Research progress of deep-UV nonlinear optical crystals and all-solid-state deep-UV coherent light sources
-
摘要:全固态深紫外相干光源在前沿科学、高技术等领域均有重要应用。产生全固态深紫外相干光源的一种有效而可行的技术途径是将商业化的可见、近红外全固态 作为基频光源，通过非线性光学晶体的多级变频技术产生深紫外 。本文系统地介绍了深紫外非线性光学晶体及全固态深紫外相干光源的研究进展。主要以KBBF晶体为代表，详细介绍了发现KBBF晶体的过程，晶体生长技术，棱镜耦合器件技术，KBBF晶体的主要光学性质以及产生深紫外相干光源的能力，同时证实了KBBF晶体是目前能使用直接倍频方法实现深紫外 输出的非线性光学晶体。此外，文中还详细介绍了基于KBBF晶体及棱镜耦合技术的深紫外相干光源的应用情况，尤其是在超高分辨率光电子能谱仪方面的应用及取得的重要成果。最后，展望了深紫外非线性光学晶体及全固态深紫外 技术的发展方向。
-
关键词:
- 深紫外非线性光学晶体/
- 深紫外/
- KBBF/
- 晶体生长
Abstract:All-solid-state deep ultraviolet coherent light sources have important applications in frontier science, high technology and many other fields. An effective and feasible technical approach is to use commercially available visible and near-infrared all-solid-state lasers as the fundamental frequency light source to generate a deep ultraviolet laser through cascaded frequency conversion using nonlinear optical crystals. This paper reviews the research progress of deep ultraviolet nonlinear optical crystals and all-solid-state deep ultraviolet coherent light sources. Taking KBBF crystals as the representative example, their discovery, crystal growth, corresponding prism-coupled device technology, main optical properties, and ability to generate deep ultraviolet coherent light are each introduced. It was proven that KBBF crystals are excellent nonlinear optical crystals that can achieve deep ultraviolet laser output through direct frequency doubling. The applications of deep ultraviolet coherent light sources based on KBBF crystals and prism-coupled technology are discussed, with special focus given to ultra-high resolution photoelectron spectrometers. Finally, the future direction of the development of deep ultraviolet nonlinear optical crystals and all-solid-state deep ultraviolet laser technology are given.-
Key words:
- deep-UV nonlinear optical crystal/
- deep-UV laser/
- KBBF/
- crystal growth
-
图 10后棱镜为布儒斯特角切割的器件实物图
Figure 10.Physical graph of KBBF-PCD with a Brewster cut back prism
晶体 点群 透过范围/nm 双折射Δn@1064 nm 倍频系数dij/pm·V−1 最短倍频波长/nm KTP mm2 350~4 500 0.089 d31=1.4 500 BBO 3 m 189~3 300 0.12 d22=1.6 205 LBO mm2 150~2 600 0.04 d31=0.96 278 d32=1.04 d33=0.06 CBO 222 166~3 400 0.053 d14=1.15 273 CLBO ${\overline 4}2\;{\rm m}$ 180~2 750 0.05 d36=0.95 238 KABO 32 180~3 780 0.068 d11=0.48 225 KBBF 32 147~3 660 0.080 d11=0.49 161 RBBF 32 151~3 500 0.075 d11=0.45 170 
下载:
导出CSV
表 2用于光电子能谱仪的3种深紫外光源比较[50]
Table 2.The comparison of properties of three different DUV light sources applied to photoemission spectrometer[50]
光源 全固态深紫外 同步辐射光源 气体放电光源 能量分辨率/meV 0.26 1~5 1.2 光子能量/eV 5.4~8 6~100连续变化 21.1（He） 运转方式 ns, ps, fs(1 Hz~1 GHz) ns, ps,(5~500 MHz) 连续 光子流通量（photon/s） 1014~1015 1010~1012 ~1012 光子流通量密度（photon/s·cm2） 1019~1020 1012~1014 <1014 极化方向 可调 可调 无极化 探测深度/mm（表面/体效应） 10 体效应 0.5~2表面效应 ~0.5 表面效应 成本 高 非常高 高 下载:
