产生环形的光学系统设计 -

姓名
邮箱
手机号码
标题
留言内容
验证码

产生环形的光学系统设计

doi:10.37188/CO.2023-0045

1.
苏州科技大学物理科学与技术学院江苏省微纳热流技术与能源应用重点实验室, 江苏苏州 215009
2.
苏州明世光学科技有限公司, 江苏苏州 215127
3.
江苏省研究生工作站苏州苏大明世光学股份有限公司, 江苏苏州 215127

基金项目:国家自然科学基金资助项目（No. 62275187，No. 61875145，No. 11804243）；江苏省十四五光学工程重点学科项目资助（No. 2021135）；苏州市产业前瞻与关键核心技术项目资助（No. SYC2022145）；苏州市重点实验室（No. SZS201202）

详细信息

作者简介:
陈宝华（1990—），男，江苏泰州人，实验师，2016年于苏州大学获得硕士学位，现为苏州科技大学物理实验中心实验师，主要从事光学仪器加工与检测方面研究。E-mail：chenbaohua@mail.usts.edu.cn
吴泉英（1965—），女，江苏苏州人，教授，博士生导师，2006年于苏州大学获得博士学位，现为苏州科技大学物理科学与技术学院教授，主要从事光学仪器设计、加工与检测方面研究。E-mail：wqycyh@mail.usts.edu.cn

中图分类号:O439
计量
- 文章访问数:194
- HTML全文浏览量:128
- PDF下载量:133
- 被引次数:0
出版历程
- 收稿日期:2023-03-20
- 修回日期:2023-04-19
- 网络出版日期:2023-07-12

Design of an optical system for generating ring-shaped laser beam

1.
Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China
2.
Suzhou Mason Optical Co. Ltd., Suzhou 215127, China
3.
Graduate Practice Station in Soochow Mason Optics Co. Ltd., Suzhou 215127, China

Funds:Supported by National Natural Science Foundation of China (No. 62275187, No. 61875145, No. 11804243); The Jiangsu Key Disciplines of the Fourteenth Five-Year Plan (No. 2021135); Suzhou Industrial Outlook and Key Core Technology Project (No. SYC2022145); Suzhou Key Laboratory (No. SZS201202)

More Information

Corresponding author:wqycyh@mail.usts.edu.cn

摘要

摘要:
为了产生半径可自由调控的聚焦环形且确保离焦后光束强度仍均匀，本文提出一种透射-反射式组合的环形光光学系统设计方法。对于透射式系统，基于等能量分割原理，建立入射光与出射光投射高度的映射函数，优化透镜的各项参数，将入射的高斯光先整形成平顶圆形光，实现光束强度均匀化。反射式系统通过调整焦面环形光直径调控范围、工作距离等参数，结合几何光线追迹原理，计算圆锥反射镜、抛物柱面镜及动镜的各项参数，将平顶圆形光再整形成环形光。实验结果表明：当动镜半顶角为16°时，所设计系统能够实现聚焦环形光半径在15~30 mm范围的自由调控，尺寸误差不超过0.05 mm，离焦后强度均匀度达到84%。该设计方法无需更换系统镜片即可兼顾强度均匀性和尺寸自由度，可操作性好，产生的环形光加工精度和效率更高。
- 光学系统/
- 环形/
- 半径调控/
- 离焦均匀
Abstract:
We present a method for designing a transmissive-reflective combined optical system to generate a focused ring-shaped laser beam. The design aims to achieve a freely adjustable radius for the focused ring-shaped laser beam and ensure uniform beam intensity even after defocusing. Based on the principle of equal energy splitting, the transmissive system establishes mapping functions for the input and output light projection height. It optimizes the lens parameters to shape the incident Gaussian light into a flat-topped circular shape, thus achieving uniformity of beam intensity. On the other hand, the reflective system uses the adjustable diameter range of the focal plane ring-shaped light and working distance parameters. By applying the principle of geometric ray tracing, it calculates the parameters of the conical reflecting mirror, parabolic cylindrical mirror, and dynamic mirror, then the flat-topped circular light is transformed into a ring-shaped light. The experimental results show that when the half-apex angle of the dynamic mirror is 16°, the designed system can achieve a freely adjustable radius for the focused ring-shaped laser beam from 15 mm to 30 mm with a size error not more than 0.05 mm, and the intensity uniformity after defocusing reaches 84%. The design method can achieve both uniformity of intensity and freedom of size adjustment without replacing the system lens. It has good operability and yields higher precision and efficiency in the processing of ring-shaped light.
- optical system/
- ring-shaped laser/
- radius control/
- defocus uniformity

