CCD/EMCCD Photoelectronic Parameter Test System: design and use

This article describes design and using of the developed equipment that intended for measuring of CCD and EMCCD (electron multiplying charge-coupled device) chips photoelectrical parameters. Test system provides measurements of dark currents, responsivity of output amplifier, efficiency of charge transfer, charge capacity and other parameters testing in automatic and manual mode. The system can be configured for measurements of different format and architecture CCD/EMCCD both on wafer and in package. The developed equipment was used for 576 × 288, 640 × 512, 768 × 576, 1024 × 1024, 1280 × 1024 CCD and EMCCD chip testing and sorting.