基于ZF6基底的可见光宽谱带高性能增透膜 -

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基于ZF6基底的可见光宽谱带高性能增透膜

doi:10.3788/CO.20130604.0551

曲锋^1,,,
朱华新²,
刘桂林²,
李帅²,
孙强¹

1.
中国科学院长春光学精密机械与物理研究所, 吉林长春 130033;
2.
江南大学理学院, 江苏无锡 214122

基金项目:

国家自然科学基金资助项目(No.60977001);吉林省科技厅资助项目(No.20106015,No.20125092);吉林省与中国科学院合作长吉图开发开放先导区科技创新合作专项资助项目(No.2011CJT0004)

详细信息

作者简介:
曲锋(1984-),男,山东泰安人,博士,助理研究员,主要从事光学、图像处理等方面的研究。E-mail:quf@ciomp.ac.cn;朱华新(1983-),男,江苏宜兴人,博士,讲师,主要从事光学镀膜设计、制备、检测等方面的研究。E-mail:zhuhuaxin1312@163.com
曲锋(1984-),男,山东泰安人,博士,助理研究员,主要从事光学、图像处理等方面的研究。E-mail:quf@ciomp.ac.cn;朱华新(1983-),男,江苏宜兴人,博士,讲师,主要从事光学镀膜设计、制备、检测等方面的研究。E-mail:zhuhuaxin1312@163.com

通讯作者:
曲锋

中图分类号:O484.41
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- 被引次数:0
出版历程
- 收稿日期:2013-03-12
- 修回日期:2013-05-13
- 刊出日期:2013-08-10

Wideband and high performance anti-reflection coatings in visible light spectrum based on ZF6 substrate

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
2.
School of Science, Jiangnan University, Wuxi 214122, China

摘要

摘要:以ZF6为基底,采用电子束蒸发物理气相沉积方法设计并制备了一种增透波长为0.4~0.8 m的宽谱带可见光区增透膜。薄膜材料仅含有TiO2和SiO2两种材料,分别作为高低折射率材料。利用Edinburgh光谱仪对双面镀制该膜系样品的透过率进行测量,测试结果表明:薄膜平均透过率达98.15%,实际样品的光学特性与设计结果基本相符,具有宽带的增透特性,减少了表面剩余反射。机械强度与环境测试表明:制备的薄膜具有良好的稳定性和牢固度,可以应用于可靠性要求较高的光学系统中。
- 光学薄膜/
- 增透膜/
- 电子束蒸发物理气相沉积/
- 透过率
Abstract:A type of wideband anti-reflection film in the visible light spectrum from 0.4 m to 0.8 m was designed based on a ZF6 substrate, then the coatings were fabricated by Electron Beam Physical Vapor Deposition(EBPVD). Two types of coating materials, titanium oxide(TiO2) and silicon oxide(SiO2), were treated as high index and low index materials, respectively to use in this process. Edinburgh spectrometer was used to measure the transmittance of the sample which was coated the anti-reflection coatings on both side. The test result indicates that its average transmittance is about 98.15%. It shows wideband anti-reflection characters and little surface residual reflection, and almost accords with the designing result. The measurement of stability and firmness indicates that the coatings have good performance, which makes it possible to be used in some rigorous optical systems.
- optical thin film/
- anti-reflection coating/
- Electron Beam Physical Vapor Deposition(EBPVD)/
- transmittance

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参考文献 (1)

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