HTML全文

图 1透射-反射式组合的环形光光学系统

Figure 1.Transmissive-reflective combined ring-shaped beam optical system

下载: 全尺寸图片幻灯片

图 2透射式平顶光束整形系统

Figure 2.Transmissive flat-top beam shaping system

下载: 全尺寸图片幻灯片

图 3不同切趾因子的（a）高斯光强分布曲线及（b）投射高度关系曲线

Figure 3.(a) Gaussian light intensity distribution curves and (b) projection height curve under different apodization factors

下载: 全尺寸图片幻灯片

图 4透射式平顶光束整形系统设计图及设计结果

Figure 4.Transmission flat-topped beam shaping system and the results of the system

下载: 全尺寸图片幻灯片

图 5反射式聚焦环形光整形系统

Figure 5.Reflective focusing ring-shaped laser beam system

下载: 全尺寸图片幻灯片

图 6半顶角θ与移动距离L和焦面补偿距离ΔZ之间的关系曲线图

Figure 6.Relationship between the half vertex angleθ, and the distanceL, the focal compensation distance ΔZ

下载: 全尺寸图片幻灯片

图 7动镜是内圆锥时的反射式环形光系统及焊接应用

Figure 7.The optical system and welding application when the moving mirror is an inner conical mirror

下载: 全尺寸图片幻灯片

图 8透射-反射式光学系统及焦面环形光尺寸参数

Figure 8.Transmission-reflection optical system and ring-shaped laser beam size parameters of focal plane

下载: 全尺寸图片幻灯片

图 9平顶光整形前后的离焦光强分布图

Figure 9.Defocused light intensity distribution maps before and after flat top beam shaping

下载: 全尺寸图片幻灯片

图 10镜片实物图

Figure 10.Diagram of lens components

下载: 全尺寸图片幻灯片

图 11实验光路图

Figure 11.Experimental laser beam path diagram

下载: 全尺寸图片幻灯片

图 12聚焦环形光半径调节示意图及实测与理论尺寸对比曲线

Figure 12.Adjustment diagram of focused ring-shaped laser beam radius and comparison curve between theoretical and actual measurement values

下载: 全尺寸图片幻灯片

图 13环形光的离焦结果

Figure 13.Defocusing results of ring-shaped laser beam

下载: 全尺寸图片幻灯片

图 14环形光系统中的平行平板玻璃透镜

Figure 14.Parallel flat lens in the ring-shaped laser beam system

下载: 全尺寸图片幻灯片

表 1初始条件

Table 1.Initial condition

	入瞳半径 d/mm	波长 λ/nm	D /mm	S /mm	工作距离 /mm	均匀度 /%
数值	12	632.8	30	15	150~170	>80%

下载: 导出CSV

表 2透镜参数

Table 2.Lens parameters

	有效直径/mm	材料	厚度/mm	曲率半径/mm	Conic	A₄	A₆	A₈	A₁₀
面型1	27	PMMA	15	5	−1.914	1.047×10⁻⁴	−3.943×10⁻⁷	1.167×10⁻⁹	−1.609×10⁻¹²
面型2	36	PMMA	12	17.877	−0.959	−1.983×10⁻⁴	3.056×10⁻⁸	−4.444×10⁻¹¹	7.283×10⁻¹⁴

下载: 导出CSV

表 3反射镜及面上特征点参数

Table 3.Parameters of characteristic points on the mirror and surface

	α(°)	Q	F	f/mm	K	θ(°)	L/mm	ΔZ/mm	材料
数值	45	(18，−114.04)	(−50，−22.04)	160	(70，−180.04)	16	27.2	4.5	7075-T6

