Compensation of misalignment error on testing aspheric surface by subaperture stitching interferometry

[1] HNSEL T,NICKEL A,SCHINDLER A. Stitching interferometry of aspherical surfaces[J]. SPIE,2001,4449:265-275. [2] CATANZARO B,CONNELL S. Cryogenic(70K) measurement of an all-composite 2-meter diameter mirror[J]. SPIE,2001,4444:238-255. [3] JON F,PAUL D,PAUL E M, et al.. An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces[J]. SPIE,2007,5188:296-307. [4] TRICARD M,SHOREY A,HALLOCK B, et al.. Cost-effective, subaperture approaches to finishing and testing astronomical optics[J]. SPIE,2006,6273:62730L. [5] MURPHY P,FLEIG J,FORBES G. Subaperture stitching interferometry for testing mild aspheres[J]. SPIE,2006,6293:62930J. [6] 巩岩,赵磊. 单点金刚石机床及其在光学工程领域的应用[J]. 中国光学,2011,4(6):537-545. GONG Y,ZHAO L. Single point diamond machines and their applications to optical engineering[J]. Chinese Optics,2011,4(6):537-545.(in Chinese) [7] ZHAO CH Y,BURGE J H. Stitching of off-axis sub-aperture null measurements of an aspheric surface[J]. SPIE,2008,7063:706316. [8] MARC T,PAUL D,GREG F. Sub-aperture approaches for asphere polishing and metrology[J]. SPIE,2005,5638:284-299. [9] 王孝坤,王丽辉,张学军,等. 子孔径拼接法检测非球面[J]. 光学 精密工程,2007,15(2):527-532. WANG X K,WANG L H,ZHANG X J. Testing asphere by subaperture stitching interferometric method[J]. Opt. Precision Eng.,2007,15(2):192-198.(in Chinese) [10] 潘君骅.光学非球面的设计、加工和检验[M]. 北京:科学出版社,1994. PAN J H. Design, Fabrication and Testing of Optical Aspheres[M]. Beijing:Science Press,1994.(in Chinese) [11] MALACARA D. Optical Shop Testing[M]. New York:John Wiley & Sons,Inc.1992. [12] 侯溪,伍凡. 大型双曲面次镜面形检测技术现状及发展趋势[J]. 中国光学与应用光学,2010,3(4):310-317. HOU X,WU F. Status and trends of surface measurement technologies for large hyperboloidal secondary mirrors[J]. Chinese J. Opt. Appl. Opt.,2010,3(4):310-317.(in Chinese) [13] 韩昌元. 近代高分辨地球成像商业卫星[J]. 中国光学与应用光学,2010,3(3):201-208. HAN CH Y. Recent earth imaging commercial satellites with high resolutions[J]. Chinese J. Opt. Appl. Opt.,2010,3(3):201-208.(in Chinese) [14] WANG X K,WANG L H. Measurement of large aspheric surfaces byannular subaperture stitching interferometry[J]. Chinese Optics Letters,2007,11(5):645-647. [15] WANG X K,ZHENG L G,ZHANG B Z, et al.. Subaperture stitching interferometry for testing of a large hyperboloid[J]. Infrared and Laser Eng.,2009,38(1):88-93. [16] WANG X K,ZHENG L G,ZHANG B ZH, et al.. Test of an off-axis asphere by subaperture stitching interferometry[J]. SPIE,2009,7283:72832J.