Jan. 2022

Article Contents

Chinese Optics> 2022> 15(1): 119-131.

WANG Kai-xuan, CHEN Gang, LIU Ding-quan, MA Chong, ZHANG Qiu-yu. Fabrication of an ultra-narrow band-pass filter with 60 pm bandwidth in green light band[J]. Chinese Optics, 2022, 15(1): 119-131. doi: 10.37188/CO.2021-0092

Citation:

WANG Kai-xuan, CHEN Gang, LIU Ding-quan, MA Chong, ZHANG Qiu-yu. Fabrication of an ultra-narrow band-pass filter with 60 pm bandwidth in green light band[J].Chinese Optics, 2022, 15(1): 119-131.doi:10.37188/CO.2021-0092

Citation:

WANG Kai-xuan, CHEN Gang, LIU Ding-quan, MA Chong, ZHANG Qiu-yu. Fabrication of an ultra-narrow band-pass filter with 60 pm bandwidth in green light band[J].Chinese Optics, 2022, 15(1): 119-131.doi:10.37188/CO.2021-0092

PDF( 5106 KB)

Fabrication of an ultra-narrow band-pass filter with 60 pm bandwidth in green light band

doi:10.37188/CO.2021-0092

WANG Kai-xuan^{1, 2, 3,},
CHEN Gang^1,,
LIU Ding-quan^{1, 2, 3,,},
MA Chong¹,
ZHANG Qiu-yu^{1, 3}

1.
Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
2.
School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China
3.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds:Supported by Natural Science Foundation of Shanghai Municipality, China (No. 17ZR1434900)

More Information

Author Bio:
Wang Kai-xuan (1992—), male, born in Bozhou, Anhui Province. Doctor. He received his Bachelor’s degree from Beijing University of Aeronautics and Astronautics in 2013. Now he mainly engages in the research of optical thin film materials and devices. E-mail:wangkx@shanghaitech.edu.cn
Chen Gang (1983—), male, born in Yinxian County, Zhejiang Province. Doctor and senior engineer. He mainly engages in the design, development and space application of optical films. E-mail:gangchen@mail.sitp.ac.cn
Liu Ding-quan (1964—), male, born in Chenggu, Shaanxi Province. Doctor, doctoral supervisor and researcher. Currently he is the director of the research office of optical films, materials and devices, and the distinguished professor of Shanghai University of Science and Technology. His research is focused on the thin film optics and technology, infrared optical thin film and space application, and micro nano optics, etc. E-mail:dqliu@mail.sitp.ac.cn
Corresponding author:dqliu@mail.sitp.ac.cn
Received Date:23 Apr 2021
Rev Recd Date:21 May 2021
Accepted Date:11 Aug 2021

Available Online:11 Aug 2021

Publish Date:19 Jan 2022

Abstract

Abstract

Owing to the strong penetrating ability in the atmosphere, 532 nm-wavelength green laser has wide applications including free-space optical communications and laser three-dimensional mapping. A spectral filter, with a half-power bandwidth of less than 100 pm, is an important optical element to suppress the interference of background light. Therefore, an ultra-narrow band-pass filter based on optical interference film is designed and fabricated in this paper. The high and low refractive index film are made of tantalum pentoxide (Ta ₂O ₅) and silicon dioxide (SiO ₂), respectively. The designed optical thin films are deposited on a fused quartz substrate by double-ion-beam sputtering deposition method. The transmission spectra of the filters are measured by a tunable laser and a power meter. The half-power bandwidths of the filters are (60±2) pm, and the transmittance reaches 62.6%.
- optical thin film,
- thin film filter,
- picometer bandwidth,
- green light band,
- space laser mapping

FullText(HTML)

References (22)

