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深紫外非线性光学晶体及全固态深紫外相干光源研究进展

王晓洋,刘丽娟

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王晓洋, 刘丽娟. 深紫外非线性光学晶体及全固态深紫外相干光源研究进展[J]. , 2020, 13(3): 427-441. doi: 10.3788/CO.2020-0028
引用本文: 王晓洋, 刘丽娟. 深紫外非线性光学晶体及全固态深紫外相干光源研究进展[J]. , 2020, 13(3): 427-441.doi:10.3788/CO.2020-0028
WANG Xiao-yang, LIU Li-juan. Research progress of deep-UV nonlinear optical crystals and all-solid-state deep-UV coherent light sources[J]. Chinese Optics, 2020, 13(3): 427-441. doi: 10.3788/CO.2020-0028
Citation: WANG Xiao-yang, LIU Li-juan. Research progress of deep-UV nonlinear optical crystals and all-solid-state deep-UV coherent light sources[J].Chinese Optics, 2020, 13(3): 427-441.doi:10.3788/CO.2020-0028

深紫外非线性光学晶体及全固态深紫外相干光源研究进展

doi:10.3788/CO.2020-0028
基金项目:国家自然科学基金重大科研仪器研制项目(No. 21527804)
详细信息
    作者简介:

    王晓洋(1967—),男,江苏镇江人,正高级工程师,2002年于武汉理工大学获得硕士学位,现为中国科学院理化技术研究所正高级工程师,主要从事功能晶体的研究和应用工作。E-mail:xywang@mail.ipc.ac.cn

  • 中图分类号:O734

Research progress of deep-UV nonlinear optical crystals and all-solid-state deep-UV coherent light sources

Funds:Supported by Project of Major Scientific Instruments by National Natural Science Foundation of China(No. 21527804)
More Information
  • 摘要:全固态深紫外相干光源在前沿科学、高技术等领域均有重要应用。产生全固态深紫外相干光源的一种有效而可行的技术途径是将商业化的可见、近红外全固态 作为基频光源,通过非线性光学晶体的多级变频技术产生深紫外 。本文系统地介绍了深紫外非线性光学晶体及全固态深紫外相干光源的研究进展。主要以KBBF晶体为代表,详细介绍了发现KBBF晶体的过程,晶体生长技术,棱镜耦合器件技术,KBBF晶体的主要光学性质以及产生深紫外相干光源的能力,同时证实了KBBF晶体是目前能使用直接倍频方法实现深紫外 输出的非线性光学晶体。此外,文中还详细介绍了基于KBBF晶体及棱镜耦合技术的深紫外相干光源的应用情况,尤其是在超高分辨率光电子能谱仪方面的应用及取得的重要成果。最后,展望了深紫外非线性光学晶体及全固态深紫外 技术的发展方向。

  • 图 1KBBF晶体结构

    Figure 1.Structure of KBBF crystal

    图 2助熔剂法生长的KBBF晶体[33]

    Figure 2.As-grown KBBF crystal using flux method[33]

    图 3水热法生长的KBBF晶体

    Figure 3.As-grown KBBF crystal using hydrothermal method

    图 4水热法KBBF晶体中的两种结构

    Figure 4.Two structures in KBBF crystals using hydrothermal method

    图 5棱镜耦合器件的原理图

    Figure 5.Principle diagram of prism coupled device

    图 6沿a方向切割的KBBF晶坯

    Figure 6.Crystal blank of KBBF cut along theaaxis

    图 7钛宝石 五倍频光路示意图[41]

    Figure 7.Schematic diagram of titanium sapphire laser fifth harmonic generation frequency optical path system[41]

    图 8(a) 钛宝石 四倍频输入功率和五倍频输出功率[41];(b)五倍频功率和四倍频功率比值[41]

    Figure 8.(a) 5ωoutput power and the 4ωinput power for titanium sapphire laser[41]; (b) the ratio of the 5ωoutput power to the 4ωinput power[41]

    图 9165 nm 输出光路示意图[43]

    Figure 9.Schematic diagram of frequency conversion system with the output wavelength of 165 nm[43]

    图 10后棱镜为布儒斯特角切割的器件实物图

    Figure 10.Physical graph of KBBF-PCD with a Brewster cut back prism

    图 11165 nm倍频光功率和330 nm 输入功率的关系[43]

    Figure 11.DUV output power at 165 nm versus UV pump power at 330 nm[43]

    图 12(a)深度光胶棱镜耦合器件示意图及(b)带铜制水冷套的棱镜耦合器件[46]

    Figure 12.(a) Schematic diagram of the deep-bonding KBBF-PCD and (b) copper water-cooled holder of KBBF-PCD[46]

    图 13177.3 nm倍频光功率和354.7 nm 输入功率的关系(圆圈),实线(晶体有吸收)和虚线(晶体无吸收)为理论值[46]

    Figure 13.The 177.3 nm output power as a function of the input power (open circles);theoretical output values are shown as the solid line (with absorption) and the dashed line (without absorption), respectively[46]

    图 14连续波193 nm的光路示意图[48]

    Figure 14.Schematic diagram of optical path of the 193 nm laser source[48]

    图 15193 nm倍频光功率和386 nm 输入功率的关系[48]

    Figure 15.Output power of 193 nm versus pump power at 386 nm laser[48]

    表 1常见非线性光学晶体性能[13]

    Table 1.The properties of common nonlinear optical crystals[13]

    晶体 点群 透过范围/nm 双折射Δn@1064 nm 倍频系数dij/pm·V−1 最短倍频波长/nm
    KTP mm2 350~4 500 0.089 d31=1.4 500
    BBO 3 m 189~3 300 0.12 d22=1.6 205
    LBO mm2 150~2 600 0.04 d31=0.96 278
    d32=1.04
    d33=0.06
    CBO 222 166~3 400 0.053 d14=1.15 273
    CLBO ${\overline 4}2\;{\rm m}$ 180~2 750 0.05 d36=0.95 238
    KABO 32 180~3 780 0.068 d11=0.48 225
    KBBF 32 147~3 660 0.080 d11=0.49 161
    RBBF 32 151~3 500 0.075 d11=0.45 170
    下载: 导出CSV

    表 2用于光电子能谱仪的3种深紫外光源比较[50]

    Table 2.The comparison of properties of three different DUV light sources applied to photoemission spectrometer[50]

    光源 全固态深紫外 同步辐射光源 气体放电光源
    能量分辨率/meV 0.26 1~5 1.2
    光子能量/eV 5.4~8 6~100连续变化 21.1(He)
    运转方式 ns, ps, fs(1 Hz~1 GHz) ns, ps,(5~500 MHz) 连续
    光子流通量(photon/s) 1014~1015 1010~1012 ~1012
    光子流通量密度(photon/s·cm2 1019~1020 1012~1014 <1014
    极化方向 可调 可调 无极化
    探测深度/mm(表面/体效应) 10 体效应 0.5~2表面效应 ~0.5 表面效应
    成本 非常高
    下载: 导出CSV
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  • 收稿日期:2020-02-24
  • 修回日期:2020-03-30
  • 刊出日期:2020-06-01

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