真空紫外波段光栅二级衍射效率测量装置 -

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真空紫外波段光栅二级衍射效率测量装置

曲艺

中国科学院长春光学精密机械与物理研究所,吉林长春 130033

详细信息

中图分类号:O436.1
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- 被引次数:0
出版历程
- 收稿日期:2010-05-13
- 修回日期:2010-07-17
- 刊出日期:2010-12-20

Measuring instrument for second-order diffraction efficiency of grating in vacuum ultraviolet

QV Yi

Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,China

摘要

摘要:利用光栅二级衍射会影响反射样品光谱反射率结果的原理,通过计算不同光谱反射率获得了光栅二级衍射效率。介绍了测量二级衍射效率的实验装置,该装置采用双光路单色仪结构,使用已知光谱辐亮度氘灯作为光源,探测器为光电倍增管,通过水杨酸钠膜将紫外光转为可见光。以波长161 nm为例,测量了5块反射镜样片,计算得到光栅二级衍射效率为0.006 11(10.077 7)。分析表明,该方法采用的测试装置简单,系统不确定度为14.08%,可以实现真空紫外波段光栅二级光谱衍射效率的连续测量。
- 光栅效率/
- 二级衍射效率/
- 真空紫外
Abstract:A method for measuring the second-order diffraction efficiency of a grating in the vacuum ultraviolet region is introduced on the basis of the theory that the sample reflectance is influenced by the second-order diffraction efficiency of the grating. The measuring instrument by using a double path monochromator is also described, which takes a deuterium lap as the light source, a R6095 photomultiplier as the detector, and transforms the violet light into a visible light by a sodium salicylate scintillator film. By using the instrument, the second-order diffraction efficiency of the grating is measured from 120 to 165 nm continuously. Obtained results show that the second-order diffraction efficiency at 161 nm is 0.006 11(10.077 7), and the uncertainty of the system is 14.08%.
- grating efficiency/
- second-order diffraction/
- vacuum ultraviolet

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参考文献 (1)

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