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Chinese Optics> 2023> Accepted Manuscript

WANG Zhen-yu, FU Xiu-hua, LIN Zhao-wen, HUANG Jian-shan, WEI Yu-jun, WU Gui-qing, PAN Yong-gang, DONG Suo-tao, WANG Ben. Development of high-precision beam splitter for inter-satellite communication system[J]. Chinese Optics. doi: 10.37188/CO.2023-0100

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Development of high-precision beam splitter for inter-satellite communication system

doi:10.37188/CO.2023-0100

WANG Zhen-yu^{1, 2,},
FU Xiu-hua^{1, 2,,},
LIN Zhao-wen^{2, 3},
HUANG Jian-shan³,
WEI Yu-jun^{1, 2},
WU Gui-qing³,
PAN Yong-gang^{2, 3},
DONG Suo-tao²,
WANG Ben^{2, 3}

1.
School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, China
2.
Zhongshan Institute of Changchun University of Science and Technology, Zhongshan 528437, China
3.
Zhongshan Jilion Optoelectronics Technology Co., Ltd., Zhongshan 528437, China

Funds:Supported by the second batch of social welfare and basic research projects in Zhongshan city in 2022 (No. 2022B2005)、Changchun Laser Manufacturing and Testing Equipment Science and Technology Innovation Center Changhe (No. 2014219)

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Corresponding author:goptics@126.com
Available Online:28 Sep 2023

Abstract

Abstract

With the rapid development of inter-satellite communication systems, the requirements for data transmission accuracy are constantly increasing. As the core component, the spectral characteristics and surface shape accuracy of the beam splitter directly affect the transmission accuracy of the whole system. In this paper, based on the interference theory of thin film, Ta₂O₅and SiO₂were selected as the high and low refractive index film materials for the design of the film system, and electron beam evaporation was used to prepare a high-precision beam splitter on a quartz substrate. At the same time, a surface shape correction model was established based on the principle of film stress compensation to control the surface shape. Through the detection of a spectral analyzer, the transmittance of beam splitter is greater than 98% at 1563 nm and the reflectance is greater than 99% at 1540 nm within the incidence range of 21.5° to 23.5°. The surface shape was measured by laser interferometer, the reflective surface shape accuracy RMS is corrected from λ/10 to λ/90 (λ=632.8 nm), and the transmissive optical surface shape accuracy RMS is λ/90.
- inter-satellite communication,
- beam splitter,
- stress compensation,
- surface accuracy

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References (16)

References

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