860140, No. 61874119, No. 61905244); Science and Technology Development Project of Jilin Province (No. 20180201014GX)

More Information

Corresponding author:yuys@jlu.edu.cn

摘要

摘要:
光纤法布里-珀罗干涉仪高温传感器具有体积小、制作简单、灵敏度高、耐高温和抗电磁干扰等优点，广泛应用于航空航天、能源工业及环境监测等领域。本文首先介绍了光纤法布里-珀罗干涉仪高温传感器的传感原理、传感性能、传感特性和制备方法。然后对其温度、压力和应变的灵敏度和测量范围等特征参数进行了归纳。总结了光纤法布里-珀罗干涉仪高温传感器的国内外研究进展及性能参数。介绍了光纤法布里-珀罗干涉仪传感器温度和压力的交叉敏感问题及解决方法和基于不同种类光纤的法布里-珀罗干涉仪高温传感特性。针对近几年光纤法布里-珀罗干涉仪高温传感器的研究进展，介绍了多种用于双参数测量的光纤法布里-珀罗干涉仪高温传感器。最后对光纤法布里-珀罗干涉仪高温传感器的未来发展趋势和前景进行了展望。
- 光纤法布里-珀罗干涉仪/
- 高温传感器/
- 高温压力测量
Abstract:
The high temperature sensor of the optical fiber Fabry-Perot interferometer has the advantages of small size, a simple manufacturing process, high sensitivity, high temperature resistance and anti-electromagnetic interference, which make it widely used in the aerospace energy industry, environmental monitoring and other fields. Firstly, this paper introduces the sensing principle, sensing performance, sensing characteristics and fabrication method of optical fiber Fabry-Perot interferometer high temperature sensors. Secondly, the temperature, pressure and strain sensitivity and measurement range are summarized and the domestic and foreign research progress and the performance parameters of optical fiber Fabry-Perot interferometer high temperature sensors are summarized. Thirdly, the cross-sensitivity problems of temperature and pressure of optical fiber Fabry-Perot interferometer sensors and it’s solutions, and the high-temperature sensing characteristics of Fabry-Perot interferometers based on different kinds of optical fibers are introduced. Fourthly, according to the recent research progress of fiber Fabry-Perot interferometer high temperature sensors, several fiber Fabry-Perot interferometer high temperature sensors for two-parameter measurement are introduced. Finally, the future development trend and prospect of optical fiber Fabry-Perot interferometer high temperature sensors are prospected.
- optical fiber Fabry-Perot interferometer/
- high temperature sensors/
- high temperature pressure measurement

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图 1多光束干涉原理图

Figure 1.Schematic diagram of multi-beam interference

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图 2典型的（a）IFPI、（b）EFPI和（c）ILFPI结构图

Figure 2.Structure diagrams of a typical (a) IFPI, (b) EFPI and (c) ILFPI

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图 3（a）基于SF和蓝宝石晶片制备的无源EFPI高温传感器^[75]；（b）双SF和蓝宝石晶片制备的自滤波EFPI高温传感器^[12]

Figure 3.(a) Sourceless EFPI high temperature sensor based on sapphire fiber and sapphire wafer^[75]; (b) self-filtering EFPI high temperature sensor fabricated by double sapphire fiber and sapphire wafer^[12]

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图 4（a）基于SF和蓝宝石晶片制备的FPI高温传感器^[34]；（b）使用三层蓝宝石晶片直接键合制备的EFPI高温传感器^[10]

Figure 4.(a) FPI high temperature sensor based on sapphire fiber and sapphire wafer^[34]; (b) EFPI high temperature sensor fabricated by direct bonding of three-layer sapphire wafers^[10]

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图 5（a）使用SMF和HCF熔接制备的ILFPI传感器^[68]；（b）使用FBG和FPI级联制备的混合光纤传感器^[83]；（c）使用CDF制备的光纤FPI传感器^[32]

Figure 5.(a) ILFPI sensor fabricated by fusion of SMF and HCF^[68]; (b) hybrid fiber-optic sensor fabricated by cascade of FBG and FPI^[83]; (c) fiber-optic FPI sensor fabricated by CDF^[32]

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图 6（a）使用FBG和HST插入石英套管制备的FPI传感器^[51]；（b）使用蓝宝石晶片直接键合制备的FPI传感器^[5]；（c）使用飞秒对SMF进行刻槽，然后通过抛光和熔接制备FPI^[6]

