留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

电子束蒸发和离子束溅射HfO2紫外光学薄膜

邓文渊,李春,金春水

downloadPDF
邓文渊, 李春, 金春水. 电子束蒸发和离子束溅射HfO2紫外光学薄膜[J]. , 2010, 3(6): 630-636.
引用本文: 邓文渊, 李春, 金春水. 电子束蒸发和离子束溅射HfO2紫外光学薄膜[J]. , 2010, 3(6): 630-636.
DENG Wen-yuan, LI Chun, JIN Chun-shui. Ultraviolet HfO2 thin film by e-beam evaporation and ion beam sputtering[J]. Chinese Optics, 2010, 3(6): 630-636.
Citation: DENG Wen-yuan, LI Chun, JIN Chun-shui. Ultraviolet HfO2thin film by e-beam evaporation and ion beam sputtering[J].Chinese Optics, 2010, 3(6): 630-636.

电子束蒸发和离子束溅射HfO2紫外光学薄膜

基金项目:

国家重大科技专项

详细信息
    作者简介:

    邓文渊(1974—),男,江西赣州人,副研究员,主要从事紫外及深紫外薄膜光学器件的制备与表征方面的研究。E-mail:dwy101@yahoo.com.cn

  • 中图分类号:O484.4

Ultraviolet HfO2thin film by e-beam evaporation and ion beam sputtering

  • 摘要:HfO2薄膜在紫外光学中具有十分重要的地位,不同方法制备的HfO2薄膜特性不同,可以满足不同的实际应用需求。本文分别利用电子束蒸发和离子束溅射方法制备了用于紫外光区域的HfO2薄膜,并对薄膜的材料和光学特性进行了表征与比较。通过对单层HfO2薄膜的实测透射和反射光谱进行数值反演,得到了HfO2薄膜在230~800 nm波段的折射率和消光系数色散曲线,结果表明两种方法制备的HfO2薄膜在250 nm的消光系数均小于210-3。在此基础上,制备了两种典型的紫外光学薄膜元件(紫外低通滤波器和240 nm高反射镜),其光谱性能测试结果表明,两种不同方法制备的器件均具有较好的光学特性。

  • [1] DANILOV A D,KAROL I L.Atmospheric Ozone-Sensation and Reality[M]. Leningrad:Gidrometeoizdat,1991. [2] 王淑荣,李福田,曲艺. 空间紫外光学遥感技术与发展趋势[J]. 中国光学与应用光学 ,2009,2(1):17-22. WANG SH R,LI F T,QU Y. Technology and development of space ultraviolet remote sensing[J].Chinese J. Opt. Appl. Opt.,2009,2(1):17-22.(in Chinese) [3] 赵建川,陈兆兵,郭劲,等. 基于信噪比的紫外红外复合告警系统模型[J]. 中国光学与应用光学 ,2009,2(3):195-199. ZHAO J CH,CHEN ZH B,GUO J,et al.. Model of UV and IR compounded alarm system based on signal-noise ratio[J].Chinese J. Opt. Appl. Opt.,2009,2(3):195-199.(in Chinese) [4] 吴礼刚,何文荣,胡晋荪,等. 日盲紫外-可见光双光谱照相机系统[J]. 光学 精密工程 ,2010,18(7):1529-1535. WU L G,HE W R,HU J S,et al.. Solar blind UV and visible dual spectral camera[J].Opt. Precision Eng.,2010,18(7):1529-1535.(in Chinese) [5] CHILDS C B. Broad-band UV filters[J].JOSA,1961,51(8):895-897. [6] RAINER F,LOWDERMILK W H,MILAM D,et al.. Materials for optical coatings in the ultraviolet[J].Appl. Opt.,1985,24(4):496-500. [7] SAFIN R G,GANUTDINOV I S,SABIROV R S,et al.. Solar-blind filter for the ultraviolet region[J].J. Opt. Technol.,2007,74(3):208-210. [8] PIEGARIA A,PERRONE M R,PROTOPAP M L. Ultraviolet-graded coatings for lasers:surface optical performance[J].Thin Solid Films,2000,373:155-158. [9] GATTO A,THIELSCH R,HEBER J,et al.. High-performance deep-ultraviolet optics for free-electron lasers[J].Appl. Opt.,2002,41(16):3236-3241. [10] BAUMEISTER P,ARNON O. Use of hafnium dioxide in multilayer dielectric reflectors for the near UV[J].Appl. Opt.,1977,16(2):439-445. [11] FADEL M,AZIMM O A,OMER O A,et al.. A study of some optical properties of hafnium dioxide(HfO2) thin films and their applications[J].Appl. Phys. A,1998,66:335-343. [12] GRILLI F L,MENCHINI F,PIEGARI A,et al.. Al2O3/SiO2and HfO2/SiO2dichroic mirrors for UV solid-state lasers[J].Thin Solid Films,2009,517:1731-1735. [13] ALVISI M,DI GIULIO M,MARRONE S G,et al.. HfO2films with high laser damage threshold[J].Thin Solid Films,2000,358(1-2):250-258. [14] Joint Committe on Powder Diffraction Standards. Diffraction Data File no. 43-1017[S]//International Centre for Diffraction Data,Newtown Square,Pennsylvania,USA,2001. [15] HANN R E,SUITCH P R,PENTECOST J L. Monoclinic crystal structures of ZrO2and HfO2refined from X-ray powder diffraction data[J].J. Am. Ceram. Soc.,1985,68(c):285-286. [16] MODREANU M,SANCHO-PARRAMON J,O'CONNELL D,et al. Solid phase crystallization of HfO2thin films[J].Mater Sci. Eng. B,2005,118:127-131. [17] 唐晋发,顾培夫,刘旭,等.现代光学薄膜技术 [M].浙江:浙江大学出版社,2006. TANG J F,GU P F,LIU X,et al.. Modern Optical Thin Film Technology[M]. Zhejiang:Zhejiang University Press,2006.(in Chinese) [18] TIKHONRAVOV A V,TRUBETSKOV M K. OptiLayer thin film software . .http://www.optilayer.com. [19] THIELSCH R,GATTO A,HEBER J,et al.. A comparative study of the UV optical and structural properties of SiO2, Al2O3, and HfO2single layers deposited by reactive evaporation, ion assisted deposition and plasma ion-assisted deposition[J].Thin Solid Films,2002,410(1-2):86-93. [20] TORCHIO P,GATTO A,ALVISI M,et al.. High-reflectivity HfO2/SiO2ultraviolet mirrors[J].Appl. Opt.,2002,41(16):3256-3261. [21] WANG C J,JIN Y X,ZHANG D P,et al.. A comparative study of the influence of different post-treatment methods on the properties of HfO2single layers[J].Opt. Laser Technol.,2009,41(5):570-573. [22] FOSTER A S,GEJO F L,SHLUGER A L,et al.. Vacancy and interstitial defects in hafnia[J].Phys. Rev. B,2003,65:174117.
  • 加载中
计量
  • 文章访问数:4477
  • HTML全文浏览量:755
  • PDF下载量:1827
  • 被引次数:0
出版历程
  • 收稿日期:2010-07-12
  • 修回日期:2010-09-14
  • 刊出日期:2010-12-20

目录

    /

      返回文章
      返回
        Baidu
        map