导出CSV
-
[1] 柴燕, 毕勇, 颜博霞, 等. 全球 显示技术专利分布格局与态势分析[J]. 液晶与显示,2011,26(3):329-333.doi:10.3788/YJYXS20112603.0329CHAI Y, BI Y, YAN B Xet al. Distribution pattern and trend analysis on global laser display technology[J].Chinese Journal of Liquid Crystals and Displays, 2011, 26(3): 329-333. (in Chinese)doi:10.3788/YJYXS20112603.0329 [2] 李继军, 聂晓梦, 甄威, 等. 显示技术比较及新进展[J]. 液晶与显示,2018,33(1):74-84.doi:10.3788/YJYXS20183301.0074LI J J, NIE X M, ZEN W,et al. New developments and comparisons in display technology[J].Chinese Journal of Liquid Crystals and Displays, 2018, 33(1): 74-84. (in Chinese)doi:10.3788/YJYXS20183301.0074 [3] FRANKEN P A, HILL A E, PETERS C W,et al. Generation of optical harmonics[J].Physical Review Letters, 1961, 7(4): 118-120.doi:10.1103/PhysRevLett.7.118 [4] BASS M, FRANKEN P A, HILL A E,et al. Optical mixing[J].Physical Review Letters, 1962, 8(1): 18.doi:10.1103/PhysRevLett.8.18 [5] WOODBURY E J, NG W K. Ruby laser operation in the near IR[J].Proceedings of IRE, 1962, 50(11): 2367. [6] GIORDMAINE J A, MILLER R C. Tunable coherent parametric oscillation in LiNbO3at optical frequencies[J].Physical Review Letters, 1965, 14(24): 973-976.doi:10.1103/PhysRevLett.14.973 [7] BLOEMBERGEN N.Nonlinear Optics[M]. New York: Benjamin, 1965. [8] CHEN C T.Development of New NLO Crystals in the Borate Series[M]. Switzerland: Plenum Press, 1993. [9] CHEN CH T, WU B CH, JIANG A D,et al. A new-type ultraviolet SHG crystal—β-BaB2O4[J].Science in China Series B, 1985, 28(3): 235-243. [10] CHEN CH T, WU Y CH, JIANG A D,et al. New nonlinear-optical crystal: LiB3O5[J].Journal of the Optical Society of America B, 1989, 6(4): 616-621.doi:10.1364/JOSAB.6.000616 [11] 王丽荣, 张国春, 冯景程, 等. La2CaB10O19晶体高效紫外 输出研究[J]. 发光学报,2020,41(2):140-145.doi:10.3788/fgxb20204102.0140WANG L R, ZHANG G C, FENG J CH,et al. Highly efficient UV laser output of La2CaB10O19 crystal[J].Chinese Journal of Luminescence, 2020, 41(2): 140-145. (in Chinese)doi:10.3788/fgxb20204102.0140 [12] 崔建丰, 高涛, 张亚男, 等. 瓦级 二极管端面抽运351 nm紫外 器[J]. 发光学报,2016,37(11):1367-1371.doi:10.3788/fgxb20163711.1367CUI J F, GAO T, ZHANG Y N,et al. Watt-class laser diode end-pumped 351 nm ultraviolet laser[J].Chinese Journal of Luminescence, 2016, 37(11): 1367-1371. (in Chinese)doi:10.3788/fgxb20163711.1367 [13] 尼科戈相(俄). 非线性光学晶体: 一份完整的总结[M]. 王继扬, 译. 北京: 高等教育出版社, 2009.NIKOGOSYAN D N.Nonlinear Optical Crystals: A Complete Survey[M]. WANG J Y, trans. Beijing: Higher Education Press, 2009. (in Chinese) [14] PETROV V, ROTERMUND F, NOACK F. Generation of femtosecond pulses down to 166 nm by sum-frequency mixing in KB5O8·4H2O[J].Electronics Letters, 1998, 34(18): 1748-1750.doi:10.1049/el:19981223 [15] PETROV V, ROTERMUND F, NOACK F,et al. Vacuum ultraviolet application of Li2B4O7crystals: generation of 100 fs pulses down to 170 nm[J].Journal of Applied Physics, 1998, 84(11): 5887-5892.doi:10.1063/1.368904 [16] JONES-BEY H. Deep-UV applications await improved nonlinear optics[J].Laser Focus World, 1998, 34(8): 127-131. [17] 何奇, 樊君, 胡晓云, 等. NaYF4: Er3+的水热合成及其紫外上转换发光性能[J]. 