下载: 导出CSV

参考文献 (22)

[1]	SUGIOKA K, CHENG Y. A tutorial on optics for ultrafast laser materials processing: basic microprocessing system to beam shaping and advanced focusing methods[J].Advanced Optical Technologies, 2012, 1(5): 353-364.doi:10.1515/aot-2012-0033
[2]	吴顺华, 刘国军, 王贞福, 等. 低温808 nm高效率半导体器[J]. 发光学报,2022,43(5):786-795.doi:10.37188/CJL.20220025 WU SH H, LIU G J, WANG ZH F,et al. Low temperature 808 nm high efficiency semiconductor laser[J].Chinese Journal of Luminescence, 2022, 43(5): 786-795. (in Chinese)doi:10.37188/CJL.20220025
[3]	顾勇刚, 牛健, 杨坚, 等. 在医疗领域中的应用[J]. 中国光学(中英文),2023,16(2):283-295.doi:10.37188/CO.2023-0017 GU Y G, NIU J, YANG J,et al. Application of laser in the medical field[J].Chinese Optics, 2023, 16(2): 283-295. (in Chinese)doi:10.37188/CO.2023-0017
[4]	韩赛一, 田思聪, 徐汉阳, 等. 高速1 550 nm垂直腔面发射器研究进展[J]. 发光学报,2022,43(5):736-744.doi:10.37188/CJL.20220048 HAN S Y, TIAN S C, XU H Y,et al. Research progress of high-speed 1550 nm vertical cavity surface emitting laser[J].Chinese Journal of Luminescence, 2022, 43(5): 736-744. (in Chinese)doi:10.37188/CJL.20220048
[5]	刘小亮, 孙少华, 孟祥厅, 等. 诱导击穿光谱法测定稀土矿区土壤中钐含量[J]. 中国光学(中英文),2022,15(4):712-721.doi:10.37188/CO.2022-0042 LIU X L, SUN SH H, MENG X T,et al. Measurement of Sm in rare earth mineral soil using laser-induced Breakdown spectroscopy[J].Chinese Optics, 2022, 15(4): 712-721. (in Chinese)doi:10.37188/CO.2022-0042
[6]	高瑀含. 高斯光束整形技术研究[D]. 长春: 长春理工大学, 2012. GAO Y H. Research on Gaussian beam shaping[D]. Changchun: Changchun University of Science and Technology, 2012. (in Chinese)
[7]	范祺, 蔡玉强, 贾思楠. 基于RobotStudio的机器人焊接工作站仿真[J]. 华北理工大学学报(自然科学版),2023,45(1):81-88. FAN Q, CAI Y Q, JIA S N. Robot welding workstation simulation based on Robot Studio[J].Journal of North China University of Science and Technology(Natural Science Edition), 2023, 45(1): 81-88. (in Chinese)
[8]	陈银银. 基于视觉焊缝跟踪技术的机器人焊接智能产线设计[J]. 科技创新与应用,2023,13(1):120-123. CHEN Y Y. Design of robot welding intelligent production line based on laser vision seam tracking technology[J].Technology Innovation and Application, 2023, 13(1): 120-123. (in Chinese)
[9]	SHAMOV E M, EVTIHEEV N N, SHIGANOV I N,et al. Technology and equipment for laser welding of annular pipes junction in fixed position of gas-main pipelines[J].Journal of Physics:Conference Series, 2018, 1109(1): 012025.
[10]	付强, 闫磊, 谭双龙, 等. 轻小型金属基增材制造光学系统[J]. 中国光学(中英文),2022,15(5):1019-1028.doi:10.37188/CO.2022-0128 FU Q, YAN L, TAN SH L,et al. Light-and-small optical systems by metal-based additive manufacturing[J].Chinese Optics, 2022, 15(5): 1019-1028. (in Chinese)doi:10.37188/CO.2022-0128
