图 1金属-半导体光栅激发表面等离子体

Figure 1.SPPs excited at the interface of metal and semiconductor

图 2电极反射作用

Figure 2.Effect of electrode reflection

图 3一阶光栅分布反馈 器示意图

Figure 3.Schematic diagram of first-order grating DFB laser

图 4二阶光栅DFB 器示意图

Figure 4.Schematic diagram of second-order grating DFB laser

图 5圆形光栅及曲线光栅SE-DFB-LD示意图

Figure 5.Schematic diagram of circular-grating SE-DFB-LD and curved-grating SE-DFB-LD

图 6全息刻蚀及曲线光栅结构示意图

Figure 6.Schematic diagram of holography lithography and curved grating

图 7SE-DFB-LD表面出光及准直示意图

Figure 7.Schematic diagram of surface emitting and beam collimating

图 8上表面出光及衬底出光DFB-LD示意图

Figure 8.Schematic diagram of top-surface-emitting DFB-LD and substrate-emitting DFB-LD

图 9Alfalight公司SE-DFB-LD^[43]

Figure 9.Configuration of Alfalight′s SE-DFB-LD^[43]

图 10具有非周期光栅结构的面发射分布反馈量子级联 器示意图^[37]

Figure 10.Schematic diagram of SE-DFB-QCLs using biperiodic top metal grating

图 11二阶同轴圆形金属光栅太赫面发射分布反馈量子级联 器示意图^[44]

Figure 11.Schematic diagram of THz SE-DFB-QCLs with a 2^nd-order CCMG^[44]

图 12三脊型SE-DFB 器阵列示意图^[41]

Figure 12.Schematic diagram of a three-ridges surface-emitting DFB array

图 13衬底出光分布反馈量子级联 器示意图^[49]

Figure 13.Schematic diagram of the studied substrate-emitting DFB quantum cascade lasers

图 14面发射掩埋异质结构DFB/DBR量子级联 器及其纵截面示意图(右)^[51]

Figure 14.Schematic diagram and vertical section(right) of surface-emitting buried-heterostructure DFB/DBR quantum cascade lasers^[51]

图 15环形量子级联 器异质结构示意图

Figure 15.Schematic diagram of the heterostructure of ring quantum cascade lasers

图 16面发射量子级联 器^[57]

Figure 16.Surface emitting quantum cascade lasers^[57]

图 17表面金属光栅分布反馈量子级联 器示意图^[58]

Figure 17.Schematic diagram of the surface metal grating distributed feedback quantum cascade lasers

图 18面发射量子级联 器示横截面^[59]

Figure 18.Schematic of cross section of the surface-emitting quantum cascade lasers

图 19宽条形衬底出光分布反馈量子级联 器示意图^[62]

Figure 19.Schematic of broad area substrate-emitting distributed feedback quantum cascade lasers