发光学报,2012,33(2):122-127.doi:10.3788/fgxb20123302.0122HE Q, FAN J, HU X Y,et al. Hydrothermal synthesis and its ultraviolet up conversion light emitting property[J].Chinese Journal of Luminescence, 2012, 33(2): 122-127. (in Chinese)doi:10.3788/fgxb20123302.0122 [18] KURTZ S K, PERRY T T. A powder technique for the evaluation of nonlinear optical materials[J].Journal of Applied Physics, 1968, 39(8): 3798-3813.doi:10.1063/1.1656857 [19] SHI G Q, WANG Y, ZHANG F F,et al. Finding the next deep-Ultraviolet nonlinear optical material: NH4B4O6F[J].Journal of the American Chemical Society, 2017, 139(31): 10645-10648.doi:10.1021/jacs.7b05943 [20] WANG X F, WANG Y, ZHANG B B,et al. CsB4O6F: A congruent-melting deep-ultraviolet nonlinear optical material by combining superior functional units[J].Angewandte Chemie International Edition, 2017, 56(45): 14119-14123.doi:10.1002/anie.201708231 [21] PENG G, YE N, LIN ZH SH,et al. NH4Be2BO3F2and γ-Be2BO3F: overcoming the layering habit in KBe2BO3F2for the next-generation deep-ultraviolet nonlinear optical materials[J].Angewandte Chemie International Edition, 2018, 57(29): 8968-8972.doi:10.1002/anie.201803721 [22] CHEN CH T, WANG G L, WANG X Y,et al. Deep-UV nonlinear optical crystal KBe2BO3F2-discovery, growth, optical properties and applications[J].Applied Physics B, 2009, 97(1): 9-25.doi:10.1007/s00340-009-3554-4 [23] CHEN CH T, LUO S Y, WANG X Y,et al. Deep UV nonlinear optical crystal: RbBe2(BO3)F2[J].Journal of the Optical Society of America B, 2009, 26(8): 1519-1525.doi:10.1364/JOSAB.26.001519 [24] CHEN CH T, WU Y CH, LI R K. The development of new NLO crystals in the borate series[J].Journal of Crystal Growth, 1990, 99(1-4): 790-798.doi:10.1016/S0022-0248(08)80028-0 [25] CHEN CH T, WU Y CH, LI R K. The relationship between the structural type of anionic group and SHG effect in boron-oxygen compounds[J].Chinese Physics Letters, 1985, 2(9): 389-392.doi:10.1088/0256-307X/2/9/002 [26] FRENCH R H, LING J W, OHUCHI F S,et al. Electronic structure of β-BaB2O4and LiB3O5nonlinear optical crystals[J].Physical Review B, 1991, 44(16): 8496-8502.doi:10.1103/PhysRevB.44.8496 [27] LI R K. The interpretation of UV absorption of borate glasses and crystals[J].Journal of Non-Crystalline Solids, 1989, 111(2-3): 199-204.doi:10.1016/0022-3093(89)90281-0 [28] BATSANOVA L R, EGOROV V A, NIKOLEVA, A V. Beryllium fluoroborate[J].Dokl. Akad. Nauk SSSR, 1968, 178: 1317-1319. [29] CHEN CH T, WANG Y B, XIA Y N,et al. New development of nonlinear optical crystals for the ultraviolet region with molecular engineering approach[J].Journal of Applied Physics, 1995, 