Design and analysis of compensation of large aperture optical element for gravity deformation
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摘要:根据弹性板壳理论,建立了大口径光学元件的几种理论模型。提出了一种补偿大口径光学元件重力变形的方法,该方法通过在透镜镜框边缘施加作用力,使透镜产生与重力变形反向的挠性变形,抵消重力变形的影响。建立了带镜框的大口径透镜的分析模型,证明了通过优化施加力的大小和支撑点位置使透镜产生挠性变形的方法能有效消除重力变形的影响。Abstract:According to elastic shell theory, several kinds of theoretical models of large aperture optical elements were established. A compensation method for the gravity deformation from a large aperture optical element was presented. With the method, the torque was applied at the edge of a lens frame to generate flexible deformation to offset the gravity deformation. An analysis model of the large aperture optical element with the frame was proposed, and it proves that the flexible deformation of optical element can effectively eliminate the influence of gravity deformation on the optical cell through optimizing the magnitude of force and the positions of support points.
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[1] 武旭华,陈磊,王磊.Φ300 mm干涉仪参考镜的设计及测试[J]. 光学 精密工程 ,2007,15(8):1235-1240. WU X H,CHEN L,WANG L. Design and test of reference mirror in Φ300 mm interferometer [J].Opt. Precision Eng.,2007,15(8):1235-1240.(in Chinese) [2] 张德江,刘立人,徐荣伟,等. 透镜自重变形引起波像差的有限元分析[J]. 光学学报 ,2005,25(4):538-541. ZHANG D J,LIU L R,XU R W,et al.. Finite element analysis for wavefront error of lenses induced by gravity[J].Acta Opt. Sinca,2005,25(4):538-541.(in Chinese) [3] 谭凡教,乔彦峰,李耀斌,等. 光电经纬仪主镜系统自重变形的有限元分析[J]. 光学仪器 ,2007,29(6):65-68. TAN F J,QIAO Y F,LI Y B,et al.. FEM mechanical analysis for primary mirror self-weight deformation of photo-electronic theodolite[J].Opt. Instruments,2007,29(6):65-68.(in Chinese) [4] 雷江,蒋世磊,程刚. 高精度光刻物镜的变形研究[J]. 光电工程 ,2005,32(2):12-14. LEI J,JIANG SH L,CHENG G. Deformation of high-accuracy photolithographic objective lens[J].Opto-Electronic Eng.,2005,32(2):12-14.(in Chinese) [5] 李福,阮萍,赵葆常. 重力作用下平面反射镜变形研究[J]. 光子学报 ,2005,34(2):272-275. LI F,RUAN P,ZHAO B CH. Study on the surface deformation of flat reflector under gravity load[J].Acta Photonica Sinica,2005,34(2):272-275.(in Chinese) [6] IRIE S,WATANABE T,KINOSHITA H,et al.. Development for the alignment procedure of three-aspherical-mirror optics[J].SPIE,2000,3997:807-813. [7] 江五贵,扶名福. 中厚板壳非线性理论的研究进展[J]. 南昌大学学报( 工科版) ,2000,22(1):10-16. JIANG W G,FU M F. Advances in the research of nonlinear theory of moderately thick shells[J].J. Nanchang University(Engineering&Technology),2000,22(1):10-16.(in Chinese) [8] 孙天祥,杨力,吴永前,等. 基于弹性力学的应力加工方法有限元分析[J]. 强 与粒子束 ,2010,22(2):361-364. SUN T X,YANG L,WU Y Q,et al.. Finite element analysis of stressed mirror polishing based on elasticity mechanics[J].High Power Laser and Particle Beams,2010,22(2):361-364.(in Chinese) [9] 李婧. 变厚度圆板轴对称非线性分析 . 天津:天津大学 ,2004. LI J. Nonlinear analysis of spherical shells with arbitrarily variable thickness .Tianjin:Tianjin University,2004.(in Chinese) [10] 周慎杰,王旭东. 中厚扁球壳弯曲问题的一般解[J]. 福州大学学报(自然科学版) ,1994,22(4):30-35. ZHOU SH J,WANG X D. The regular solution to the bending problem of moderate thick shallow spherical shells[J].J. Fuzhou University(Natural Science),1994,22(4):30-35.(in Chinese) [11] 蔡长安. 周边固支厚圆板受中心集中力弯曲的BESSEL级数解法[J]. 贵州工业大学学报(自然科学版 ),2000,29(3):5-9. CHAI CH A. Bessel series method for bending problem of a thick circular plate with fixed edges loaded by a centric concentrated force[J].J. Guizhou University Technol.(Natural Science Edition),2000,29(3):5-9.(in Chinese) [12] 包世华,张铜生. 扁球壳在集中荷载作用下位移和内力的计算公式和数值表[J]. 工程力学 ,1994,11(2):51-58. BAO SH H,ZHANG T SH. Calculating formulas and numerical tables for deflection and stress resultants of shallow spherical shell under concentrated loads[J].Eng. Mechanics,1994,11(2):51-58.(in Chinese) [13] 王林祥,武际可. 集中载荷作用下弹性球壳大范围非线性问题[J]. 力学学报 ,1997,29(2):232-235. WANG L X,WU J K. Large-scale nonlinear problem of elastic spherical shells subjected to concentrated load [J].Acta Mechanica Sinica,1997,29(2):232-235.(in Chinese) [14] YODER Jr P R.Opto-Mechanical Systems Design[M]. 3rd ed. Bellingham:SPIE PRESS,2006. [15] DOYLE K B,HOFFMAN J M,GENBERG V L,et al.. Stress birefringence modeling for lens design and photonics . International Optical Design Conference,Tucson,Arizona,June 3,2002. [16] DOYLE K B,GENBERG V L,MICHELS G J. Numerical methods to compute optical errors due to stress birefringence[J].SPIE,2002,4769:34-42.
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