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Chinese Optics> 2023> Accepted Manuscript

BAO Ming-di, SHI Guo-hua, XING Li-na, HE Yi. A study of high-precision spherical wave calibration method for shack-hartmann wavefront sensor[J]. Chinese Optics. doi: 10.37188/CO.2023-0148

Citation:

BAO Ming-di, SHI Guo-hua, XING Li-na, HE Yi. A study of high-precision spherical wave calibration method for shack-hartmann wavefront sensor[J].Chinese Optics.doi:10.37188/CO.2023-0148

BAO Ming-di, SHI Guo-hua, XING Li-na, HE Yi. A study of high-precision spherical wave calibration method for shack-hartmann wavefront sensor[J]. Chinese Optics. doi: 10.37188/CO.2023-0148

Citation:

BAO Ming-di, SHI Guo-hua, XING Li-na, HE Yi. A study of high-precision spherical wave calibration method for shack-hartmann wavefront sensor[J].Chinese Optics.doi:10.37188/CO.2023-0148

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A study of high-precision spherical wave calibration method for shack-hartmann wavefront sensor

doi:10.37188/CO.2023-0148

BAO Ming-di^1,,
SHI Guo-hua^{1, 2,,},
XING Li-na^{1, 2},
HE Yi^{1, 2,,}

1.
School of Biomedical Engineering (Suzhou), University of Science and Technology of China, Suzhou, Jiangsu, 215163, China
2.
Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou, Jiangsu, 215163, China

Funds:Supported by the National Natural Science Foundation of China (No. 62075235); the National Key Research and Development Program of China (No. 2021YFF0700700); Youth Innovation Promotion Association (No.2019320); the Strategic Priority Research Program of the Chinese Academy of Sciences (No. XDA16021304)

More Information

Corresponding author:shigh@sibet.ac.cn;heyi@sibet.ac.cn
Available Online:05 Dec 2023

Abstract

Abstract

To address the issues of inaccurate measurements and unstable calibration processes in conventional Shack-Hartmann wavefront sensors (SHWFS), we propose a high-precision absolute calibration method using spherical waves generated by the sensor. The SHWFS experiences an extremely precise calibration process with 128×128 sub-apertures. This is achieved using a method of spherical wave obtained through theoretical derivation in conjunction with the constructed experimental device for spherical wave calibration. The structural parameters of the SHWFS ( f , w , and L ₀) are calculated precisely. Also, the measurement accuracy of the SHWFS is verified following calibration. The experimental results demonstrate that by using this method to calibrate the Shack-Hartmann wavefront sensor, its wavefront recovery accuracy reaches a PV of 1.376×10⁻²λ and an RMS of 4×10⁻³λ (where λ=625 nm), respectively. Additionally, its repeatability accuracy reaches a PV of 3.2×10⁻³λ and an RMS of 9.76×10⁻⁴λ (where λ=625 nm), respectively. These findings suggest that this method is suitable for enhancing the measurement accuracy of high-precision calibration of SHWFS with large aperture.
- Shack-Hartmann wavefront sensor,
- absolute calibration,
- spherical wavefront

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References (18)

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