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光栅参数测量技术研究进展

刘洪兴,张巍,巩岩

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刘洪兴, 张巍, 巩岩. 光栅参数测量技术研究进展[J]. , 2011, 4(2): 103-110.
引用本文: 刘洪兴, 张巍, 巩岩. 光栅参数测量技术研究进展[J]. , 2011, 4(2): 103-110.
LIU Hong-xing, ZHANG Wei, GONG Yan. Progress in grating parameter measurement technology[J]. Chinese Optics, 2011, 4(2): 103-110.
Citation: LIU Hong-xing, ZHANG Wei, GONG Yan. Progress in grating parameter measurement technology[J].Chinese Optics, 2011, 4(2): 103-110.

光栅参数测量技术研究进展

基金项目:

国家863高技术研究发展计划资助项目(No.863-2-5-1-13B)

详细信息
    作者简介:

    刘洪兴(1986—),男,山东聊城人,博士研究生,主要从事精密检测技术和辐射定标方面的研究。 E-mail:lhxing_888@126.com

  • 中图分类号:O436.1

Progress in grating parameter measurement technology

  • 摘要:光栅参数测量技术是衡量光栅制作水平的重要标准。本文从直接测量法和间接测量法两个角度对现阶段较成熟的光栅参数测量技术进行了研究。重点介绍了原子力显微镜(AFM)测量法、扫描电子显微镜(SEM)测量法、 衍射(LD)测量法以及散射测量术的测量原理和研究进展,指出了这些方法各自的优缺点和适用范围。AFM测量法和SEM测量法均可测得光栅的局部形貌信息,可用于检测光栅表面形貌缺陷;LD测量法和散射测量术反映的是 照射区域的平均结果,其中LD测量法能得到光栅周期参数,而椭偏测量术能得到光栅周期以外的其他形貌参数。这些方法测得的光栅参数结果比较吻合,其中LD测量法不确定度最小,AFM次之,SEM最大。文章最后对未来光栅参数测量技术的发展方向进行了论述。

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出版历程
  • 收稿日期:2011-01-13
  • 修回日期:2011-03-14
  • 刊出日期:2011-04-25

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