Figure 6.(a) FPI sensor fabricated by inserting FBG and HST into quartz sleeve^[51]; (b) FPI sensor fabricated by direct bonding of sapphire wafer^[5]; (c) SMF grooved by femtosecond laser, then FPI fabricated by polishing and welding^[6]

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图 7光纤FPI高温加速传感器示意图^[84]

Figure 7.Schematic diagram of optical fiber FPI high temperature acceleration sensors^[84]

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图 8具有悬臂梁的FPI高温振动传感器示意图^[85]

Figure 8.Schematic diagram of FPI high temperature vibration sensors based on micro-cantilever beam^[85]

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图 96H-SiC蓝宝石光纤高温振动传感器示意图^[86]

Figure 9.Schematic diagram of 6H-SiC sapphire fiber vibration sensor^[86]

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表 1不同IFPI的参数对比

Table 1.Comparison of parameters of various IFPIs

IFPI	温度测量范围	温度灵敏度	应变/压力测量范围	应变/压力灵敏度
2009^[16]	25~600 °C	68.6 pm/°C
2010^[17]	23~1200 °C	17.5 nm/°C(OPD)
2011^[18]	200~1000 °C	1.75×10⁻⁵°C
2012^[19]	25~1100 °C	39.1 nm/°C(OPD)
2013^[20]	24~1000 °C	17.7 pm/°C
2014^[21]	30~900 °C	13.9 pm/°C
2015^[22]	400~1000 °C	40.7 pm/°C(OPD)
2015^[23]	17~1200 °C	10 pm/°C
2018^[24]	25~1000 °C	13.6 pm/°C
2018^[25]	500~1000 °C	18.6 pm/°C
2018^[26]	20~1000 °C	13.57 pm/°C
2018^[27]	300~1200 °C	15.61 pm/°C
2019^[28]	100~1100 °C	16.92 pm/°C
2019^[4]	400~1100 °C	15.88 pm/°C
2019^[29]	400~1100 °C	16.36 pm/°C	0~2000 με	1.06 pm/με
2019^[30]	300~1200 °C	15.68 pm/°C
2019^[31]	0~1600 °C	13.2 pm/°C(1200 °C)
2019^[32]	32~1200 °C	15.6 pm/°C	0~3000 µε	1.5 pm/µε(900 °C)
2020^[33]	100~1000 °C	15.34 pm/°C
2020^[14]	15~1000 °C	15.4 pm/°C	0~2800 με	1.04 pm/με
2020^[34]	25~1550 °C	32.5 pm/°C(1550 °C)
2020^[35]	20~800 °C	24.52 pm/°C
2020^[36]	50~800 °C	12.51 pm/°C(800 °C)
2020^[37]	200~1200 °C	15.42 pm/°C
2020^[38]	23~1000 °C	17.15 nm/°C(OPD)
2020^[39]	400~1000 °C	17.1 pm/°C
注：表中在灵敏度后标注的OPD(Optical Path Difference)为光程差，是通过测量FPI的腔长变化来对外界环境参数进行传感。未进行标注的则是通过测量反射峰的漂移来对外界环境参数进行传感。

