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摘要:本文介绍了点衍射干涉仪不同发展阶段的特点和应用。点衍射干涉仪由波长量级的针孔产生高质量的球面波作为参考波前，能够得到衍射极限性能的分辨率。按照不同的光路特点，点衍射干涉仪可分为点衍射共路干涉和点衍射非共路干涉两种结构，主要应用于高精度波前检测和面形检测。共路干涉结构简单紧凑，对环境振动不敏感，对光源相干度要求不高，可利用光束偏振态及光栅衍射分束的特性对传统点衍射板进行改造，在全共路点衍射干涉仪中引入时间相位调制技术和干涉对比度可调技术，可进一步提高波前检测精度。采用反射式针孔和各种光纤结构发展了非共路点衍射干涉仪，实现了大口径、高精度球面反射镜面形的测量。本文重点阐述了用于极紫外光刻投影物镜中高精度球面反射镜面形检测的反射式针孔点衍射干涉仪，并展望了点衍射检测技术在生物检测等领域的应用前景和发展趋势。Abstract:In this paper, several characteristics and applications of point diffraction interferometer at different development stages are introduced. In interferometers, high quality spherical wave as a reference wave is produced by pinhole with wavelength scale, which can achieve diffraction limited resolution. According to different light path characteristics, interferometers used for high-precision wavefront testing and surface shape testing are mainly divided into point diffraction common path interferometer and noncommon path interferometer. The former has the advantages of simple structure, low sensitivity to ambient vibration and low requirement for coherence light source. Based on beam polarization and diffraction grating characteristics, the traditional point diffraction splitter plate is improved. Moreover, the temporal phase modulation technology and adjustable interference contrast technology introduced to common path point diffraction interferometer can further improve the measurement accuracy of wavefront. In addition, reflex pinhole and various kinds of fiber structures are employed to develop noncommon point diffraction interferometer, realizing the high-accuracy measurement of large aperture spherical surface. Especially, the reflex pinhole point diffraction interferometer for high-accuracy spherical surface testing in extreme ultraviolet lithography is illustrated in detail. Finally, the wide prospects of application and development of point diffraction interference detection technology are forecasted in many fields, such as biological detection.
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图 1点衍射分束器的(a)结构和(b)原理图
Figure 1.Structure (a) and principle (b) diagrams of point diffraction beam splitter plater
图 3用于单个光学元件面形检测的原理图
Figure 3.Principle diagram of surface shape testing for single optical component
图 5液晶点衍射板的结构和原理示意图
Figure 5.Structure and principle diagram of liquid crystal point diffraction plate
图 6第一代可压缩塑料微球液晶点衍射板示意图
Figure 6.Schematic diagram of the first-generation liquid crystal point diffraction plate using a deformable plastic microsphere
图 7第二代结构化基底液晶点衍射板示意图
Figure 7.Schematic diagram of the second-generation liquid crystal point diffraction plate using one structured substrate
图 8铌酸锂晶体点衍射板示意图。(a)针孔制造过程; (b)抗蚀剂圆斑的光学显微图像; (c)铌酸锂晶体表面铝层的开口结构
Figure 8.Schematic diagram of point diffraction plate using lithium niobate crystal. (a) Schematic diagram of pinhole fabrication process; (b) Optical microscope image of resist dot; (c) Opening structure of aluminum on lithium niobate crystal surface
图 10带有透明针孔和窗口的不透明掩模板示意图
Figure 10.Schematic diagram of opaque mask plate with transparent pinhole and window
图 11光栅移相点衍射干涉仪的原理图。(a)分束光栅在物方针孔后; (b)分束光栅在物方针孔前
Figure 11.Principle diagrams of grating phase-shifting point diffraction interferometer. (a) Splitting grating location behind object pinhole; (b) Splitting grating in the front of object pinhole
