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摘要:介绍了与此有关的大面积均匀场放电电极的设计以及实验研究结果。无限大平行平板电极两极间的电场分布是均匀的,而现实的问题则是要求在有限的(电极)尺寸条件下实现电场的均匀性设计,因此设计问题转变为放电电极的剖面形状的理论和工程计算问题。根据TEA CO2 器工作的实际情况,有针对性地选择Chang氏理论作为设计依据。设计的放电电极实验结果证明,TEA CO2 器在500HZ高重频脉冲条件下能够连续工作10分钟,在55mm放电电极宽和平坦部分为40mm剖面的平行平板两个主放电极之间实现了大面积稳定的均匀场辉光放电。Abstract:The related design of electrode with large area uniform electric field and the experimental results are introduced in this paper. The distribution of electric field is uniform between two electrodes with boundless parallel slab, but the problem is the uniform design of electric field in the condition of limited size of electrode. Therefore the theoretical and engineering computations are crucial to solve this problem. According the practical condition of TEA CO2 laser, Chang theory is chose as the reference of design. The experimental results of electrode discharge after the design show that the uniform glow discharge in large area is realized between two main electrodes. with 55mm electrode width and flatness part 40mm section. The TEA CO2 laser is able to continuously work for 10minutes in the condition of high repetition rate 500Hz.
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