| Citation: | HU Li-fa, JIANG Lv, HU Qi-li, XU Xing-yu, HUANG Yang, WU Jing-jing, YU Lin. Compact voice coil deformable mirror with high wavefront fitting precision[J].Chinese Optics, 2023, 16(6): 1463-1474.doi:10.37188/CO.EN-2023-0001
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To meet the requirements of wavefront distortion correction for miniaturized adaptive optics systems, a Deformable Mirror (DM) using micro voice coil actuators was designed based on systematic theoretical analysis. The structural parameters of the micro voice coil actuator were optimized by electromagnetic theory and the finite element method. The DM was optimized with respect to thermal deformation, resonance frequency, coupling coefficient and other parameters. Finally, wavefront fitting and residual calculation were completed according to the influence function. The optimized 69-element Voice Coil Deformable Mirror (VCDM) has a large phase stroke, good thermal stability, and a large first resonance of 2220 Hz. The RMS of the fitting residuals of the VCDM for the first 35 Zernike modes with a PV value of 1 μm are all below 30 nm. For complex random aberrations, the compact VCDM can reduce the wavefront RMS to less than 10%. Compared with a traditional VCDMs, the results of our compact VCDM indicate that it has a higher wavefront fitting precision. The compact VCDM with high performance and low cost has good potential applications in human retinal or airborne imaging systems.
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