77(6): 2268-2272.doi:10.1063/1.358814 [30] XIA Y N, CHEN CH T, TANG D Y,et al. New nonlinear optical crystals for UV and VUV harmonic generation[J].Advanced Materials, 1995, 7(1): 79-81.doi:10.1002/adma.19950070118 [31] CHEN CH T, XU Z Y, DENG D Q,et al. The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2crystal[J].Applied Physics Letters, 1996, 68(21): 2930-2932.doi:10.1063/1.116358 [32] WANG J Y, ZHANG CH Q, LIU Y G,et al. Growth and properties of KBe2BO3F2crystal[J].Journal of Materials Research, 2003, 18(10): 2478-2485.doi:10.1557/JMR.2003.0345 [33] WANG X Y, YAN X, LUO S Y,et al. Flux growth of large KBBF crystals by localized spontaneous nucleation[J].Journal of Crystal Growth, 2011, 318(1): 610-612.doi:10.1016/j.jcrysgro.2010.11.176 [34] YE N, TANG D Y. Hydrothermal growth of KBe2BO3F2crystals[J].Journal of Crystal Growth, 2006, 293(2): 233-235.doi:10.1016/j.jcrysgro.2006.05.038 [35] MCMILLEN C D, KOLIS J W. Hydrothermal crystal growth of ABe2BO3F2(A=K, Rb, Cs, Tl) NLO crystals[J].Journal of Crystal Growth, 2008, 310(7-9): 2033-2038.doi:10.1016/j.jcrysgro.2007.11.193 [36] ZHOU H T, HE X L, ZHOU W N,et al. Hydrothermal growth of KBBF crystals from KOH solution[J].Journal of Crystal Growth, 2011, 318(1): 613-617.doi:10.1016/j.jcrysgro.2010.08.036 [37] YU J Q, LIU L J, JIN SH F,et al. Superstructure and stacking faults in hydrothermal-grown KBe2BO3F2crystals[J].Journal of Solid State Chemistry, 2011, 184(10): 2790-2793.doi:10.1016/j.jssc.2011.08.025 [38] SANG Y H, YU D H, AVDEEV M,et al. X-ray and neutron diffraction studies of flux and hydrothermally grown nonlinear optical material KBe2BO3F2[J].CrystEngComm, 2012, 14(18): 6079-6084.doi:10.1039/c2ce25828e [39] CHEN CH T, LÜ J H, WANG G L,et al. Deep ultraviolet harmonic generation with KBe2BO3F2crystal[J].Chinese Physics Letters, 2001, 18(8): 1081.doi:10.1088/0256-307X/18/8/327 [40] CHEN CH T, WANG G L, WANG X Y,et al. Improved sellmeier equations and phase-matching characteristics in deep-ultraviolet region of KBe2BO3F2crystal[J].IEEE Journal of Quantum Electronics, 2008, 44(7): 617-621.doi:10.1109/JQE.2008.920324 [41] NAKAZATO T, ITO I, KOBAYASHI Y,et al. Phase-matched frequency conversion below 150 nm in KBe2BO3F2[J].Optics Express, 2016, 24(15): 17149-17158.doi:10.1364/OE.24.017149 [42] LI R K, WANG L R, WANG X Y,et al. Dispersion relations of refractive indices suitable for KBe2BO3F2crystal deep-ultraviolet applications[J].Applied Optics, 2016, 55(36): 10423-10426.doi:10.1364/AO.55.010423 [43] DAI SH B, CHEN M, ZHANG SH J,et al. 2.14 mW deep-ultraviolet laser at 165 nm by eighth-harmonic generation of a 1319 nm Nd: YAG laser in KBBF[J].Laser Physics Letters, 2016, 13(3): 035401.doi:10.1088/1612-2011/13/3/035401 [44] CHEN CH T, WATANABE S, XU Z Y, et al.. Recent advances of deep and vacuum-UV harmonic generation with