References

[1]	YU A W, STEPHEN M A, LI S X, et al. Space laser transmitter development for ICESat-2 mission[J]. Proceedings of SPIE, 2010, 7578: 757809. doi:10.1117/12.843342
[2]	SAWRUK N W, STEPHEN M A, LITVINOVITCH S, et al. Space qualified laser transmitter for NASA’s ICESat-2 mission[J]. Proceedings of SPIE, 2013, 8599: 85990O. doi:10.1117/12.2005590
[3]	GAO SH J, WU J B, LIU Y K, et al. Development status and trend of micro-satellite laser communication systems[J]. Chinese Optics, 2020, 13(6): 1171-1181. (in Chinese) doi:10.37188/CO.2020-0033
[4]	DONG Q R, CHEN T, GAO SH J, et al. Progress of research on satellite-borne laser communication technology[J]. Chinese Optics, 2019, 12(6): 1260-1270. (in Chinese) doi:10.3788/co.20191206.1260
[5]	TROUPAKI E, DENNY Z H, WU S, et al. Space qualification of the optical filter assemblies for the ICESat-2/ATLAS instrument[J]. Proceedings of SPIE, 2015, 9346: 93460H.
[6]	WANG J Y, SHU R, LIU Y N, et al.. Introduction to Imaging Spectroscopy[M]. Beijing: Science Press, 2011: 90-110. (in Chinese)
[7]	HAN F, LIU H J, SUN D S, et al. An ultra-narrow bandwidth filter for daytime wind measurement of direct detection Rayleigh lidar[J]. Current Optics and Photonics, 2020, 4(1): 69-80.
[8]	GAYEN S K, BILLMERS R I, CONTARINO V M, et al. Induced-dichroism-excited atomic line filter at 532 nm[J]. Optics Letters, 1995, 20(12): 1427-1429. doi:10.1364/OL.20.001427
[9]	XU CH, XIAO O L, MA J Y, et al. High temperature annealing effect on structure, optical property and laser-induced damage threshold of Ta ₂O ₅films[J]. Applied Surface Science, 2008, 254(20): 6554-6559. doi:10.1016/j.apsusc.2008.04.034
[10]	ZHAO Q, PU Y T, HAO L, et al. Residual stress and laser-induced damage of ion-beam sputtered Ta ₂O ₅/SiO ₂mixture coatings[J]. Thin Solid Films, 2015, 592: 221-224. doi:10.1016/j.tsf.2015.06.023
[11]	LV Q P, HUANG M L, ZHANG SH Q, et al. Effects of annealing on residual stress in Ta ₂O ₅films deposited by dual ion beam sputtering[J]. Coatings, 2018, 8(4): 150. doi:10.3390/coatings8040150
[12]	KIM S H, HWANGBO C K. Derivation of the center-wavelength shift of narrow-bandpass filters under temperature change[J]. Optics Express, 2004, 12(23): 5634-5639. doi:10.1364/OPEX.12.005634
[13]	TANG J F, GU P F, LIU X, et al.. Modern Optical Thin Film Technology[M]. Hangzhou: Zhejiang University Press, 2006: 144-146. (in Chinese)
[14]	MACLEOD H A. Thin-Film Optical Filters[M]. Boca Raton: Taylor & Francis, 2010: 310-313.
[15]	CHEN G. Research on the near infrared optical properties of several metal oxide thin films and narrow bandpass filters for space remote sensing[D]. Shanghai: Shanghai Institute of Technical Physics Chinese Academy of Sciences, 2020: 56-68. (in Chinese)
[16]	CHANELIERE C, AUTRAN J L, DEVINE R A B, et al. Tantalum pentoxide (Ta ₂O ₅) thin films for advanced dielectric applications[J]. Materials Science and Engineering: R: Reports, 1998, 22(6): 269-322. doi:10.1016/S0927-796X(97)00023-5
[17]	YUAN W J, SHEN W D, ZHENG X W, et al. Optical and mechanical properties and microstructures of Nb ₂O ₅, Ta ₂O ₅and SiO ₂thin films prepared by ion beam sputtering[J]. Acta Optica Sinica, 2017, 37(12): 1231001. (in Chinese)
[18]	JIANG Y G, LIU H S, CHEN D, et al. Ultraviolet absorption film technology based on ion beam sputtering Ta ₂O ₅thin films[J]. Optics and Precision Engineering, 2019, 27(3): 527-532. (in Chinese) doi:10.3788/OPE.20192703.0527
[19]	SHANG P, XIONG SH M, LI L H, et al. Optical constants and properties of dual-ion-beam sputtering Ta ₂O ₅/SiO ₂thin film by spectroscopy[J]. Acta Optica Sinica, 2014, 34(5): 0531002. (in Chinese) doi:10.3788/AOS201434.0531002
[20]	WU Q D. Nucleation and growth of vapor phase deposition on solid surfaces[J]. Vacuum, 1990, 41(4-6): 1431-1433. doi:10.1016/0042-207X(90)93980-W
[21]	WAKAKI M, KUDO K, SHIBUYA T. Physical Properties and Data of Optical Materials[M]. Boca Raton: CRC Press, 2007: 301-330.
[22]	ZHU X D, ZHANG R J, ZHENG Y X, et al. Spectroscopic ellipsometry and its applications in the study of thin film materials[J]. Chinese Optics, 2019, 12(6): 1195-1234. (in Chinese) doi:10.3788/co.20191206.1195