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用于超短脉冲CO2 的半导体光开关理论建模与数值分析

高月娟,陈飞,潘其坤,俞航航,李红超,田有朋

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高月娟, 陈飞, 潘其坤, 俞航航, 李红超, 田有朋. 用于超短脉冲CO2 的半导体光开关理论建模与数值分析[J]. , 2020, 13(3): 577-585. doi: 10.3788/CO.2019-0159
引用本文: 高月娟, 陈飞, 潘其坤, 俞航航, 李红超, 田有朋. 用于超短脉冲CO2 的半导体光开关理论建模与数值分析[J]. , 2020, 13(3): 577-585.doi:10.3788/CO.2019-0159
GAO Yue-juan, CHEN Fei, PAN Qi-kun, YU Hang-hang, LI Hong-chao, TIAN You-peng. Modeling and numerical simulation of a semiconductor switching device applied in an ultra-short pulse CO2 laser[J]. Chinese Optics, 2020, 13(3): 577-585. doi: 10.3788/CO.2019-0159
Citation: GAO Yue-juan, CHEN Fei, PAN Qi-kun, YU Hang-hang, LI Hong-chao, TIAN You-peng. Modeling and numerical simulation of a semiconductor switching device applied in an ultra-short pulse CO2laser[J].Chinese Optics, 2020, 13(3): 577-585.doi:10.3788/CO.2019-0159

用于超短脉冲CO2 的半导体光开关理论建模与数值分析

doi:10.3788/CO.2019-0159
基金项目:国家自然科学基金(No. 61675200);国家科技重大专项02专项(No. 2018ZX02102001-002); 与物质相互作用国家重点实验室基金(No. SKLLIM1611);中国科学院青年创新促进会资助项目(No. 2017259)
详细信息
    作者简介:

    高月娟(1995—),女,山东东营人,硕士研究生,2017年于中国海洋大学获得学士学位,现为中国科学院长春光学精密机械与物理研究所光学工程硕士研究生,主要从事重复频率超短脉冲CO2 器方面的研究。E-mail:gyjsnf@163.com

    陈 飞(1982—),男,河南南阳人,研究员,博士生导师,2011年于哈尔滨工业大学获得博士学位,现工作于中国科学院长春光学精密机械与物理研究所 与物质相互作用国家重点实验室,主要从事高功率气体 器及其应用方面的研究。E-mail:feichenny@126.com

  • 中图分类号:TN248.2

Modeling and numerical simulation of a semiconductor switching device applied in an ultra-short pulse CO2laser

Funds:Supported by National Natural Science Foundation of China(No. 61675200); National Science and Technology Major Project 02(No. 2018ZX02102001-002); Open Fund Project of the State Key Laboratory of Laser and Material Interaction (No. SKLLIM1611); Youth Innovation Promotion Association (No. 2017259)
More Information
  • 摘要:本文开展了基于半导体光开关技术实现超短脉宽CO 2 输出的物理机制研究。首先,在分析光生载流子过程及载流子复合扩散机制的基础上,引入直接吸收、俄歇复合、等离激元辅助复合以及双极扩散等物理过程,并基于Drude理论,完善了半导体光开关理论模型。其次,利用该模型对两级半导体光开关产生超短CO 2脉冲机制进行了数值模拟及分析,结果显示该模型与国外最新实验结果一致,表明了模型的合理性与正确性。最后,利用该模型分析了控制光脉冲宽度对两级光开关工作效率的影响,发现短的控制光脉冲更有利于精确、高效地截取出高质量的超短CO 2脉冲。本文研究证明半导体光开关法是实现超短CO 2 脉宽可调输出的有效技术途径。

  • 图 1(a)反射光开关(b)透射光开关示意图

    Figure 1.Schematic diagrams of (a) reflection switch (b) transmission switch.

    图 2脉宽为20 ps,能量密度为0.6 mJ/cm2,波长为1.06 μm控制光脉冲辐照下半导体表面等离子体密度随时间变化曲线

    Figure 2.Surface density of plasma in germanium plotted as a function of time under the radiation of 1.06-μm control pulse with pulse width of 20 ps and energy density of 0.6 mJ/cm2.

    图 3控制光消失后表面等离子体密度随时间变化曲线

    Figure 3.Surface density of plasma in germanium plotted as a function of time after the control pulse vanishing

    图 4CO2光脉冲垂直入射反射光开关输出脉冲能量变化曲线

    Figure 4.Calculated vertical reflected pulse energy plotted as a function of time

    图 5CO2光脉冲以布鲁斯特角入射反射光开关输出脉冲能量变化

    Figure 5.Calculated Brewster′s angle reflected pulse energy plotted as a function of time

    图 6单级半导体反射开关输出的CO2光脉冲

    Figure 6.CO2pulse output from single-stage semiconductor switching

    图 7单级半导体反射开关表面等离子体密度随时间变化曲线

    Figure 7.Surface density of plasma in single-stage semiconductor switching plotted as a function of time

    图 8两级半导体光开关在5、10、15、20 ps延迟时间下输出CO2脉冲能量

    Figure 8.CO2pulse energy outputs from two-stage semiconductor switching with time delay of 5, 10, 15 and 20 ps

    图 9脉宽为6、10、30、60 ps的控制光脉冲辐照单级反射开关得到CO2脉冲能量

    Figure 9.CO2pulse energies obtained by using controlled light pulse with pulse widths of 6, 10, 30, 60 ps to radiate single–stage reflection switch

    图 10脉宽分别为6 ps(左)和60 ps(右)控制光脉冲辐照两级反射开关输出CO2脉冲能量

    Figure 10.CO2pulse outputs from two-stage semiconductor switching radiated by control pulse with pulse duration of 6 ps (left) and 60 ps (right), respectively.

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  • 收稿日期:2019-07-25
  • 修回日期:2019-08-30
  • 刊出日期:2020-06-01

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