图 12Schwarzschild系统波前检测示意图
Figure 12.Schematic diagram of Schwarzschild system wavefront measurement
图 13双折射硅晶体点衍射板结构示意图
Figure 13.Structure diagram of birefringence silicon crystal point diffraction plate
图 14偏振相移点衍射干涉仪原理图
Figure 14.Principle diagram of polarization phase-shifting point diffraction interferometer
图 15线栅点衍射针孔板结构示意图
Figure 15.Structure diagram of wire grid point diffraction pinhole plate
图 16光纤相移点衍射干涉仪测量极紫外球面镜面形的原理图
Figure 16.Principle diagram of phase-shifting point diffraction interferometer used for testing surface shape of extreme-ultraviolet spherical mirror
图 17光纤点衍射干涉仪的相干原理
Figure 17.Coherent principle of fiber point diffraction interferometer
图 18斜面光纤点衍射源结构及衍射光传播角的示意图
Figure 18.Schematic diagram of angled end-face fiber point diffraction source structure and diffracted ray from the angled end-face fiber
图 19倾斜面光纤点衍射源的优势。(a)传统的相移光纤点衍射干涉仪; (b)斜面的相移光纤点衍射干涉仪
Figure 19.Advantage of angled end-face fiber point diffraction source. (a) Traditional phase-shifting fiber point diffraction interferometer; (b) Phase-shifting angled end-face fiber point diffraction interferometer
图 20斜面光纤点衍射干涉仪球面面形检测原理图
Figure 20.Principle diagram of angled end-face fiber point diffraction interferometer used for testing spherical mirror surface
图 21扫描电镜下观察到的锥型光纤。(a)宏观形貌; (b)出射端面放大图
Figure 21.Tapered fiber observed by the scanning electron microscope. (a) Macrograph; (b) Scaled up view of the end face of tapered fiber
图 22锥型光纤点衍射干涉仪系统的原理图
Figure 22.Principle diagram of tapered fiber point diffraction interferometer
图 23双光纤点衍射干涉仪检测透射波前原理图
Figure 23.Principle diagram of double fibers point diffraction interferometer used for testing transmission wavefront
图 24改进的双光纤点衍射干涉仪检测透射式波前原理图
Figure 24.Principle diagram of advanced double fibers point diffraction interferometer used for testing transmission wavefront
图 25双光纤点衍射干涉仪球面镜面形检测系统原理图
Figure 25.Principle scheme of double fibers point diffraction interferometer used for testing spherical mirror surface shape
图 26新型点衍射源在检测极紫外光刻系统中的典型应用。(a)检测系统原理图; (b)新型参考球面波源结构示意图
Figure 26.Typical application of new wavefront reference source in testing extreme ultraviolet lithography system. (a) Principle diagram of testing system; (b) Structure schematic diagram of new wavefront reference source
图 28反射式针孔点衍射干涉仪原理示意图
Figure 28.Principle diagram of reflected pinhole point diffraction interferometer
图 29ASET搭建的针孔点衍射干涉仪(a)结构示意图和(b)装置实物图
Figure 29.Structure diagram (a) and device physical figure (b) of pinhole point diffraction interferometer built by ASET
图 30基于双孔干涉标定系统的基本结构
Figure 30.Sketch of calibration system based on two-hole interference
图 31可见光相移点衍射干涉仪原理图
Figure 31.Principle diagram of visible light phase-shifting point diffraction interferometer
图 32高精度点衍射球面面形干涉检测系统的原理图
Figure 32.Principle scheme of high precision point diffraction interferometric system for spherical surface testing
图 34在铬膜上用FIBE刻蚀针孔的扫描电镜图。(a)斜视图; (b)正视图
Figure 34.SEM pictures of FIBE-etched pinhole in a chromium film. (a) Oblique view; (b) Front view
图 35待测球面调整误差的分析模型。(a)倾斜; (b)横向偏移; (c)轴向偏移
Figure 35.Analysis model of spherical surface adjustment error under test. (a) Tilt; (b) Lateral shift; (c) Axial shift
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