new borate crystals[C].Proceedings of Conference on Lasers and Electro-Optics, IEEE,Maryland,USA. 2003: 814-816. [45] ZHANG X, WANG ZH M, WANG G L,et al. Widely tunable and high-average-power fourth-harmonic generation of a Ti: sapphire laser with a KBe2BO3F2prism-coupled device[J].Optics Letters, 2009, 34(9): 1342-1344.doi:10.1364/OL.34.001342 [46] XU B, LIU L J, WANG X Y,et al. Generation of high power 200 mW laser radiation at 177.3 nm in KBe2BO3F2crystal[J].Applied Physics B, 2015, 121(4): 489-494.doi:10.1007/s00340-015-6260-4 [47] KANAI T, WANG X Y, ADACHI S,et al. Watt-level tunable deep ultraviolet light source by a KBBF prism-coupled device[J].Optics Express, 2009, 17(10): 8696-8703.doi:10.1364/OE.17.008696 [48] SCHOLZ M, OPALEVS D, LEISCHING P,et al. A bright continuous-wave laser source at 193 nm[J].Applied Physics Letters, 2013, 103(5): 051114.doi:10.1063/1.4817786 [49] 中国科学院理化技术研究所, 物理研究所. 一种非线性光学晶体 变频耦合器: 中国, CN1172411C[P]. 2004-10-20.Technical Institute of Physics and Chemistry CAS, Institute of Physics CAS. Prism-nonlinear optical crystal coupler for laser frequency conversion: CN, ZL01115313.X[P]. 2004-10-20. (in Chinese) [50] XU Z Y, ZHANG SH J, ZHOU X J,et al. Advances in deep ultraviolet laser based high-resolution photoemission spectroscopy[J].Frontiers of Information Technology&Electronic Engineering, 2019, 20(7): 885-913. [51] KISS T, KANETAKA F, YOKOYA T,et al. Photoemission spectroscopic evidence of gap anisotropy in anf-electron superconductor[J].Physical Review Letters, 2005, 94(5): 057001.doi:10.1103/PhysRevLett.94.057001 [52] MENG J Q, LIU G D, ZHANG W T,et al. Coexistence of Fermi arcs and Fermi pockets in a high-Tccopper oxide superconductor[J].Nature, 2009, 462(7271): 335-338.doi:10.1038/nature08521 [53] BOK J M, BAE J J, CHOI H Y,et al. Quantitative determination of pairing interactions for high-temperature superconductivity in cuprates[J].Science Advances, 2016, 2(3): e1501329.doi:10.1126/sciadv.1501329 [54] FENG Y, LIU D F, FENG B J,et al. Direct evidence of interaction-induced Dirac cones in a monolayer silicene/Ag(111) system[J].Proceedings of the National Academy of Sciences of the United States of America, 2016, 113(51): 14656-14661.doi:10.1073/pnas.1613434114 [55] ZHANG Y, WANG CH L, YU L,et al. Electronic evidence of temperature-induced Lifshitz transition and topological nature in ZrTe5[J].Nature Communications, 2017, 8: 15512.doi:10.1038/ncomms15512 [56] LIU D F, LI C, HUANG J W,et al. Orbital origin of extremely anisotropic superconducting gap in nematic phase of FeSe superconductor[J].Physical Review X, 2018, 8(3): 031033.doi:10.1103/PhysRevX.8.031033 [57] CYRANOSKI D. Materials science: China’s crystal cache[J].Nature, 2009, 457(7232): 953-955.doi:10.1038/457953a -
下载:
点击查看大图
图(15)/
表(2)
计量
- 文章访问数:4294
- HTML全文浏览量:1840
- PDF下载量:346
- 被引次数:0