[11]	傅戈雁, 石世宏, 韩学磊. 环形光内同轴送丝焊接试验研究[J]. 中国 ,2010,37(8):2080-2085.doi:10.3788/CJL20103708.2080 FU G Y, SHI SH H, HAN X L. Test research of laser welding based on coaxial wire feeding through an annular laser beam[J].Chinese Journal of Lasers, 2010, 37(8): 2080-2085. (in Chinese)doi:10.3788/CJL20103708.2080
[12]	KOTAR M, FUJISHIMA M, LEVY G N. Advances in the understanding of the annular laser beam wire cladding process[J].Journal of Materials Processing Technology, 2021, 294: 117105.doi:10.1016/j.jmatprotec.2021.117105
[13]	SHEN ZH X, YU J, SONG ZH ZH,et al. Customized design and efficient fabrication of two freeform aluminum mirrors by single point diamond turning technique[J].Applied Optics, 2019, 58(9): 2269-2276.doi:10.1364/AO.58.002269
[14]	王德恩, 杨英, 张鑫, 等. 一种环形光束变换装置及变换方法: 中国, 108931855A[P]. 2018-12-04. WANG D E, YANG Y, ZHANG X,et al.. An annular beam conversion device and conversion method: CN, 108931855A[P]. 2018-12-04. (in Chinese)
[15]	田玉元, 张佳琦, 姜潇桐, 等. 轴向位置可调的双中空环形光斑[J]. 中国光学(中英文),2023,16(2):329-338.doi:10.37188/CO.2022-0036 TIAN Y Y, ZHANG J Q, JIANG X T,et al. Double doughnut-shaped focal spots with controllable position in axial direction[J].Chinese Optics, 2023, 16(2): 329-338. (in Chinese)doi:10.37188/CO.2022-0036
[16]	史光远. 基于非球面柱透镜的高斯光束整形[D]. 天津: 天津理工大学, 2014. SHI G Y. Gaussian beam shaping based on aspheric cylindrical lenses[D]. Tianjin: Tianjin University of Technology, 2014. (in Chinese)
[17]	常颖, 王狮凌. 基于球面-非球面柱透镜的圆光斑高斯光束整形[J]. 与光电子学进展,2018,55(6):89-94. CHANG Y, WANG SH L. Gaussian beam shaping of round spot based on spheric-aspheric cylindrical lens[J].Laser&Optoelectronics Progress, 2018, 55(6): 89-94. (in Chinese)
[18]	胡萍, 刘晓萌, 田颖, 等. 直接泵浦中红外Dy: PbGa₂S₄ 器研究进展[J]. 发光学报,2022,43(12):1905-1914.doi:10.37188/CJL.20220203 HU P, LIU X M, TIAN Y,et al. Research progress of directly pumped mid-infrared Dy: PbGa₂S₄lasers[J].Chinese Journal of Luminescence, 2022, 43(12): 1905-1914. (in Chinese)doi:10.37188/CJL.20220203
[19]	彭亚蒙, 苏宙平. 用于发散光束整形的自由曲面透镜设计[J]. 光学学报,2016,36(5):217-227. PENG Y M, SU ZH P. Design of freeform surface lens for shaping divergent laser beam[J].Acta Optica Sinica, 2016, 36(5): 217-227. (in Chinese)
[20]	CHEN B H, WU Q Y, TANG Y H,et al. Design of an optical system for generating annular-focused beams using a conical mirror and a parabolic cylindrical mirror[J].Optik, 2023, 281: 170625.doi:10.1016/j.ijleo.2023.170625
[21]	CHEN J N, YU Y J, WANG F F. Production of annular flat-topped vortex beams[J].Chinese Optics Letters, 2011, 9(1): 011402.doi:10.3788/COL201109.011402
[22]	陈重琳. 利用液晶空间光调制器将整形为平顶光束的研究[D]. 武汉: 武汉理工大学, 2016. CHEN ZH L. Investigation on flat-top laser beam shaping using liquid crystal spatial light modulator[D]. Wuhan: Wuhan University of Technology, 2016. (in Chinese)