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表 2不同EFPI的参数对比

Table 2.Comparison of parameters of various EFPIs

EFPI	温度测量范围	温度灵敏度	应变/压力测量范围	应变/压力灵敏度
2005^[40]	230~1600 °C	2.798 nm/°C
2010^[41]	20~1050 °C	20 pm/°C(OPD)
2012^[42]	100~700 °C	0.98 pm/°C	0~800 με	3.14 pm/με
2013^[43]	20~700 °C	4.44 pm/°C	0~689.5 kPa	0.28 pm/Pa
2014^[44]	20~800 °C	0.59 pm/°C	0~3700 με	1.5 pm/με
2016^[45]	23~600 °C	12.3 pm/°C	0~2104 με	1.74 pm/με
2017^[46]	23~600 °C	0.51 pm/°C	0~3 MPa	1.53 nm/MPa(600 °C)
2017^[47]	23~1000 °C	20.31 pm/°C
2017^[48]	19~1000 °C	14.68 pm/°C
2017^[49]	20~900 °C	0.044 pm/°C	0.1~0.7 MPa	1.14 nm/MPa(800 °C)
2018^[50]	20~600 °C	0.17 pm/°C	0~1.0 MPa	−5.912 nm/MPa(600 °C)
2018^[51]	20~800 °C	14.8 pm/°C	0.1~0.7 MPa	4.28 nm/MPa
2018^[15]	20~800 °C	19.8 nm/°C(OPD)	0~10 MPa	98 nm/MPa
2019^[12]	100~1080 °C	4.786 nm/°C(OPD)
2019^[52]	100~800 °C	14.31 pm/°C
2019^[53]	20~1000 °C	12.26 nm/°C
2019^[6]	20~1000 °C	108.11 pm/°C(OPD)	0~10 MPa	70.85 nm/MPa
2019^[5]	20~800 °C	1.25 nm/°C(OPD)	20~700 kPa	2.768 μm/MPa(OPD)
2019^[54]	20~700 °C	0.215 nm/°C	0~500 kPa	5.22 nm/MPa
2019^[55]	20~1000 °C	15.41 pm/°C	0~1000 µε	1.19 pm/µε(900 °C)
2020^[56]	25~1000 °C	0.77 pm/°C
2020^[10]	-50~1200 °C	23 pm/°C	0.4~4.0 MPa	1.2 nm/MPa(1200 °C)
2020^[11]	23~1455 °C	1.32 nm/°C(OPD)
2020^[57]	100~800 °C	10.74 pm/°C	0~900 µε	21.46 μm/µε(800 °C)
2020^[58]	100~1000 °C	18.01 pm/°C	0~450 µε	2.17 pm/µε(800 °C)
2021^[59]	200~800 °C	29.9 pm/°C

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表 3不同ILFPI的参数对比

Table 3.Comparison of parameters of various ILFPIs

ILFPI	温度测量范围	温度灵敏度	应变/压力测量范围	应变/压力灵敏度
2009^[60]	100~600 °C	1.4 nm/°C	0~400 με	5.95 nm/µε
2011^[61]	50~750 °C	0.6 pm/°C	0~950 με	2.3 pm/με
2011^[62]	25~700 °C	13.7 pm/°C	0~40 MPa	−5.8 pm/MPa
2015^[63]	0~700 °C	0.45 pm/°C	0~10 MPa	54.7 pm/MPa
2015^[64]	250~1050 °C	1.019 nm/°C(1050 °C)
2015^[65]	23~900 °C	0.85 pm/°C	0~1000 με	13.9 pm/με
2016^[66]	17~900 °C	13.97 pm/°C	0~600 με	1.23 pm/με
2018^[67]	100~800 °C	17 nm/°C(OPD)	0~10 MPa	1.336 μm/MPa
2018^[68]	0~1005 °C	33.4 pm/°C	0~1400 με	0.46 pm/με
2019^[69]	20~900 °C	0.82 pm/°C	0.3~2.7 MPa	4.24 nm/MPa
2019^[70]	24~1000 °C	535.16 pm/°C
2020^[71]	20~1000 °C	0.64 pm/°C	0~1000 με	1.23 pm/με
2020^[72]	100~1100 °C	16.91 pm/°C	0~2400 με	1 pm/με
2020^[73]	40~1000 °C	25.3 nm/°C	0~10 MPa	356.5 nm/MPa(1000 °C)

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表 4FPI高温应变/压力传感器交叉灵敏度对比

Table 4.Comparison of cross-sensitivity of FPI high temperature strain/pressure sensors

FPI	温度灵敏度	应变/压力灵敏度	交叉灵敏度
2011^[61]	0.6 pm/°C	2.3 pm/με	4 με/ °C
2013^[43]	4.44 pm/°C	0.28 pm/Pa	15.86 Pa/ °C
2015^[65]	0.85 pm/°C	13.9 pm/με	0.18 με/ °C
2018^[15]	19.8 nm/°C(OPD)	98 nm/MPa	1490 Pa/ °C
2018^[67]	17 nm/°C	1.336 μm/MPa	−15 Pa/ °C，0.3 °C/MPa
2019^[6]	108.11 pm/°C(OPD)	70.85 nm/MPa	1525 Pa/ °C
2019^[55]	0.215 nm/°C	5.22 nm/MPa	67.6 Pa/ °C
2019^[69]	0.82 pm/°C	4.24 nm/MPa	192 Pa/ °C
2020^[10]	23 pm/°C	1.2 nm/MPa	2×10⁴Pa/ °C

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