Design of an high-efficiency wheeled polishing tool combined with co-rotation and self-rotation movement

In order to improve the material removal rate and reduce the fabricating cycle of large aperture optical components, a new type of high-efficiency polishing method combined with self-rotation and co-rotation movement is proposed in this paper.The structure, working principle and removal characteristics are studied.First, the mechanical structure and working principle are introduced.According to the Hertz contact theory and Preston equation, the removal function is modeled, and the shape of the removal function of different rotational speed ratio is discussed.Then, according to the theoretical model, the removal function, process parameters and stability experiments are carried out to study the influence of process parameters such as the depth and speed on the removal result.Finally, the fabrication simulation of the 200 mm diameter SiC workpiece is carried out.The experimental results show that the removal rate of the body is 0.197 mm ³/min and the diameter of removal region is 19.23 mm when the pressure depth is 2 mm and the rotation speed is 200 rpm, which is more efficient than the traditional CCOS Technology.After 3.7 hours of simulation polishing, the initial face shape of 200 mm SiC workpiece with 3.008 λPV(Peak-to-valley) and 0.553 λRMS(Root Mean Square) is improved to 0.065 λPV, 0.005 λRMS, and the convergence efficiency is 98.18%.